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    SYSTEM AND METHOD FOR HIGH ACCURACY GAS INJECT IN A TWO CHAMBER GAS DISCHARGE LASER SYSTEM
    31.
    发明公开
    SYSTEM AND METHOD FOR HIGH ACCURACY GAS INJECT IN A TWO CHAMBER GAS DISCHARGE LASER SYSTEM 有权
    系统和方法高精度气体重新在一个两室气体喷出激光系统

    公开(公告)号：EP2761709A1

    公开(公告)日：2014-08-06

    申请号：EP12835486.7

    申请日：2012-08-28

    Applicant: Cymer, LLC

    Inventor： RIGGS, Daniel, J.

    IPC: H01S3/097

    CPC classification number: H01S3/2366 ,  H01S3/0014 ,  H01S3/036 ,  H01S3/225 ,  H01S3/2308

    Abstract: [0090} Systems and methods for automatically performing a high accuracy gas inject in a laser chamber of a two chamber gas discharge laser such as an excimer laser are disclosed. A mathematical model, relates the amount of halogen gas in the laser chamber after an inject to the amount of halogen gas present prior to the inject, the amount of halogen gas injected., and the consumption rate of halogen gas in the chamber, A fixed amount of halogen gas is added to the chamber in an initial number of injects to allow transients to settle out, after which the amount of halogen gas to be injected is that calculated to result in a desired amount of halogen gas after the inject according to the model. Measurements are taken after injects to update the actual amount of halogen gas present and the consumption rate of the halogen gas.

    A CO2 LASER
    32.
    发明公开
    A CO2 LASER 审中-公开
    CO2激光

    公开(公告)号：EP2727201A1

    公开(公告)日：2014-05-07

    申请号：EP12804831.1

    申请日：2012-06-28

    Applicant: Campbell, Robert

    Inventor： Campbell, Robert

    IPC: H01S3/223

    CPC classification number: H01S3/1616 ,  H01S3/094003 ,  H01S3/094096 ,  H01S3/0941 ,  H01S3/2232 ,  H01S3/2308 ,  H01S3/2375 ,  H01S3/2391

    Abstract: Efficient laser diode excited Thulium (Tm) doped solid state systems, directly matched to a combination band pump transition of Carbon Dioxide (CO
    2 ), have matured to the point that utilization of such in combination with CO
    2 admits effectively a laser diode pumped CO
    2 laser. The laser diode excited Tm solid state pump permits Continuous Wave or pulsed energy application. Appropriate optical pumping admits catalyzer free near indefinite gas lifetime courtesy of the absence of significant discharge driven dissociation and contamination. As a direct consequence of the preceding arbitrary multi isotopologue CO
    2 , symmetric and asymmetric, gas mixes may be utilized without significant degradation or departure from initial mix specifications. This would admit, at raised pressure, a system continuously tunable from ~9μm to ~1 1.5μm, or sub picosecond amplification. This methodology offers advantages in regards scalability, pulse energy and power over alternative non linear conversion techniques in access to this spectral region.

    Système d'émission de signal optique
    33.
    发明公开
    Système d'émission de signal optique 有权
    系统zum Ausstrahlen eines optischen信号

    公开(公告)号：EP2685574A1

    公开(公告)日：2014-01-15

    申请号：EP13176152.0

    申请日：2013-07-11

    Applicant: Thales ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

    Inventor： Nappez, Thomas ,  Rondeau, Philippe ,  Schlotterbeck, Jean-Pierre ,  Ghibaudo, Elise ,  Broquin, Jean-Emmanuel

    IPC: H01S3/0941 ,  H01S3/063 ,  H01S3/094 ,  H01S3/10 ,  H01S3/23 ,  H01S5/14

    CPC classification number: G02B6/262 ,  H01S3/025 ,  H01S3/0632 ,  H01S3/094084 ,  H01S3/09415 ,  H01S3/2308 ,  H01S5/141

    Abstract: Système d'émission de signal optique comprenant une puce optique passive (2) munie en surface supérieure d'un premier guide d'ondes (3), et une diode laser à ruban large (1) disposée en bordure de la puce optique passive (2), la puce optique passive (2) étant munie, en surface supérieure, d'une structure réfléchissante (5) à la longueur d'onde de la diode laser à ruban large (1) et d'une portion en couche mince (8) active ou non-linéaire alimentée par ladite diode laser (1) et recouvrant une partie (7) du premier guide d'ondes (3), le premier guide d'ondes (3) étant relié par son extrémité d'entrée à la diode laser (1), traversant la structure réfléchissante (5), et comprenant une transition (4) entre une entrée large du premier guide d'ondes disposée en sortie de la diode laser (1) et une portion étroite du premier guide d'ondes (3) traversant la structure réfléchissante (5), la puce optique passive (2) étant munie en surface supérieure d'un deuxième guide d'ondes (10), d'un premier coupleur (13) formé par deux premières portions (14,15) du premier guide d'ondes (3) non recouvertes par la portion en couche mince (8) et situées de part et d'autre de la portion en couche mince (8) le long du chemin optique, et d'un deuxième coupleur (16) formé par deux deuxièmes portions (17, 18), respectivement des premier et deuxième guides d'ondes (3,10), non recouvertes par la portion en couche mince (8).

    Abstract translation: 该系统具有在其上表面上设置有波导（3,10）和反射结构（5）的无源光学芯片（2）。 芯片被由激光二极管（1）供电的有源或非线性薄层部分（8）覆盖，其中该部分覆盖一个波导的一部分（7）。 第一耦合器（13）由波导部分（14,15）形成，其不被薄层部分覆盖并且沿着光路位于薄层部分的侧面上。 第二耦合器（16）由波导的不被薄层部分覆盖的部分（17,18）形成。

    Optical pulse source having variable repetition rates and wavelengths
    36.
    发明公开
    Optical pulse source having variable repetition rates and wavelengths 有权
    Optische Puls-Lichtquelle mit variablen Wiederholraten undWellenlängen

    公开(公告)号：EP2492736A1

    公开(公告)日：2012-08-29

    申请号：EP12156594.9

    申请日：2008-11-19

    Applicant: Fianium Limited

    Inventor： Clowes, John ,  Grudinin, Anatoly ,  Godfrey, Ian

    IPC: G02B21/00 ,  G02B6/02 ,  H01S3/11 ,  H01S3/23

    CPC classification number: H01S3/11 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2201/0697 ,  G02B21/16 ,  G02F1/353 ,  G02F1/365 ,  G02F2001/3528 ,  H01S3/10 ,  H01S3/10046 ,  H01S3/1024 ,  H01S3/108 ,  H01S3/2308

    Abstract: An optical pulse source 30 comprising a DPSS pump laser 31, a photonic crystal fibre (PCF) 35 and acousto-optic modulator (AOM) gating means 33. The pump pulses are coupled through lenses 32 to the AOM 33, synchronised to the pump laser 31 and operable to gate the pump pulses to a reduced repetition rate Rr = Rf/N, where Rf is the pump laser fundamental frequency. The pulses from the AOM 33 are injected via optics 34 into the PCF 35. Propagation through the PCF 35 causes the pulses to broaden spectrally to produce supercontinuum pulses. An optical pulse source comprising the optical pulse source 30 and an acousto-optical tunable filter (AOTF) operable to convert supercontinuum pulses into wavelength variable output pulses is also provided. A method of scaling the energy of the optical supercontinuum pulses is also provided.

    Abstract translation: 包括DPSS泵浦激光器31，光子晶体光纤（PCF）35和声光调制器（AOM）门控装置33的光脉​​冲源30。泵脉冲通过透镜32耦合到AOM 33，与泵浦激光器同步 31，并且可操作以将泵浦脉冲门控到降低的重复率Rr = Rf / N，其中Rf是泵浦激光器基频。 来自AOM 33的脉冲经由光学器件34注入到PCF 35中。通过PCF 35的传播使得脉冲在光谱上扩大以产生超连续谱脉冲。 还提供了包括光脉冲源30和可操作以将超连续谱脉冲转换成波长可变输出脉冲的声光可调谐滤波器（AOTF）的光脉冲源。 还提供了缩放光超连续谱脉冲能量的方法。

    Gas laser device
    40.
    发明公开
    Gas laser device 有权
    气体激光装置

    公开(公告)号：EP2053707A3

    公开(公告)日：2011-01-12

    申请号：EP08167352.7

    申请日：2008-10-23

    Applicant: Rofin-Sinar UK Ltd

    Inventor： Markillie, Gavin

    IPC: H01S3/03 ,  H01S3/081 ,  G02B27/09

    CPC classification number: H01S3/0315 ,  G02B27/0927 ,  G02B27/0988 ,  H01S3/005 ,  H01S3/0818 ,  H01S3/2232 ,  H01S3/2308 ,  H01S2301/20

    Abstract: A gas laser device is presented that produces a near diffraction limited round beam exiting the discharge vessel (272). Through the use of a simple focussing system, additional waveguide strip (232) and a spatial filter (242) in conjunction with the new asymmetric hybrid planar waveguide resonator, a round diffraction limited beam can be produced exiting the discharge vessel (272). Furthermore, a second and very similar design is presented that allows for spatial filtering to take place directly outside of the discharge vessel, thereby enabling filtering of the beam to be an added option.

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