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    GUARD BANDS FOR TUNING FORK GYROSCOPES
    13.
    发明公开
    GUARD BANDS FOR TUNING FORK GYROSCOPES 失效
    ABSCHIRM-BÄNDERFÜRSTIMMGABEL-GYROSKOPE

    公开(公告)号：EP1007977A4

    公开(公告)日：2000-07-26

    申请号：EP97947558

    申请日：1997-11-18

    申请人： DRAPER LAB CHARLES S ,  ROCKWELL INTERNATIONAL CORP

    发明人： WEINBERG MARC S ,  PINSON JOHN C

    IPC分类号： G01C19/5719 ,  G01P9/04 ,  G01C19/56

    CPC分类号： G01C19/5719

    摘要： Guard bands (20a, 20b, 20c, 20d) in a tuning fork gyroscope reduce or eliminate force and sensitivity associated with proof mass (13) motion normal to the substrate (22) as a result of voltage transients. The guard bands reduce the undesired effects of transient voltages on electrostatic coupling of interleaved comb electrodes (12a, 18a; 14a, 18b; 14b, 18c; 12d, 18d). The guard bands are biased to reduce the coupling ratio to zero and thereby enable starting and improved performance. Various configurations of guard bands may be employed including distinct inner (20b, 20c) and outer (20a, 20d) guard bands, distinct inner guard bands only, extended sense electrodes below inner sensing combs with no outer guards, distinct outer guard bands with extended sense electrodes, and sense electrodes extended beneath both drive and sensing combs.

    摘要翻译： 音叉陀螺仪中的保护带（20a，20b，20c，20d）减少或消除由于电压瞬态导致的与检测质量（13）垂直于基板（22）的运动相关的力和灵敏度。 保护带减少了交错梳状电极（12a，18a; 14a，18b; 14b，18c; 12d，18d）的静电耦合上的瞬态电压的不希望的影响。 保护带被偏置以将耦合比减小到零，从而启动并改善性能。 可以采用各种构造的防护带，包括不同的内部防护带（20b，20c）和外部防护带（20a，20d），仅仅不同的内部防护带，在内部检测梳下方的没有外部防护装置的延伸传感电极， 感测电极以及延伸到驱动和感测梳下方的感测电极。

    MEMS DEVICE WITH MEANS FOR DECELERATING PROOF MASS MOVEMENTS
    17.
    发明授权
    MEMS DEVICE WITH MEANS FOR DECELERATING PROOF MASS MOVEMENTS 有权

    公开(公告)号：EP1573272B1

    公开(公告)日：2018-07-11

    申请号：EP03814151.1

    申请日：2003-12-15

    申请人： Honeywell International Inc.

    发明人： GLENN, Max, C. ,  PLATT, William, P. ,  WEBER, Mark, W.

    IPC分类号： B81B3/00 ,  G01C19/5719

    CPC分类号： G01C19/5719 ,  B81B3/0051 ,  B81B2201/0242

    摘要： A micro-electromechanical systems (MEMS) device is described which includes a substrate having at least one anchor, a proof mass having either of at least one deceleration extension extending from the proof mass or at least one deceleration indentation formed in the proof mass, a motor drive comb, and a motor sense comb. The MEMS device further includes a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb, and the suspensions are anchored to the substrate. The MEMS device also includes a body attached to the substrate and at least one deceleration beam extending from the body. The deceleration extensions are configured to engage either deceleration beams or deceleration indentations and slow or stop the proof mass before it contacts either of the motor drive comb or the motor sense comb.