PROCESS FOR PROTECTIVELY COATING HYDRAULIC MICROCIRCUITS AGAINST AGGRESSIVE LIQUIDS, PARTICULARLY FOR AN INK JET PRINTHEAD
    11.
    发明公开
    PROCESS FOR PROTECTIVELY COATING HYDRAULIC MICROCIRCUITS AGAINST AGGRESSIVE LIQUIDS, PARTICULARLY FOR AN INK JET PRINTHEAD 有权
    法涂层液压微电路腐蚀性液体,特别是对喷墨头

    公开(公告)号:EP1578611A1

    公开(公告)日:2005-09-28

    申请号:EP03786220.8

    申请日:2003-12-19

    IPC分类号: B41J2/14

    摘要: Process for protectively coating against aggressive liquids hydraulic microcircuits made in a resin (32), particularly for an ink jet printhead, consisting of: a9 disposing of a silicon substrate (20) comprising a sacrificial layer (26) of copper, deposited on the substrate and defining the inner shape of the hydraulic microcircuits (35, 36, 37); b) depositing on top of the outer surface of the sacrificial layer (26), by means of an electrochemical process, at least one protective, metallic coating layer (30); c) applying on the sacrificial layer (26) a non-photosensitive epoxy or polyamide resin (32), having a predetermined thickness and suitable for completely covering the sacrificial layer (26); d) effecting a polymerization of the resin (32) to increase its mechanical resistance to mechanical and thermal stresses and performing a planarization of the outer surface (33) of the resin (32), by means of a mechanical lapping and simultaneous chemical treatment; e) removing the sacrificial layer (26) through a chemical etching, in a highly acid bath; f) depositing a metallic, protective layer (39) on the outer surface (33) of the resin (32), through vacuum evaporation.

    Production method of ink-jet head
    17.
    发明公开
    Production method of ink-jet head 失效
    维尔法赫恩·赫斯特伦恩(TürgenStrahldruckkopfes)

    公开(公告)号:EP0863008A2

    公开(公告)日:1998-09-09

    申请号:EP98100172.0

    申请日:1998-01-07

    发明人: Watanabe, Hideo

    IPC分类号: B41J2/16

    摘要: A method of producing an ink-jet head having an ink chamber composed of at least a first wall member and a second wall member, wherein the first wall member includes a vibrating wall made of a piezoelectric ceramic on which an electrode layer is formed and the second wall member forms a fixed wall, comprising steps of: (1) combining the first wall member and the second wall member into one body so that the ink chamber is formed between the first wall member and the second wall member and the electrode layer is located inside the ink chamber; and (2) subjecting the combined one body of the first wall member and the second wall member to gas phase polymerization so that a resin layer of poly-para xylylene or its derivative is formed on the electrode layer in the ink chamber.

    摘要翻译: 一种具有由至少第一壁构件和第二壁构件构成的墨室的喷墨头的制造方法,其特征在于,所述第一壁构件包括由形成有电极层的压电陶瓷构成的振动壁, 第二壁构件形成固定壁,包括以下步骤:(1)将第一壁构件和第二壁构件组合成一体,使得墨室形成在第一壁构件和第二壁构件之间,电极层为 位于墨水室内; 和(2)使第一壁构件和第二壁构件的组合的一体经受气相聚合,使得在墨室中的电极层上形成聚对二甲苯或其衍生物的树脂层。