Invention Grant
- Patent Title: System and method for generation of extreme ultraviolet light
- Patent Title (中): 用于产生极紫外光的系统和方法
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Application No.: US14335442Application Date: 2014-07-18
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Publication No.: US09544984B2Publication Date: 2017-01-10
- Inventor: Alexander Bykanov , Oleg Khodykin , Daniel C. Wack , Konstantin Tsigutkin , Layton Hale , Joseph Walsh , Frank Chilese , Rudy F. Garcia , Brian Ahr
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01J1/42
- IPC: G01J1/42 ; H05G2/00 ; G01J1/16 ; G01N21/956 ; G03F7/20

Abstract:
An EUV light source includes a rotatable, cylindrically-symmetric element having a surface coated with a plasma-forming target material, a drive laser source configured to generate one or more laser pulses sufficient to generate EUV light via formation of a plasma by excitation of the plasma-forming target material, a set of focusing optics configured to focus the one or more laser pulses onto the surface of the rotatable, cylindrically-symmetric element, a set of collection optics configured to receive EUV light emanated from the generated plasma and further configured to direct the illumination to an intermediate focal point, and a gas management system including a gas supply subsystem configured to supply plasma-forming target material to the surface of the rotatable, cylindrically-symmetric element.
Public/Granted literature
- US20150076359A1 System and Method for Generation of Extreme Ultraviolet Light Public/Granted day:2015-03-19
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