Invention Grant
- Patent Title: Intermediate raw material, and polishing composition and composition for surface treatment using the same
-
Application No.: US17486008Application Date: 2021-09-27
-
Publication No.: US11692137B2Publication Date: 2023-07-04
- Inventor: Tsutomu Yoshino , Ayano Yamazaki , Satoru Yarita , Shogo Onishi , Yasuto Ishida
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI CORPORATION
- Current Assignee: FUJIMI CORPORATION
- Current Assignee Address: JP Kiyosu
- Agency: Foley & Lardner LLP
- Priority: JP 18178741 2018.09.25 JP 19149158 2019.08.15
- The original application number of the division: US16579323 2019.09.23
- Main IPC: C09K13/06
- IPC: C09K13/06 ; H01L21/321 ; C09G1/02 ; C09G1/04 ; H01L21/02 ; H01L21/306 ; C09K13/00 ; C09K3/14 ; H01L21/3105
Abstract:
An intermediate raw material according to the present invention includes a charge control agent having a critical packing parameter of 0.6 or more and a dispersing medium and a pH of the intermediate raw material is less than 7.
Public/Granted literature
Information query
