中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

60 records (took 0.031 seconds)

    Method of performing tomographic imaging of a sample in a charged-particle microscope
    31.
    发明公开
    Method of performing tomographic imaging of a sample in a charged-particle microscope 有权
    在带电粒子显微镜中对样品进行断层成像的方法

    公开(公告)号：EP2708875A1

    公开(公告)日：2014-03-19

    申请号：EP13183631.4

    申请日：2013-09-10

    Applicant: FEI Company

    Inventor： Foord, David ,  Schoenmakers, Remco

    IPC: G01N23/225 ,  H01J37/28

    CPC classification number: G01N23/046 ,  G01N23/2251 ,  G01N2223/419 ,  G06T11/005 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2611 ,  H01J2237/2802 ,  H01J2237/2807

    Abstract: A method of performing tomographic imaging of a sample in a charged-particle microscope, comprising the following steps:
    - Providing a beam of charged particles;
    - Providing the sample on a sample holder that can be tilted relative to said beam;
    - Directing the beam through the sample and so as to form an image of the sample at an image detector;
    - Repeating this procedure at each of a first series of sample tilts so as to acquire a corresponding set of images;
    - Mathematically combining images from said set so as to construct a composite image,

    which method comprises the following steps:
    - Selecting a second series of sample tilts;
    - At each of said second series of sample tilts, using a spectral detector to accrue a spectral map of said sample, thus acquiring a collection of spectral maps;
    - Analyzing said spectral maps to derive compositional data pertaining to the sample;
    - Employing said compositional data in constructing said composite image
    Said spectral maps may, for example, be acquired using a technique selected from the group comprising EDX, EELS, EFTEM, and combinations hereof.

    Abstract translation: 一种在带电粒子显微镜中执行样品的层析成像的方法，包括以下步骤： - 提供带电粒子束; - 将样品提供在可相对于所述束倾斜的样品架上; - 引导光束穿过样品并且在图像检测器处形成样品的图像; - 在第一系列样本倾斜中的每一个处重复该过程以获取对应的一组图像; - 以数学方式组合来自所述组的图像以构建合成图像，该方法包括以下步骤： - 选择第二系列样本倾斜; - 在所述第二系列采样倾斜中的每一个处，使用光谱检测器来累加所述样本的光谱图，从而获取光谱图的集合; - 分析所述光谱图以导出与样品有关的组分数据; - 在构建所述合成图像时使用所述组分数据。例如，可以使用从包括EDX，EELS，EFTEM及其组合的组中选择的技术来采集所述光谱图。

    Method of performing tomographic imaging of a sample in a charged-particle microscope
    32.
    发明公开
    Method of performing tomographic imaging of a sample in a charged-particle microscope 审中-公开
    用于与带电粒子进行样品的层析成像中的显微镜方法

    公开(公告)号：EP2708874A1

    公开(公告)日：2014-03-19

    申请号：EP12184099.5

    申请日：2012-09-12

    Applicant: FEI COMPANY

    Inventor： Foord, David ,  Schoenmakers, Remco

    IPC: G01N23/225 ,  H01J37/28

    CPC classification number: G01N23/046 ,  G01N23/2251 ,  G01N2223/419 ,  G06T11/005 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2611 ,  H01J2237/2802 ,  H01J2237/2807

    Abstract: A method of performing tomographic imaging of a sample in a charged-particle microscope, comprising the following steps:
    - Providing a beam of charged particles;
    - Providing the sample on a sample holder that can be tilted relative to said beam;
    - Directing the beam through the sample and so as to form an image of the sample at an image detector;
    - Repeating this procedure at each of a first series of sample tilts so as to acquire a corresponding set of images;
    - Mathematically combining images from said set so as to construct a composite image,

    which method comprises the following steps:
    - Selecting a second series of sample tilts;
    - At each of said second series of sample tilts, using a spectral detector to accrue a spectral map of said sample, thus acquiring a collection of spectral maps;
    - Analyzing said spectral maps to derive compositional data pertaining to the sample;
    - Employing said compositional data in constructing said composite image
    Said spectral maps may, for example, be acquired using a technique selected from the group comprising EDX, EELS, EFTEM, and combinations hereof.

    Abstract translation: 在带电粒子显微镜进行样品的断层摄影成像，其包括以下步骤的方法： - 提供了带电粒子的束; - 提供了在样品架上样品并能够相对于所述梁被倾斜; - 通过样品并且以便引导所述光束，以形成在一个图像检测器的样本的图像; - 在每个第一系列样品的重复这个过程倾斜，从而获取相应的一组图像; - 从所述数学上组合图像设定为构造一个合成图像，该方法包括以下步骤： - 选择第二系列的样本倾斜; - 在每一个所述第二系列样品倾斜，采用的光谱检测器累积所述样品的光谱图，从而获取频谱图的集合; - 分析所述频谱图来推导关于所述样品成分数据; - 在构建所述复合图像所述频谱映射可以，例如，使用选自EDX，EELS，EFTEM，和其组合中选择的技术获得的采用所述成分数据。

    SEM imaging method
    35.
    发明公开
    SEM imaging method 审中-公开
    REM-Abb​​ildungsverfahren

    公开(公告)号：EP2444991A1

    公开(公告)日：2012-04-25

    申请号：EP10188162.1

    申请日：2010-10-20

    Applicant: FEI Company

    Inventor： Boughorbel, Faysal ,  Lich, Berend ,  Bosch, Eric ,  Kooijman, Cornelis

    IPC: H01J37/22 ,  H01J37/28

    CPC classification number: H01J37/222 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2611

    Abstract: A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps:
    - Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions;
    - Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (P i , M i ), where 1 ≤ i ≤N,

    wherein:
    - A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Q k , L k ), in which an imaging quantity (Q) having value Q k is associated with a discrete depth level L k referenced to the surface S.

    A suitable example of such a BSS technique is Principal Component Analysis (PCA), e.g. employing a Karhunen-Loeve transform operation.
    This technique allows high-resolution 3D volume reconstruction from a sequence of backscattered images acquired by a SEM. The method differs from known techniques in that it can be used on complex samples with unknown structure. With this method, one can compute compensation factors between high- and low-energy images using second-order (or higher-order) multivariate statistics, which allows for the effective separation of different depth layers in a sample without using a priori knowledge of sample structure. The method has a wide range of applications in life-science and material science imaging.

    Abstract translation: 一种使用扫描电子显微镜（SEM）研究样品的方法，包括以下步骤： - 在多个（N）个测量会话中使用探测电子束照射样品的表面（S），每个测量会话具有相关联的 波束参数（P）值，其从这样的值的范围中选择并且在测量会话之间不同; - 检测在每个测量会话期间由样本发射的受激辐射，将被测量（M）与其相关联并注意每个测量会话的该被测量的值，从而允许编译数据对（P i，M i），其中1‰¤‰¤N，其中： - 使用统计盲源分离（BSS）技术来自动处理数据集（D）并将其空间解析成成像对的结果集（R） Q k，L k），其中具有值Q k的成像量（Q）与参考表面S的离散深度级L k相关联。这种BSS技术的合适示例是主成分分析（PCA） 例如 采用Karhunen-Loeve变换操作。 该技术允许通过SEM获取的一系列背散射图像进行高分辨率3D体积重建。 该方法与已知技术不同之处在于其可用于具有未知结构的复杂样品。 使用这种方法，可以使用二阶（或更高阶）多变量统计来计算高能和低能量图像之间的补偿因子，这样使得样本中不同深度层的有效分离，而不使用样本的先验知识 结构体。 该方法在生命科学和材料科学成像中具有广泛的应用。

    SEM imaging method
    36.
    发明公开
    SEM imaging method 有权
    REM-Abb​​ildungsverfahren

    公开(公告)号：EP2383768A1

    公开(公告)日：2011-11-02

    申请号：EP11163992.8

    申请日：2011-04-28

    Applicant: FEI Company

    Inventor： Boughorbel, Faysal ,  Kooijman, Cees ,  Lich, Ben ,  Bosch, Eric

    IPC: H01J37/22 ,  H01J37/28

    CPC classification number: H01J37/222 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2611

    Abstract: A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps:
    - Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions;
    - Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (P i , M i ), where 1 ≤ i ≤ N,

    wherein:
    - A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Q k , L k ), in which an imaging quantity (Q) having value Q k is associated with a discrete depth level L k referenced to the surface S.

    A suitable example of such a BSS technique is Principal Component Analysis (PCA), e.g. employing a Karhunen-Loeve transform operation.
    This technique allows high-resolution 3D volume reconstruction from a sequence of backscattered images acquired by a SEM. The method differs from known techniques in that it can be used on complex samples with unknown structure. With this method, one can compute compensation factors between high- and low-energy images using second-order (or higher-order) multivariate statistics, which allows for the effective separation of different depth layers in a sample without using a priori knowledge of sample structure. The method has a wide range of applications in life-science and material science imaging.

    Abstract translation: 一种使用扫描电子显微镜（SEM）研究样品的方法，包括以下步骤： - 在多个（N）个测量会话中使用探测电子束照射样品的表面（S），每个测量会话具有相关联的 波束参数（P）值，其从这样的值的范围中选择并且在测量会话之间不同; - 检测在每个测量会话期间由样本发射的受激辐射，将被测量（M）与其相关联并注意每个测量会话的该被测量的值，从而允许编译数据对（P i，M i），其中1‰¤‰¤N，其中： - 使用统计盲源分离（BSS）技术来自动处理数据集（D）并将其空间解析成成像对的结果集（R） Q k，L k），其中具有值Q k的成像量（Q）与参考表面S的离散深度级L k相关联。这种BSS技术的合适示例是主成分分析（PCA） 例如 采用Karhunen-Loeve变换操作。 该技术允许通过SEM获取的一系列背散射图像进行高分辨率3D体积重建。 该方法与已知技术不同之处在于其可用于具有未知结构的复杂样品。 使用这种方法，可以使用二阶（或更高阶）多变量统计来计算高能和低能量图像之间的补偿因子，这样使得样本中不同深度层的有效分离，而不使用样本的先验知识 结构体。 该方法在生命科学和材料科学成像中具有广泛的应用。

    Automated Slice Milling for Viewing a Feature
    37.
    发明公开
    Automated Slice Milling for Viewing a Feature 审中-公开
    AutomatischeScheibenmühlezur Ansicht eines Merkmals

    公开(公告)号：EP2372337A2

    公开(公告)日：2011-10-05

    申请号：EP11160332.0

    申请日：2011-03-30

    Applicant: FEI Company

    Inventor： Tanner, Ryan

    IPC: G01N1/28

    CPC classification number: H01J37/3005 ,  G01N1/286 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J37/30 ,  H01J37/3045 ,  H01J37/3056 ,  H01J2237/2611 ,  H01J2237/28 ,  H01J2237/2803 ,  H01J2237/2814 ,  H01J2237/30472 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: A method and apparatus for performing a slice and view technique with a charged particle beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. In a dual beam system, the FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.

    Abstract translation: 一种利用带电粒子束系统执行切片和观察技术的方法和装置。 通过机器视觉来定位样本图像中的兴趣特征，并且通过至少部分地通过机器视觉收集的数据的分析来确定要在后续切片和观看迭代中被研磨和成像的区域。 确定的铣削区域可以表示为围绕特征的边界框，该尺寸可以根据分析步骤而改变。 在双光束系统中，然后相应地调整FIB以在随后的切片中切片并研磨新的面并查看迭代，并且SEM对新的面进行成像。 因为本发明精确地定位了特征并且确定适当的尺寸以进行研磨和图像，所以通过防止不需要研磨不包含感兴趣特征的基底来提高效率。

    Methods and systems for tomographic reconstruction of coherent radiation images
    38.
    发明公开
    Methods and systems for tomographic reconstruction of coherent radiation images 审中-公开
    ung ung ung ung ung ung ung ung ung ung ung ung ung ung ung ung ung ung ung ung ung

    公开(公告)号：EP2309459A1

    公开(公告)日：2011-04-13

    申请号：EP09170779.4

    申请日：2009-09-20

    Applicant: Universiteit Antwerpen

    Inventor： Van Dyck, Dirk

    IPC: G06T11/00 ,  H01J37/22

    CPC classification number: G06T11/006 ,  H01J37/222 ,  H01J37/26 ,  H01J2237/226 ,  H01J2237/2611

    Abstract: A method and system are described for reconstructing a coherent radiation tomographic image of at least one object. The method comprises performing back-projection, whereby performing back-projection comprises taking into account propagation waves from the point of interaction to a plane of detection. Furthermore a method is described for studying objects, wherein a plurality of objects are imaged on a substrate using coherent radiation tomography and whereby the method as described above is used for characterizing the objects.

    Abstract translation: 描述了用于重构至少一个对象的相干辐射断层图像的方法和系统。 该方法包括执行反投影，由此执行反投影包括考虑从相互作用点到检测平面的传播波。 此外，描述了用于研究物体的方法，其中使用相干辐射断层摄影将多个物体成像在基板上，并且由此使用上述方法来表征物体。

Patent Agency Ranking