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    Method of performing spectroscopy in a transmission charged-particle microscope
    71.
    发明公开
    Method of performing spectroscopy in a transmission charged-particle microscope 审中-公开
    在einem Transmissions-Ladungsträger-Mikroskop的Verfahren zurSpektroskopiedurchführung

    公开(公告)号：EP2993682A1

    公开(公告)日：2016-03-09

    申请号：EP14183576.9

    申请日：2014-09-04

    Applicant: FEI COMPANY

    Inventor： De Jong, Erwin ,  Lazar, Sorin ,  Tiemeijer, Peter ,  Geurink, Rudolf

    IPC: H01J37/05 ,  H01J37/09 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/226 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/15 ,  H01J2237/2007 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2802

    Abstract: A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising:
    - A specimen holder, for holding a specimen;
    - A source, for producing a beam of charged particles;
    - An illuminator, for directing said beam so as to irradiate the specimen;
    - An imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams,
    which method comprises the following steps:
    - Using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array;
    - Providing a radiation sensor in said flux upstream of said aperture device;
    - Using said sensor to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector;
    - Using a sensing result from said sensor to adjust a detection result from said detector.

    Abstract translation: 一种在透射带电粒子显微镜中执行光谱的方法，包括： - 用于保持样品的样品架; - 用于生产带电粒子束的源头; - 照明器，用于引导所述光束以照射所述样本; - 一种成像系统，用于将通过所述样本传输的带电粒子的通量引导到包括用于将所述通量分散到光谱子束的能量分辨阵列中的分散装置的分光装置上，所述方法包括以下步骤： - 使用 可调节孔径装置，以将所述阵列的第一部分允许到检测器，同时阻挡所述阵列的第二部分; - 在所述孔设备上游的所述通量中提供辐射传感器; - 使用所述传感器在所述阵列的所述第二部分的选定区域中执行局部辐射感测，同时由所述检测器检测所述第一部分; - 使用来自所述传感器的感测结果来调整来自所述检测器的检测结果。

    Multi-beam system for high throughput EBI
    73.
    发明公开
    Multi-beam system for high throughput EBI 有权
    Mehrstrahlsystem mit Hochdurchsatz-EBI

    公开(公告)号：EP2879155A1

    公开(公告)日：2015-06-03

    申请号：EP13195345.7

    申请日：2013-12-02

    Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

    Inventor： Frosien, Jürgen ,  Winkler, Dieter ,  Cook, Benjamin John

    IPC: H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/28

    CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/09 ,  H01J37/1472 ,  H01J37/1474 ,  H01J37/244 ,  H01J2237/0453 ,  H01J2237/0475 ,  H01J2237/1205 ,  H01J2237/21 ,  H01J2237/2448 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2817

    Abstract: A scanning charged particle beam device (1) configured to image a specimen (8) is described. The scanning charged particle beam device includes a source (2) of charged particles, a condenser lens (220, 950) for influencing the charged particles, an aperture plate (5) having at least two aperture openings (5A-5E) to generate at least two primary beamlets (4A, 4E) of charged particles, at least two deflectors (6A-6E) configured to individually deflect the at least two primary beamlets of charged particles so that each primary beamlet appears to come from a different source (2A-2C) , wherein the at least two deflectors are multi-pole deflectors (26a-26E) with an order of poles of 8 or higher, a multi-pole deflector (438) with an order of poles of 8 or higher, an objective lens (10) configured to focus the at least two primary beamlets onto the specimen, wherein the objective lens is a retarding field compound lens, a beam separator (13, 413, 414, 215) configured to separate the at least two primary beamlets from at least two signal beamlets, a beam bender (423, 479) , or a deflector or a mirror configured to deflect the at least two signal beamlets, wherein the beam bender is selected from the group consisting of: a hemispherical beam bender and a beam bender having at least two curved electrodes, and at least two detector elements (9A-9E) configured to individually measure the at least two signal beamlets.

    Abstract translation: 描述了构造成对样本（8）成像的扫描带电粒子束装置（1）。 扫描带电粒子束装置包括带电粒子源（2），用于影响带电粒子的聚光透镜（220,950）;具有至少两个孔径开口（5A-5E）的孔板（5） 至少两个带电粒子的主要子束（4A，4E），至少两个偏转器（6A-6E），其配置成单独地偏转带电粒子的至少两个主子束，使得每个主子束似乎来自不同的源（2A- 2C），其中所述至少两个偏转器是具有8或更高的极数的多极偏转器（26a-26E），具有8或更高的极数的多极偏转器（438），物镜 （10），被配置为将所述至少两个主子束聚焦到所述样本上，其中所述物镜是延迟场复合透镜，所述光束分离器（13,413,414,215）被配置为将所述至少两个主子束从 至少两个信号子束，光束弯曲器（423,479）或者一个偏转器 或者配置成使所述至少两个信号子束偏转的反射镜，其中所述光束弯曲器选自包括：半球形光束弯曲器和具有至少两个弯曲电极的光束弯曲器，以及至少两个检测器元件（9A- 9E），其被配置为单独测量所述至少两个信号子束。

    Analyser arrangement for particle spectrometer
    74.
    发明公开
    Analyser arrangement for particle spectrometer 有权
    用于颗粒谱仪分析仪组件

    公开(公告)号：EP2851933A1

    公开(公告)日：2015-03-25

    申请号：EP14185601.3

    申请日：2012-03-06

    Applicant: VG Scienta AB

    Inventor： Wannberg, Björn

    IPC: H01J49/06 ,  H01J37/05 ,  H01J49/48

    CPC classification number: H01J49/48 ,  G01N23/2273 ,  G01N2223/085 ,  H01J37/05 ,  H01J49/0031 ,  H01J49/06 ,  H01J49/061 ,  H01J49/484 ,  H01J2237/0535

    Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample (11), e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system (13), and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance (8) of the measurement region (3) can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample (11). This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

    Charged particle energy filter
    76.
    发明公开
    Charged particle energy filter 有权
    EnstriefilterfürStrahlen geladener Teilchen

    公开(公告)号：EP2592642A2

    公开(公告)日：2013-05-15

    申请号：EP12191522.7

    申请日：2012-11-07

    Applicant: FEI COMPANY

    Inventor： Parker, William ,  Hughes, Wesley

    IPC: H01J37/305 ,  H01J37/05

    CPC classification number: H01J37/05 ,  H01J37/3056 ,  H01J2237/043 ,  H01J2237/057 ,  H01J2237/1534

    Abstract: A multi-element electrostatic chicane energy filter (300) , with the addition of electrostatic quadrupole and hexapole excitations to the dipole elements (302, 304, 306, 308). A charged particle energy filter according to the present invention with a combination of dipole, quadrupole, and hexapole elements capable of producing a line focus at an aperture (310) reduces space-charge effects and aperture damage. A preferred embodiment allows the filter to act as a conjugate blanking system. The energy filter is capable of narrowing the energy spread to result in a smaller beam.

    Abstract translation: 一种多元件静电截面能量过滤器（300），其中向偶极元件（302,304,306,308）添加静电四极和六极激发。 根据本发明的具有能够在孔（310）处产生线焦点的偶极子，四极和六极元件的组合的带电粒子能量过滤器减少了空间电荷效应和孔径损伤。 优选的实施方案允许过滤器充当共轭体消隐系统。 能量滤波器能够缩小能量扩展以导致较小的光束。

    VORRICHTUNG ZUR STRUKTURIERUNG VON FESTKÖRPERFLÄCHEN MIT IONENSTRAHLEN AUS EINEM IONENSTRAHLSPEKTRUM
    77.
    发明公开
    VORRICHTUNG ZUR STRUKTURIERUNG VON FESTKÖRPERFLÄCHEN MIT IONENSTRAHLEN AUS EINEM IONENSTRAHLSPEKTRUM 有权
    设备技术构造具有离子束的固体表面由Ion Beam谱

    公开(公告)号：EP2586052A1

    公开(公告)日：2013-05-01

    申请号：EP11732397.2

    申请日：2011-06-15

    Applicant: Dreebit GmbH

    Inventor： ZSCHORNACK, Günter ,  SCHMIDT, Mike ,  GROSSMANN, Frank

    IPC: H01J37/05 ,  H01J49/28

    CPC classification number: H01J37/05 ,  H01J37/3056 ,  H01J49/288 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/31749

    Abstract: The invention relates to an apparatus (20) for structuring solid surfaces (18) using ion beams (141) from an ion beam spectrum (14), wherein the ion beam spectrum (14) has ions having different charge states and different masses. The apparatus (20) comprises an assembly (21) for generating the ion beam spectrum (14) with a cathode (1), a plurality of drift tube sections (21, 22, 23) and a collector (4) and also an arrangement (5) of ion extraction and focusing lenses on a common beam axis (15), which is surrounded by a permanent magnet system (3). Moreover, the apparatus (20) has, in addition to a collimator diaphragm (6) and a mass separating diaphragm (8), a Wien filter (7), a deflector (9, 10) and an objective (11), wherein the Wien filter (7) is formed from an electrode arrangement (70) having two segments (71, 72) and a two-pole magnet arrangement (30, 31). In the Wien filter (7), a first magnet (30) is fixedly arranged with a pole shoe (37) directed towards the beam axis (15) and embodied in convergent fashion within an iron yoke (35). A second magnet (31) lying opposite the first magnet (30) is mounted on the edge side with a first pole shoe part (34) embodied in movable fashion on the iron yoke (35) and is provided with a fixedly arranged second pole shoe part (36) directed towards the beam axis (15) and embodied in convergent fashion.

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