公开(公告)号：EP2771678B1

公开(公告)日：2021-06-23

申请号：EP12794574.9

申请日：2012-10-24

发明人： DURST, Roger ,  KAERCHER, Joerg ,  WACHTER, Gregory ,  CHAMBERS, John

IPC分类号： G01N23/207

公开(公告)号：EP3385705A1

公开(公告)日：2018-10-10

申请号：EP18165543.2

申请日：2018-04-03

申请人： Bruker AXS, Inc.

发明人： He, Bob Boaping

IPC分类号： G01N23/207

摘要： A method and apparatus for performing an X-ray diffraction measurement with a diffractometer having an X-ray beam directed at a sample and a two-dimensional X-ray detector includes the performance of a physical scan during which the detector is moved through a scanning range in an angular direction about the sample position. To provide a uniform exposure time, the detector, when located at an extreme of the scanning range, is controlled to progressively change the portion of the detected X-ray energy that is used at a rate that maintains a uniform exposure time for each angular position in the scanning range. Alternatively, when located at an extreme of the range, the detector is kept stationary until a desired minimum exposure time is obtained for each angular position, after which the collected diffraction data is normalized relative to exposure time.

公开(公告)号：EP3185005A1

公开(公告)日：2017-06-28

申请号：EP16205335.9

申请日：2016-12-20

申请人： Bruker AXS, Inc.

发明人： He, Bob Boaping ,  Meding, Olaf ,  Maurer, Christian ,  Ollinger, Christoph

IPC分类号： G01N23/207

CPC分类号： G01N23/207 ,  G01N23/20016 ,  G01N2223/051 ,  G01N2223/0566 ,  G01N2223/1016 ,  G01N2223/33 ,  G01N2223/401 ,  G06T5/001 ,  G06T5/50 ,  G06T2207/10116

摘要： An X-ray diffraction system uses a two-dimensional detector to detect diffracted X-ray energy at a plurality of radial positions surrounding a sample location, the results at each position being combined to form a final diffraction image. To minimize smearing in the final image, the detector pixel intensities at each position are reapportioned among the pixel locations prior to being combined with the intensities collected at other positions. A two-dimensional pixel array space of the detector is projected onto a cylinder to form a projected pixel array space, and a virtual cylindrical detection surface representative of an ideal cylindrical detector is determined. An overlap between the pixels of the projected pixel array space and the pixels of the virtual cylindrical detection surface is determined, and pixel intensities are reapportioned accordingly. The reapportionment may include dividing each pixel space into subpixels and redistributing the subpixels among adjacent pixels.

摘要翻译： X射线衍射系统使用二维检测器来检测围绕样品位置的多个径向位置处的衍射X射线能量，每个位置处的结果被组合以形成最终衍射图像。 为了使最终图像中的污点最小化，每个位置处的检测器像素强度在与其他位置收集的强度相结合之前在像素位置之间重新分配。 将检测器的二维像素阵列空间投影到圆柱体上以形成投影像素阵列空间，并且确定代表理想柱面检测器的虚拟柱面检测表面。 投影像素阵列空间的像素与虚拟柱面检测表面的像素之间的重叠被确定，并且像素强度被相应地重新分配。 重新分配可以包括将每个像素空间分成子像素并在相邻像素之间重新分配子像素。

公开(公告)号：EP2972255A1

公开(公告)日：2016-01-20

申请号：EP14723527.9

申请日：2014-03-11

申请人： Bruker AXS, Inc.

发明人： DURST, Roger ,  LAGGNER, Peter ,  MEDVED, Sergei ,  BECKER, Bruce

IPC分类号： G01N23/201

CPC分类号： G01T1/1606 ,  G01N23/201 ,  G01N2223/054 ,  G01T1/24 ,  H01L31/085 ,  Y10T29/4913

摘要： A detector for a small-angle x-ray diffraction system uses curved readout strips shaped to correspond to the expected intensity distribution of x-rays scattered by the system. This expected intensity distribution may be a series of concentric circles, and each of the strips has a shape that approximates a section of an annulus. The strips may be positioned on a substrate such that a center of curvature of the curved strips is located along an edge of a readout region within which the strips are located or, alternatively, at a geometric center of the readout region. The detector may have a signal readout system that uses a delay line or, alternatively, a multichannel readout system. The detector may make use of electron generation via interaction of the diffracted x-ray beam with a gas in a gas chamber, or through interaction of the diffracted beam with a semiconductor material.

摘要翻译： 用于小角度X射线衍射系统的检测器使用弯曲的读出条，其形状对应于由系统散射的x射线的预期强度分布。 该预期强度分布可以是一系列同心圆，并且每个条具有近似于环的一部分的形状。 条带可以定位在基底上，使得弯曲条带的曲率中心沿着条带所在的读出区域的边缘或者替代地位于读出区域的几何中心处。 检测器可以具有使用延迟线的信号读出系统，或者可选地，多通道读出系统。 检测器可以通过衍射X射线束与气室中的气体的相互作用或通过衍射光束与半导体材料的相互作用来利用电子产生。

公开(公告)号：EP1632770B1

公开(公告)日：2008-06-18

申请号：EP05016384.9

申请日：2005-07-28

申请人： Bruker AXS, Inc.

发明人： Boaping, He Bob ,  Frampton, Christopher S. ,  Burgäzy, Frank W.

IPC分类号： G01N23/22 ,  G01N23/20

CPC分类号： G01N23/2206 ,  B01J2219/00707 ,  G01N23/20 ,  G01N23/20016 ,  G01N23/227

公开(公告)号：EP1477796A3

公开(公告)日：2004-12-01

申请号：EP04010240.2

申请日：2004-04-29

申请人： Bruker AXS, Inc.

发明人： He, Bob Baoping ,  Schipper, Rolf Dieter

IPC分类号： G01N23/201

CPC分类号： G01N23/201

摘要： The system may function in a beam-up or a beam-down configuration. An x-ray source provides an initial x-ray beam that is directed vertically along a primary beampath to a sample located on a sample support. The small angle scattered x-ray energy travels through a secondary beampath to a detector. The primary and secondary beampaths may be evacuated and separated from a sample chamber by fluid seals. Beam conditioning optics and a collimator may be used in the primary beampath, and a beamstop used in the secondary beampath. The sample chamber may have a microscope or camera, which may be movable, for observing the sample, and a translation stage for moving the sample in at least two dimensions.

公开(公告)号：EP1024356A2

公开(公告)日：2000-08-02

申请号：EP99124429.4

申请日：1999-12-08

申请人： Bruker AXS, Inc.

发明人： He, Bob Baoping ,  Smith, Kingsley L.

IPC分类号： G01N23/20

CPC分类号： G01N23/20

摘要： A radiation scattering measurement system, such as an x-ray diffraction system, uses a modified beamstop, or attenuator, to allow simultaneous detection of energy scattered from a sample and energy transmitted through the sample. Rather than entirely blocking the transmitted beam energy from reaching a detector of the system, the attenuator blocks only an outer portion of the transmitted beam, so that a shadow region is created on the detector surrounding the detector region upon which the transmitted beam is incident. This local region of minimum intensity defines a boundary on the detector between the transmitted beam energy and the energy scattered from the sample. The attenuator also reduces the per-unit-area intensity of the transmitted beam using a broadband filter element, so that the transmitted beam does not saturate the detector. A single detector frame is taken containing the beam energy and the scattered energy, and the minimum intensity boundary between the two is located. The measurements from the different detector regions are then used to determine the relative intensity between the transmitted beam and the scattered energy, and a transmission coefficient is calculated.

摘要翻译： 辐射散射测量系统，例如x射线衍射系统，使用修改的光束阻挡或衰减器，以允许同时检测从样品散射的能量和通过样品传输的能量。 衰减器不是完全阻止传输的光束能量到达系统的检测器，而是仅阻挡透射光束的外部部分，从而在发射光束入射的检测器区域周围的检测器上产生阴影区域。 该局部最小强度区域定义了检测器在透射光束能量与从样品散射的能量之间的边界。 衰减器还使用宽带滤波器元件降低发射波束的每单位面积强度，使得透射光束不会使检测器饱和。 采用单个检测器框架，其包含光束能量和散射能量，并且位于两者之间的最小强度边界。 然后使用来自不同检测器区域的测量来确定透射光束和散射能量之间的相对强度，并计算透射系数。

公开(公告)号：EP3599459A3

公开(公告)日：2020-03-04

申请号：EP19187229.0

申请日：2019-07-19

申请人： Bruker AXS, Inc.

发明人： Giencke, Jonathan

IPC分类号： G01N23/00 ,  G01N23/20 ,  G01N23/207

摘要： A two-dimensional X-ray diffractometer uses an X-ray source that emits a divergent beam toward a sample under test. The divergent beam has a substantially fixed width in a first direction perpendicular to its propagation direction, and a thickness in a second direction perpendicular to the propagation direction that increases proportionally to a distance from the source. An aperture may be used to block a portion of the beam in the second direction, and the sample is positioned so that the beam illuminates a two-dimensional area of the sample surface. The detector detects an X-ray signal diffracted from the sample across a two-dimensional detection area, and may use a one-dimensional detector array that collects diffracted X-ray signal at a number of different positions. The source, detector and sample may be mounted to a goniometer to maintain them in a desired relative orientation.

公开(公告)号：EP3599459A2

公开(公告)日：2020-01-29

申请号：EP19187229.0

申请日：2019-07-19

申请人： Bruker AXS, Inc.

发明人： Giencke, Jonathan

IPC分类号： G01N23/00 ,  G01N23/20

摘要： A two-dimensional X-ray diffractometer uses an X-ray source that emits a divergent beam toward a sample under test. The divergent beam has a substantially fixed width in a first direction perpendicular to its propagation direction, and a thickness in a second direction perpendicular to the propagation direction that increases proportionally to a distance from the source. An aperture may be used to block a portion of the beam in the second direction, and the sample is positioned so that the beam illuminates a two-dimensional area of the sample surface. The detector detects an X-ray signal diffracted from the sample across a two-dimensional detection area, and may use a one-dimensional detector array that collects diffracted X-ray signal at a number of different positions. The source, detector and sample may be mounted to a goniometer to maintain them in a desired relative orientation.

公开(公告)号：EP3425378B1

公开(公告)日：2019-12-25

申请号：EP18179237.5

申请日：2018-06-22

申请人： Bruker AXS, Inc.

发明人： HE, Bob Boaping

IPC分类号： G01N23/2055