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    Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer
    63.
    发明公开
    Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer 审中-公开
    谐振换能器及其制造方法，以及用于谐振换能器的多层结构

    公开(公告)号：EP2829507A1

    公开(公告)日：2015-01-28

    申请号：EP14177608.8

    申请日：2014-07-18

    申请人： Yokogawa Electric Corporation

    发明人： Yoshida, Takashi ,  Okuda, Shuuji ,  Iwai, Shigeto

    IPC分类号： B81B3/00 ,  G01L1/10 ,  H01L41/09 ,  H03H3/007 ,  H03H9/24 ,  G01N29/12

    CPC分类号： B81B3/0021 ,  B81B3/0002 ,  B81B7/02 ,  B81B2201/0271 ,  B81B2201/0285 ,  B81C1/00198 ,  B81C1/00293 ,  B81C2203/0145 ,  G01L1/14 ,  G01N29/12 ,  G01N2291/014 ,  G01N2291/02827 ,  H01L41/094 ,  H03H3/0072 ,  H03H9/2463

    摘要： A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole, a second layer disposed over the first layer, a third layer covering the first layer and the second layer, and a projection extending from the second layer toward the resonator, the projection being spatially separated from the resonator, the projection, being separated from the first layer by a first gap, the second layer being separated from the first layer by a second gap, the first gap is communicated with the second gap.

    摘要翻译： 本发明公开了一种谐振转换器，包括硅单晶衬底，设置在硅单晶衬底上的硅单晶谐振器，由硅制成的壳体，以间隙包围谐振器，并与硅单晶衬底一起形成腔室，激励模块 配置成激励谐振器;振动检测模块，配置为检测谐振器的振动;第一层，设置在腔室上方，第一层具有通孔;第二层，设置在第一层上;第三层，覆盖第一层 以及从所述第二层向所述谐振器延伸的突起，所述突起在空间上与所述谐振器分离，所述突起与所述第一层分开第一间隙，所述第二层与所述第一层分离 通过第二间隙，第一间隙与第二间隙连通。

    Oven controlled MEMS oscillator
    70.
    发明公开
    Oven controlled MEMS oscillator 审中-公开
    微机械振荡器在回流温度下降温度

    公开(公告)号：EP2530836A1

    公开(公告)日：2012-12-05

    申请号：EP11168330.6

    申请日：2011-05-31

    申请人： IMEC

    发明人： Donnay, Stephane ,  Rottenberg, Xavier ,  Borremans, Jonathan ,  Tilmans, Hendrikus ,  van der Plas, Geert ,  Pertijs, Michiel

    IPC分类号： H03H9/02 ,  H03H9/08 ,  H03H9/10 ,  H03H9/24

    CPC分类号： H03H9/02448 ,  H03H9/08 ,  H03H9/1057 ,  H03H9/2463

    摘要： A system for generating an output signal having a substantially stable frequency, the system comprising: an oven (2); a micromechanical oscillator (11) inside the oven, provided for oscillating at a predetermined frequency; an excitation mechanism associated with the micromechanical oscillator and being configured for exciting the micromechanical oscillator; a temperature control loop (71,83,84,88) associated with the micromechanical oscillator and comprising components (61,62) for detecting, evaluating and adapting the temperature of the micromechanical oscillator (11) according to a ratiometric principle with resistive sensing; a frequency output (87) for outputting the predetermined frequency of the micromechanical oscillator (11) as a basis for generating the output signal; said components may have a first resp. second temperature dependent characteristic, the second temperature dependency being different from the first temperature dependency such that the first and second characteristics intersect within a predetermined temperature range.

    摘要翻译： 一种用于产生具有基本稳定频率的输出信号的系统，所述系统包括：烤箱（2）; 烘箱内的微机械振荡器（11），用于以预定频率振荡; 与微机械振荡器相关联并被配置用于激发微机械振荡器的激励机构; 与所述微机械振荡器相关联的温度控制回路（71,83,84,88）并且包括用于根据具有电阻感测的比例原理来检测，评估和调整所述微机械振荡器（11）的温度的组件（61,62） 用于输出微机械振荡器（11）的预定频率的频率输出（87）作为产生输出信号的基础; 所述组件可以具有第一或第二组。 第二温度依赖特性，第二温度依赖性不同于第一温度依赖性，使得第一和第二特性在预定温度范围内相交。