SIC SEMICONDUCTOR ELEMENT AND MANUFACTURING METHOD FOR SAME
    48.
    发明公开
    SIC SEMICONDUCTOR ELEMENT AND MANUFACTURING METHOD FOR SAME 有权
    HERSTELLUNGSVERFAHREN EINES SIC-HALBLEITERELEMENT

    公开(公告)号:EP2515336A1

    公开(公告)日:2012-10-24

    申请号:EP10837269.9

    申请日:2010-12-13

    摘要: Disclosed are an SiC semiconductor element and manufacturing method for an SiC semiconductor element in which the interface state density of the interface of the insulating film and the SiC is reduced, and channel mobility is improved. Phosphorus (30) is added to an insulating film (20) formed on an SiC semiconductor (10) substrate in a semiconductor element. The addition of phosphorous to the insulating film makes it possible to significantly reduce the defects (interface state density) in the interface (21) of the insulating film and the SiC, and to dramatically improve the channel mobility when compared with conventional SiC semiconductor elements. The addition of phosphorus to the insulating film is carried out by heat treatment. The use of heat treatment to add phosphorous to the insulating film makes it possible to maintain the reliability of the insulating film, and to avoid variation in channel mobility and threshold voltage.

    摘要翻译: 公开了一种SiC半导体元件及其制造方法,其中绝缘膜和SiC的界面的界面态密度降低,并且提高了沟道迁移率。 在半导体元件中的形成在SiC半导体(10)基板上的绝缘膜(20)中加入磷(30)。 通过向绝缘膜添加磷,可以显着降低绝缘膜和SiC的界面(21)中的缺陷(界面态密度),并且与传统的SiC半导体元件相比显着提高沟道迁移率。 通过热处理对绝缘膜添加磷。 通过使用热处理将磷添加到绝缘膜,可以保持绝缘膜的可靠性,并且避免沟道迁移率和阈值电压的变化。

    ROBOT HAND
    50.
    发明公开
    ROBOT HAND 有权
    ROBOTERHAND

    公开(公告)号:EP2383082A1

    公开(公告)日:2011-11-02

    申请号:EP09830450.4

    申请日:2009-12-03

    IPC分类号: B25J15/08

    CPC分类号: B25J15/0009

    摘要: A robot hand which can be formed in the shape of a human hand and improves maintenance performance, and generates fingertip force is provided. A robot hand (1) of the present invention is provided with a hand section (3) and an arm section (5). The hand section (3) corresponds to the portion of a human hand which is forward from the wrist thereof. The arm section (5) is provided with a drive device (d5) including a plurality of motors and generates driving torque for driving each movable section of the hand section (3). The hand section (3) and the arm section (5) are configured in such a manner that a group (g36) of wrist-mounted pulleys which are first driving torque transmitting members coaxially arranged and a group (r5) of arm pulleys which are second driving torque transmitting members coaxially arranged transmit driving torque generated by the drive device (d5) to each movable section of the hand section (3) via gears meshing with each other.

    摘要翻译: 提供可以形成为人手形状并提高维护性能并产生指尖力的机器人手。 本发明的机器人手(1)设置有手部(3)和臂部(5)。 手部(3)对应于从其手腕向前的人手的部分。 臂部(5)设置有包括多个电动机的驱动装置(d5),并且产生用于驱动手部(3)的每个可动部的驱动转矩。 手部(3)和臂部(5)以这样的方式配置:作为第一驱动扭矩传递部件同轴布置的手腕带轮组(g36)和臂带轮组(r5) 第二驱动扭矩传递部件,其通过齿轮啮合而由驱动装置(d5)产生的发送驱动力矩同轴布置在手部(3)的各可动部。