MINIATURSPEKTROMETER UND VERFAHREN ZUM SCHALTEN EINES MINIATURSPEKTROMETERS ZWISCHEN ABBILDUNGSMODUS UND SPEKTROMETERMODUS

    公开(公告)号:EP3411680A1

    公开(公告)日:2018-12-12

    申请号:EP16805831.1

    申请日:2016-12-05

    CPC classification number: G01J3/447 G01J3/0224 G01J3/027 G01J3/08

    Abstract: The invention relates to a miniature spectrometer (10) for spectrometry and for image capture, comprising a detection unit (7) for detecting an optical parameter and an optical unit, comprising a polarizer (2), a Savart element (40), which comprises a first birefrigent element (4a) and a second birefrigent element (4b), and an analyzer (5), characterized in that a first liquid crystal element (3a) is arranged between the polarizer (2) and the Savart element (40), which is designed to adjust a fourth polarization axis (203) from a radiation (103) emitted from the first liquid crystal element such that, in an imaging mode of the miniature spectrometer (10), the radiation (103) emitted from the first liquid crystal element passes through the first birefrigent element (4a) without splitting and, in a spectrometer mode of the miniature spectrometer (10), the radiation (103) emitted from the first liquid crystal element is split in the first birefringent element (4a) into a first ordinary beam (500b) and a first extraordinary beam (500a) and wherein the analyzer (5) is arranged in the beam path behind the Savart element (40) and the detection unit (7) is arranged in the beam path behind the analyzer (5).

    IMAGING SPECTROMETER
    89.
    发明授权
    IMAGING SPECTROMETER 有权
    IMAGE管辖谱仪

    公开(公告)号:EP1495293B1

    公开(公告)日:2008-08-13

    申请号:EP03718940.4

    申请日:2003-04-15

    CPC classification number: G01J4/04 G01J3/2823 G01J3/447 G01J3/51

    Abstract: An imaging spectrometer (2) is disclosed that comprises imaging means for dividing a received image into two or more spatially separated spectral images and means for detecting each spectral image (4), and is characterised in that the imaging means comprises at least one polarising beam splitter (18, 20, 22; 64, 68, 72). The polarising beam splitter may be a Wollaston prism. In one embodiment of the invention, the imaging means comprises image replication means (12) to produce two or more spatially separated images, and one or more filter elements such as dichroic filters (8) which act to alter the spectral characteristics of one or more of the spatially separated images. In a further embodiment of the invention the imaging means comprises one or more spectral replication means arranged in optical series, each spectral replication means comprising an optical retardation element (62, 66, 70) and a polarising beam splitter (64, 68, 72).

    INTERFEROMETER HAVING REDUCED GHOST BEAM EFFECTS
    90.
    发明公开
    INTERFEROMETER HAVING REDUCED GHOST BEAM EFFECTS 有权
    具有减少BEAM寄生虫影响干涉

    公开(公告)号:EP1208350A4

    公开(公告)日:2002-10-30

    申请号:EP00950627

    申请日:2000-07-25

    Applicant: ZYGO CORP

    Inventor: DE GROOT PETER J

    CPC classification number: G01B9/02059 G01B9/02003 G01B9/02018 G01B2290/70

    Abstract: Polarization interferometric architectures (10), preferably plane mirror types, having first and second measurement legs are provided with retardation elements (18, 20, 24), preferably, at least one set of split waveplates (18, 20), comprised of two segments (18, 20), tilted slightly (e.g., 2 mrad) in opposite directions with respect to each other to reduce the effects of undesirable ghost beams that otherwise would travel along the same path as the principal beams (14, 45) to produce significant cyclic errors. With the use of the split waveplates (18, 20), double reflection ghost beams have net tilts relative to the principal measurement beam, and therefore do not contribute to interference effects. This effectively eliminates waveplate ghost reflections as a source of error. Use of the such split, tilted waveplates (18, 20) may be made in a variety of polarization interferometers including, but not limited to, uncompensated plane mirror, high stability plane mirror, differential plane mirror, double differential plane mirror, and dual linear/angular types.

Patent Agency Ranking