Process for plasma treatment employing ceramic-filled polyamideimide composite parts
    8.
    发明公开
    Process for plasma treatment employing ceramic-filled polyamideimide composite parts 审中-公开
    Verfahren zur Plasmabehandlung mitkeramikgefülltenPolyamid-Imid-Verbundstoffteilen

    公开(公告)号:EP2525387A1

    公开(公告)日:2012-11-21

    申请号:EP11166460.3

    申请日:2011-05-17

    申请人: QUADRANT EPP AG

    IPC分类号: H01J37/32

    CPC分类号: H01J37/32495

    摘要: Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.

    摘要翻译: 等离子体反应器的内部组分由耐热陶瓷填充的等离子体有用的聚合物如高温工程热塑性塑料,优选聚酰胺酰亚胺组成。 这些部件在低压下暴露于等离子体时表现出低侵蚀速率。