摘要:
Un capteur de pression (10, 49, 140) utilise l'effet de différents modules élastiques entre des couches (20, 21; 36, 38; 53, 54; 123, 124; 146, 147) ou parties de matières différentes liées ensemble pour former un corps (17, 35, 52, 122, 145), de sorte que lorsque l'unité de matières liées (17, 35, 52, 122, 145) est soumise à une pression externe hydrostatique uniforme, les différences dans les modules élastiques de chacune des matières provoquent la déflexion desdites matières de manière prévisible proportionnelle à la pression. On peut mesurer la quantité de gauchissement ou de déflexion du corps (17, 35, 52, 122, 145) de matières, en fonction de la pression. Spécifiquement, on peut lier deux couches de matières (20, 21; 36, 38; 53, 54; 123, 124; 146, 147), telles que du silicium (20, 38, 54, 123-146) et du verre de borosilicate (21, 36, 53, 124, 147), ayant des modules élastiques sensiblement différents, sur une surface d'interface (40, 55) afin de former un ensemble (17, 35, 52, 122, 145), et lorsqu'on exerce une pression sensiblement uniforme sur les surfaces extérieures, l'ensemble (17, 35, 52, 122, 145) défléchit pour indiquer une pression appliquée à des plages de pression relativement élevées. On met ledit ensemble de matières liées (17, 35, 52, 122, 145) dans un liquide afin d'exercer une pression hydrostatique appliquée sensiblement uniforme sur toutes les surfaces exposées de l'ensemble de matières liées (17, 35, 52, 122, 145).
摘要:
Reliability and accuracy in a pressure measurement transmitter are provided by employing a plurality of absolute or gauge pressure sensors operating in conjunction with a differential pressure sensor. A method is also provided to perform diagnostics based upon the readings of the three pressure sensors. Further, should one of the three pressure sensors fail, a reasonable estimate of process pressure being measured by the failed sensor can be generated based upon the remaining two sensors.
摘要:
Reliability and accuracy in a pressure measurement transmitter are provided by employing a plurality of absolute or gauge pressure sensors operating in conjunction with a differential pressure sensor. A method is also provided to perform diagnostics based upon the readings of the three pressure sensors. Further, should one of the three pressure sensors fail, a reasonable estimate of process pressure being measured by the failed sensor can be generated based upon the remaining two sensors.
摘要:
A solid state pressure sensor (35) utilizes a brittle diaphragm (36) made of a material such as silicon, which is mounted between base plates of glass (37, 38), and which deflects in response to pressure. The base plates (37, 38) of glass can have recesses (37A, 37B) formed therein to receive the diaphragm (36) and provide a full support across the diaphragm (36) under overpressure conditions to prevent overstressing the diaphragm (36), or the diaphragm (36) can have such contoured surfaces (45, 46) for forming overpressure stop surfaces against the facing base plate (37, 38). The diaphragm (36) has grooves (43, 44) defining a central portion (41) that deflects, and whereby the grooves (43, 44) will form webs (42) joining the central portion (41) to an outer rim (40) so that the diaphragm (36) acts similarly to a ''free edge'' diaphragm in its deflection characteristics. The grooves (43, 44) defining the webs (42) can have various configurations for achieving the results desired.
摘要:
A transmitter (10) measures pressures and has a pressure sensor (88) and an additional pressure sensor (90) providing additional measurement capability to the transmitter (10), such as an extended measurement range or measurement redundancy. Both pressure sensors (88, 90) share an overpressure protection device (12) which protects them from pressures exceeding a preselected pressure limit. The pressure sensors (88, 90) are batch fabricated and are formed in a single piece of brittle material (86).
摘要:
A pressure sensor (10, 49, 140) utilizes the effect of different elastic moduli between layers (20, 21; 36, 38; 53, 54; 123, 124; 146, 147) or sections of different material that are bonded together to form a body (17, 35, 52, 122, 145), so that when the bonded material unit (17, 35, 52, 122, 145) is subjected to a uniform hydrostatic external pressure, the differences in the elastic moduli of each of the materials will cause the materials to deflect in a predictable manner proportional to pressure. The amount of warpage or deflection of the body (17, 35, 52, 122, 145) of material can be measured as a function of pressure. Specifically, two layers of materials (20, 21; 36, 38; 53, 54; 123, 124; 146, 147), such as silicon (20, 38, 54, 123-146) and borosilicate glass (21, 36, 53, 124, 147), which have substantially different elastic moduli can be bonded across an interface surface (40, 55) to form an assembly (17, 35, 52, 122, 145) and when subjected to a substantially uniform pressure on the exterior surfaces the asembly (17, 35, 52, 122, 145) will deflect for indicating applied pressure at relatively high pressure ranges. The bonded material assembly (17, 35, 52, 122, 145) is placed in a fluid to provide a substantially uniform applied hydrostatic pressure on all exposed surfaces of the bonded material assembly (17, 35, 52, 122, 145).
摘要:
Un transmetteur (10) mesure des pressions, et comporte un capteur de pression (88) ainsi qu'un capteur de pression supplémentaire (90) donnant une capacité de mesure supplémentaire audit transmetteur (10), telle qu'une plage de mesure étendue ou une redondance de mesure. Les deux capteurs de pression (88, 90) partagent un dispositif de protection (12) contre les surpressions, lequel les protège des pressions dépassant une limite de pression présélectionnée. Lesdits capteurs de pression (88, 90) sont fabriqués en lots et se composent d'une seule pièce de matière cassante (86).
摘要:
A pressure sensor (10) configured to sense an applied pressure, comprising a diaphragm support structure (12), a diaphragm (16A, B) coupled to the diaphragm support structure and configured to deflect in response to applied pressure, a moveable member (20) coupled to the diaphragm and configured to move in response to deflection of the diaphragm, and an optical interference element (34) coupled to the moveable member and configured to interfere with incident light, wherein the interference is a function of position of the moveable member.
摘要:
A pressure transmitter (24, 26, 28, 100) with first and second absolute pressure sensors (120, 124) receives process pressures from corresponding first and second process inlets (122, 126). A transmitter circuit (128) coupled to the first and second absolute pressure sensors (120, 124) generates a differential pressure type output (104). A third absolute pressure sensor (140) coupled to the transmitter circuit (128) receives atmospheric pressure (P3) from a third inlet (116). The transmitter circuit (128) generates a second type of transmitter output that can be a gage or absolute pressure type. Single crystal sapphire pressure sensors are preferred to provide enough accuracy for measuring accurately over 200:1 pressure range.
摘要:
An isolated connection is formed by growing interconnects from the grain growth of an electrically conductive grain growth material (16) inside an MEMS device (10) after the device (10) is bonded together. The material used for grain growth of electrical contacts is deposited inside a cavity (18) formed between first (12) and second layers (12) of the device (10).