Abstract:
An optical system for a multidetector array spectrophotometer includes multiple light sources (10,12) for emitting light of selected wavelength ranges and means for selectively transmitting the selected wavelength ranges of light to respective slits (40,42) of a multi-slit spectrograph for multiple wavelength range detection. The spectrograph has two or more slits (40,42) which direct the selected wavelength ranges of the light spectra to fall upon a dispersive and focusing system which collects light from each slit, disperses the light by wavelength and refocuses the light at the positions of a single set of detectors (46).
Abstract:
A spectrometer includes a source of light (12), a slit member (18) along the path of the light emitted from the source, a holographic, concave grating (24) in the path of the light passing through the slit member, and a photodetector (28) in the path of the diffracted light reflected from the grating. The photodetector (28) is positioned substantially along the portion of the primary horizontal focal curve of the grating where it is intersected three times by a vertical focal curve of the grating. The three intersections are on the same side of the normal vector to the grating and two of the intersecting points being the positions of the laser used to form the grating.
Abstract:
L'invention concerne un dispositif optique d'éclairement d'un échantillon pour un ellipsomètre spectroscopique du type à analyseur tournant. L'image de la fente de sortie (Fʹ) d'un monochromateur est conjuguée avec un point (Fʹ₂) d'une surface d'un échantillon (E) par deux miroirs sphériques (M₇ et M₈). Une fente (Fʹ₁₅) de correction d'astigmatisme est disposée au voisinage du conjugué (Fʹ₁) de la fente de sortie (Fʹ) du monochromateur par rapport au miroir sphérique (M₇, et perpendiculairement à celui-ci et au trajet optique, de manière à être conjuguée avec ledit point (Fʹ₂) à travers le miroir sphérique (M₈). On obtient ainsi une tache lumineuse de faibles dimensions sans défaut d'astigmatisme. Application à l'ellipsométrie résolue spatialement.
Abstract:
A spectrometer comprises a light detection element provided with a light passing part (21) and a light detection part (22); a support (30) fixed to the light detection element such that a space (S) is formed between the light passing part and the support; a first reflection part (11) provided in the support and configured to reflect light passing through the light passing part in the space; a dispersive part (42) provided in the light detection element and configured to disperse and reflect the light reflected by the first reflection part in the space; and a second reflection part (41) provided in the support and configured to reflect the light dispersed and reflected by the dispersive part to the light detection part in the space.
Abstract:
A spectrometer 1A includes a light detection element 20 provided with a light passing part 21, a first light detection part 22, and a second light detection part 26, a support 30 fixed to the light detection element 20 such that a space S is formed, a first reflection part 11 provided in the support 30 and configured to reflect light L1 passing through the light passing part 21 in the space S, a second reflection part 12A provided in the light detection element 20 and configured to reflect the light L1 reflected by the first reflection part 11 in the space S, and a dispersive part 40A provided in the support 30 and configured to disperse and reflect the light L1 reflected by the second reflection part 12A to the first light detection part 22 in the space S. A plurality of second light detection parts 26 is disposed in a region surrounding the second reflection part 12A.