摘要:
To provide a substrate storage container that can inhibit a container body, door and other parts from being electrified to attract particles, hence can prevent particles from staining substrates. In a substrate storage container which includes: a container body 1 that stores semiconductor wafers W being supported by pairs of left and right supporting pieces 2; a removable door 10 that opens and closes an open front of container body 1; and an interface portions 40 that is provided in container body 1 and door 10 and are connected to a load port apparatus 31 of processing equipment, door 10 is positioned and connected to load port apparatus 31 when the open front of container body 1 is opened and closed by door 10. Container body 1, its paired supporting pieces 2, door 10 and interface portions 40 are all formed of conductive materials so that their surface resistance values are specified to fall within the range of 10 3 to 10 12 Q, to thereby inhibit adherence of particles to these due to electrification of static electricity.
摘要:
The purpose of the present invention is to further reliably reduce the contamination of photomask blanks due to the adherence of the dust and particles generated during the storage, transportation, or operation of the container while suppressing the effect on a resist pattern, thereby improving the quality and yield of the photomask blanks. The present invention pertains to a container (1) for storing photomask blanks that stores, transports, or safeguards photomask blanks (2), wherein at least one of the components is constituted by a thermoplastic resin where the amount of caprolactam measured by the dynamic head space method when kept for 60 minutes at 40°C is 0.01 ppm or less n-decane conversion amount per resin weight, and the surface resistance value is no more than 1.0E + 13 ohms.
摘要:
[Purpose] To form a transparent conductive film with fewer problems originating from amine compounds by using a conductive composition stably and pseudo-solubly dispersed in a solvent consisting mainly of an organic solvent. [Solution] This invention relates to: a conductive composition which is pseudo-solubly dispersed in a solvent consisting mainly of an organic solvent and which contains (a) a π-conjugated conductive polymer, (b) polyanions doping the π-conjugated conductive polymer (a), and (c) a reaction product of those anions of the polyanions (b) that were not needed for doping, and an oxirane group- and/or oxetane group-containing organic compound; a production method of said conductive composition; an anti-static resin composition formed by mixing said conductive composition and a resin solution dissolved in an organic solvent; and antistatic resin film formed by curing said anti-static resin composition.
摘要:
The conductive polymer solution of the present invention contains a À-conjugated conductive polymer, polyanions and a solvent, at least one of specific metal ions, silver halide, conductive carbon black and conductive metal oxide particles, and a reducing agent and/or neutralizing agent as necessary. The conductive polymer solution of the present invention can be used a conductive coating film having both superior transparency and being suitable for use a transparent electrode of a touch panel electrode sheet. In addition, the conductive coating film of the present invention has superior transparency that enables it to be used as a transparent electrode of a touch panel electrode sheet.
摘要:
The present invention is a conductive polymer composition containing a π-conjugated conductive polymer, a polyanion, and a gemini surfactant. There can be provided a conductive polymer composition that has excellent antistatic performance and excellent application properties, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.
摘要:
The method for preparing a conductive polymer solution of the present invention comprises the steps of adding a phase transfer catalyst to an aqueous polymer solution prepared by dissolving a π-conjugated conductive polymer and a solubilizable polymer in water thereby to precipitate a mixture containing the π-conjugated conductive polymer, the solubilizable polymer and the phase transfer catalyst, and adding an organic solvent to the mixture.
摘要:
A transparent conductive film (12, 22) including a transparent base material (2) having insulation properties; and a mesh member made of a conductive metal and provided in the transparent base material (2), wherein the transparent base material (2) is provided with a conductive portion in which the mesh member is arranged, and an insulating portion (I) in which a gap (5) formed by removing the mesh member is arranged.