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    MEMS switch with set and latch electrodes
    41.
    发明公开
    MEMS switch with set and latch electrodes 审中-公开
    MEMS-schalter mit Setz- und latch-Elektroden

    公开(公告)号：EP2210857A1

    公开(公告)日：2010-07-28

    申请号：EP10162705.7

    申请日：2005-11-16

    Applicant: QUALCOMM MEMS Technologies, Inc.

    Inventor： Chui, Clarence

    IPC: B81B3/00 ,  H01H59/00

    CPC classification number: G02B26/001 ,  B81B3/0086 ,  B81B2201/016 ,  B81B2201/042 ,  H01H59/0009

    Abstract: A MEMS device is electrically actuated with a voltage placed across a first electrode (702) and a moveable material (714). The device may be maintained in an actuated state by latch electrodes (730a, 730b) that are separate from the first electrode

    Abstract translation: MEMS器件通过跨过第一电极（702）和可移动材料（714）放置的电压来电致动。 可以通过与第一电极分离的闩锁电极（730a，730b）将装置保持在致动状态

    DEVICES HAVING VERTICALLY-DISPOSED NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME
    42.
    发明授权
    DEVICES HAVING VERTICALLY-DISPOSED NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME 有权
    带竖设施排列的纳米织物制品及其制造方法

    公开(公告)号：EP1593164B1

    公开(公告)日：2010-06-30

    申请号：EP04710662.0

    申请日：2004-02-12

    Applicant: Nantero, Inc.

    Inventor： JAIPRAKASH, Venkatachalam, C. ,  WARD, Jonathan, W. ,  RUECKES, Thomas ,  SEGAL, Brent, M.

    IPC: G11C23/00 ,  G11C13/02 ,  G11C14/00 ,  H01H59/00 ,  B81B3/00

    CPC classification number: G11C23/00 ,  B81B2201/016 ,  B81B2203/0127 ,  B81C1/00142 ,  B81C2201/0109 ,  B82Y10/00 ,  G11C13/025 ,  G11C14/00 ,  G11C2213/16 ,  G11C2213/77 ,  G11C2213/81 ,  H01H1/0094

    Abstract: Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.

    MICRO-COMMUTATEUR ELECTROSTATIQUE POUR COMPOSANT A FAIBLE TENSION D'ACTIONNEMENT
    43.
    发明授权
    MICRO-COMMUTATEUR ELECTROSTATIQUE POUR COMPOSANT A FAIBLE TENSION D'ACTIONNEMENT 有权
    具有低电压工作的微观力学静态开关

    公开(公告)号：EP1565921B1

    公开(公告)日：2006-07-26

    申请号：EP03786073.1

    申请日：2003-11-27

    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE

    Inventor： ROBERT, Philippe

    IPC: H01H59/00

    CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B2201/016 ,  B81B2203/04 ,  H01H2059/0018 ,  H01H2059/0072

    Abstract: The invention relates to an electrostatic microswitch which is intended to connect electrically two strip conductors which are disposed on an insulating support (21). According to the invention, the two strip conductors are connected electrically by conducting means (38) which are provided in the central part of deformable means (28) which can be deformed in relation to the support under the effect of an electrostatic force generated by control electrodes (25, 48; 26, 58). The control electrodes are distributed facing one another on the deformable means and the support, such as to form capacitive means around the aforementioned conducting means. Moreover, the control electrodes are associated with insulating stop elements (35, 36) which are provided in order to prevent a short circuit between electrodes of the capacitive means during the deformation of the deformable means. The distance between the deformable means and the ends of the strip conductors is less than or equal to the distance between the insulating stop elements associated with the control electrodes and the control electrodes located opposite.

    MICROMACHINE SWITCH AND ITS PRODUCTION METHOD
    48.
    发明公开
    MICROMACHINE SWITCH AND ITS PRODUCTION METHOD 审中-公开
    MICROMASCHINEN-SCHALTER UND SEIN VERFAHRENFÜRDIE HERSTELLUNG。

    公开(公告)号：EP1146533A1

    公开(公告)日：2001-10-17

    申请号：EP99959908.7

    申请日：1999-12-20

    Applicant: NEC Corporation

    Inventor： SUZUKI, Kenichiro ,  MARUMOTO, Tsunehisa

    IPC: H01H59/00 ,  B81B3/00 ,  B81C1/00

    CPC classification number: H01H59/0009 ,  B81B2201/014 ,  B81B2201/016 ,  B81C1/0015 ,  B81C2201/0133 ,  H01H1/20

    Abstract: A micro-machine switch in accordance with the present invention includes a supporter having a predetermined height relative to a surface of a substrate, a flexible cantilever projecting from the supporter in parallel with a surface of the substrate, and having a distal end facing a gap formed between two signal lines, a contact electrode formed on the cantilever, facing the gap, a lower electrode formed on the substrate in facing relation with a part of the cantilever, and an intermediate electrode formed on the cantilever in facing relation with the lower electrode. The micro-machine switch can operate at a lower drive voltage than a voltage at which a conventional micro-machine switch operates, and can enhance a resistance of an insulating film against a voltage.

    Abstract translation: 根据本发明的微型机器开关包括：相对于基板的表面具有预定高度的支撑件，从支撑件平行于基板的表面突出的柔性悬臂，并且具有面向间隙的远端 形成在两个信号线之间，形成在悬臂上的接触电极，面对间隙;与基板的一部分悬臂形成在基板上的下电极，以及形成在悬臂上的中间电极，与下电极 。 微机开关可以在比常规微机开关操作的电压低的驱动电压下工作，并且可以增强绝缘膜对电压的电阻。

    Mikromechanisches Bauteil mit einem Schaltelement als beweglicher Struktur, Mikrosystem und Herstellverfahren
    50.
    发明公开
    Mikromechanisches Bauteil mit einem Schaltelement als beweglicher Struktur, Mikrosystem und Herstellverfahren 失效
    Mikromechanisches Bauteil mit einem Schaltelement als beweglicher Struktur，Mikrosystem und Herstellverfahren。

    公开(公告)号：EP0680064A2

    公开(公告)日：1995-11-02

    申请号：EP95106102.7

    申请日：1995-04-24

    Applicant: SIEMENS AKTIENGESELLSCHAFT

    Inventor： Zettler, Thomas, Dr.

    IPC: H01H35/02 ,  H01H1/00

    CPC classification number: B81C1/0096 ,  B81B2201/016 ,  B81C1/00142 ,  B81C1/00944 ,  H01H1/0036 ,  H01H35/02

    Abstract: Die Erfindung betrifft ein mikromechanisches Bauteil mit einer festen mikromechanischen Struktur, die mindestens zwei aus einer oder mehreren leitenden Schichten gebildete Elektroden umfaßt, und einer beweglichen mikromechanischen Struktur in einem Hohlraum (H) , die ein leitendes Schaltelement (S) bildet, wobei mithilfe des Schaltelementes ein elektrischer Kontakt zwischen den Elektroden herstellbar ist. Der Hohlraum kann eine z.B. gitterförmige Sicherung gegen Herausfallen des Schaltelementes und/oder einen Verschluß nach oben aufweisen. Die Erfindung betrifft ferner ein Mikrosystem mit einer integrierten Schaltung und dem mikromechanischen Bauteil, sowie Herstellverfahren für das Bauteil und das Mikrosystem. Das Bauteil und die Schaltung können dabei auf sehr einfache Weise gleichzeitig hergestellt werden.

    Abstract translation: 微机电部件（BT）具有固定的微机械结构，其包括由一个或多个导电层（3）形成并彼此绝缘的至少两个电极（E）。 它还包括形成导电开关元件（S）的中空空间（H）中的可移动微机械结构。 开关元件（S）能够在电极（E）之间形成电接触。 为了制造部件（BT），首先在基板（1）上形成下绝缘层（2）。 固定（E）和可移动（S）结构然后由一个或多个导电层（3）形成。 这些嵌入在中间绝缘层（4,5）中。 中空空间（H）通过蚀刻而除去开关元件（S）周围的绝缘层（4,5）和至少部分地在每个电极（E）的表面上而形成。

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