SYSTEM AND METHOD FOR FABRICATING PEROVSKITE FILM FOR SOLAR CELL APPLICATIONS
    51.
    发明公开
    SYSTEM AND METHOD FOR FABRICATING PEROVSKITE FILM FOR SOLAR CELL APPLICATIONS 审中-公开
    系统VERFAHREN ZUR HERSTELLUNG EINES PEROWSKITFILMSFÜRSOLARZELLENANWENDUNGEN

    公开(公告)号:EP3140873A1

    公开(公告)日:2017-03-15

    申请号:EP15789207.6

    申请日:2015-04-10

    IPC分类号: H01L51/44 C23C14/06 H01L51/48

    摘要: A system and method for fabricating perovskite films for solar cell applications are provided, the system including a housing for use as a vacuum chamber, a substrate stage coupled to the top section of the housing; a first evaporator unit coupled to the bottom section of the housing and configured to generate BX2 (metal halide material) vapor; a second evaporator unit coupled to the housing and configured to generate AX (organic material) vapor; and a flow control unit coupled to the housing for controlling circulation of the AX vapor. The dimensions of the horizontal cross-sectional shape of the first evaporator unit, the dimensions of the horizontal cross-sectional shape of the substrate stage, and the relative position in the horizontal direction between the two horizontal cross-sectional shapes are configured to maximize the overlap between the two horizontal cross-sectional shapes.

    摘要翻译: 提供一种用于制造用于太阳能电池应用的钙钛矿薄膜的系统和方法,该系统包括用作真空室的壳体,耦合到壳体顶部的基底台; 第一蒸发器单元,其联接到所述壳体的底部并且被配置为产生BX2(金属卤化物材料)蒸气; 耦合到所述壳体并被配置为产生AX(有机材料)蒸气的第二蒸发器单元; 以及流量控制单元,其耦合到所述壳体以控制所述AX蒸汽的循环。 第一蒸发器单元的水平横截面形状的尺寸,基底台的水平横截面形状的尺寸以及两个水平横截面形状之间的水平方向上的相对位置被配置为使 在两个水平横截面形状之间重叠。

    LEED FOR SEM
    53.
    发明公开
    LEED FOR SEM 有权
    SEM的LEED

    公开(公告)号:EP2997590A1

    公开(公告)日:2016-03-23

    申请号:EP14797934.8

    申请日:2014-05-14

    发明人: SHINTAKE, Tsumoru

    摘要: A low energy electron diffraction (LEED) detection module (100) includes: a first vacuum chamber for receiving diffracted electrons from a specimen (109); a larger second vacuum chamber connected to the first vacuum chamber to receive the diffracted electrons that have been transported through the first vacuum chamber; a two-dimensional electron detector disposed in the second vacuum chamber to detect the diffracted electrons; a potential shield (106) disposed generally along an inner surface of the first vacuum chamber and an inner surface of the second vacuum chamber; a magnetic lens (105) to expand a beam of the diffracted electrons that have been transported through the first vacuum chamber towards the two-dimensional electron detector; and a generally plane-shaped energy filter (103) to repel electrons having an energy lower than the probe beam (203) of electrons that impinges on the specimen (109).

    摘要翻译: 低能电子衍射(LEED)检测模块(100)包括:用于接收来自样品(109)的衍射电子的第一真空室; 与第一真空室连接以接收已经通过第一真空室传送的衍射电子的较大的第二真空室; 设置在第二真空室中以检测衍射电子的二维电子探测器; 大致沿着第一真空室的内表面和第二真空室的内表面设置的电位屏蔽件(106) 磁透镜(105),其将通过所述第一真空室输送的所述衍射电子的束向所述二维电子检测器扩展; 和大致平面形状的能量滤波器(103),以排斥能量低于撞击在样本(109)上的电子的探测光束(203)的能量。