摘要:
A method for manufacturing ink jet recording heads comprises the steps of forming a film of a first inorganic material in the form of ink flow path pattern using the soluble first inorganic material on the substrate having ink discharge pressure generating elements formed thereon, forming a film of a second inorganic material becoming ink flow walls on the film of the first inorganic material using the second inorganic material, forming ink discharge openings on the film of the second inorganic material above the ink discharge pressure generating elements, and eluting the film of the first inorganic material. With the method thus arranged, it becomes passible to set the ink discharge pressure generating elements and the ink discharge openings (ports) of each head in extremely high precision in a shorter distance with a good reproducibility to record images in higher quality without any deformation of the head due to the applied heat, while providing a good resistance to ink and erosion, as well as a higher dimensional precision and reliability that may be affected otherwise by swelling or the like.
摘要:
A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element.
摘要:
In an angular velocity sensor, there are provided a flat substrate (101) having a flat surface, a movable portion (102) provided to a portion of the substrate and adapted to be vibrated in a direction (A) perpendicular to the substrate surface, a first weight portion (103) provided to one portion of the movable portion (102), second weight portion (203) provided to another portion of the movable portion (102), first and second beam portions (104,204) extending in first and second directions which are different from each other in the substrate surface and supporting the first and second weight portions (103,203), respectively. The movable portion (102) is vibrated in the direction (A) perpendicular to the substrate surface. Deformations of the first and second beam portions (104,204) generated upon reception of Coriolis' forces when the substrate (101) is rotated about the first and second directions as rotational axes (113,114) are detected. Angular velocities of rotations about the first and second directions as the rotational axes (113,114) are detected on the basis of the deformations of the first and second beam portions (104,204).
摘要:
An apparatus for inputting and/or outputting information comprises a plurality of probes (4) arranged at positions respectively facing each of the plural blocks (28) which carry information, means (2,3,34,35,36,37) for enabling the aforesaid plurality of probes to respectively perform its tracking independently, and means (30,31,32,33) for inputting and/or outputting information to or from the information carrier by the use of the aforesaid probes.
摘要:
An apparatus for relatively moving a probe facing an information carrier and recording and/or reproducing information to and/or from the information carrier by the probe is provided with means for detecting an error in the side of the relatively moved probe.
摘要:
An anode bonding method for bonding a first substrate and a second substrate, both of which have a recessed portion, includes the steps of heating the first and second substrates in a stacked state; and bonding the substrates by applying a voltage between the substrates.