Invention Publication
- Patent Title: METHOD AND APPARATUS FOR ALIGNING WAFER USING LASER SCANNER, SEMICONDUCTOR TRANSFER DEVICE
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Application No.: US18134489Application Date: 2023-04-13
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Publication No.: US20240112938A1Publication Date: 2024-04-04
- Inventor: Hee Jae BYUN , Kyo Bong KIM , Chan Young CHOI , Wan Hee JEONG , Sang Oh KIM
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Priority: KR 20220122056 2022.09.27
- Main IPC: H01L21/68
- IPC: H01L21/68 ; B25J11/00 ; B25J13/08 ; H01L21/67 ; H01L21/687

Abstract:
A method and apparatus for aligning a wafer using a laser scanner, and a semiconductor transfer device are provided. The method includes a laser irradiation operation of irradiating a laser toward the wafer using a laser scanner disposed on a rear side or a lower side of the wafer and obtaining an image, a dataset acquisition operation of obtaining location information of at least three wafer edges by using a distance corresponding to a laser irradiation direction to a wafer edge in the image, a calculation operation of calculating a center point of the wafer by using the obtained location information of the wafer edge, and a detection operation of detecting whether a calculated center point is within a preset tolerance range.
Information query
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