公开(公告)号：EP1955355A2

公开(公告)日：2008-08-13

申请号：EP06837734.0

申请日：2006-11-15

申请人： Alis Corporation

发明人： WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS, Louis S. III ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  MARKWORT, Lars ,  ADERHOLD, Dirk

IPC分类号： H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J27/26

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

公开(公告)号：EP2416344A2

公开(公告)日：2012-02-08

申请号：EP11183110.3

申请日：2006-11-15

申请人： Alis Corporation

发明人： Edinger, Klaus ,  Markwort, Lars ,  Mantz, Ulrich ,  Ward, Billy W. ,  Notte, John A. ,  Farkas, Louis ,  Percival, Randall ,  Hill, Raymond ,  Aderhold, Dirk

IPC分类号： H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B82Y10/00 ,  H01J27/26 ,  H01J37/20

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample.

摘要翻译： 本发明涉及一种方法，其包括以下步骤：提供具有三至二十个原子的端子架的导电尖端，通过使气体与导电尖端相互作用而产生第一离子束，提供离子光学系统 通过离子光学系统消除第一离子束中的一些离子以产生第二离子束，所述第二离子束包括70％或更多的离子，其经由气体与导电尖端的端子架的一个原子的相互作用而产生， 以及使第二离子束与活化气体相互作用以促进样品表面的化学反应。

公开(公告)号：EP1955351A2

公开(公告)日：2008-08-13

申请号：EP06837735.7

申请日：2006-11-15

申请人： Alis Corporation

发明人： WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

IPC分类号： H01J9/02

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

公开(公告)号：EP2416342A3

公开(公告)日：2013-06-05

申请号：EP11182539.4

申请日：2006-11-15

申请人： Alis Corporation

发明人： Ward, Billy ,  Notte IV, John A. ,  Farkas, Louis ,  Percival, Randall ,  Hill, Raymond

IPC分类号： H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/317 ,  B82Y10/00 ,  G01N23/225 ,  H01J27/26 ,  H01J37/20

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a system that comprises an ion source, wherein the system is capable of imaging the ion source in a first mode, and the system is capable of using the ion source to collect an image of a sample in a second mode, the sample being different from the ion source.
The figure shows a gas field ion microscopy system (100).

公开(公告)号：EP2416342A2

公开(公告)日：2012-02-08

申请号：EP11182539.4

申请日：2006-11-15

申请人： Alis Corporation

发明人： Ward, Billy ,  Notte IV, John A. ,  Farkas, Louis ,  Percival, Randall ,  Hill, Raymond

IPC分类号： H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/317 ,  B82Y10/00 ,  G01N23/225 ,  H01J27/26 ,  H01J37/20

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a system that comprises an ion source, wherein the system is capable of imaging the ion source in a first mode, and the system is capable of using the ion source to collect an image of a sample in a second mode, the sample being different from the ion source.

摘要翻译： 本发明涉及一种包括离子源的系统，其中系统能够以第一模​​式成像离子源，并且系统能够使用离子源以第二模式收集样品的图像， 样品不同于离子源。 该图显示了气体离子显微镜系统（100）。

公开(公告)号：EP1955356A2

公开(公告)日：2008-08-13

申请号：EP06837944.5

申请日：2006-11-15

申请人： Alis Corporation

发明人： WARD, Billy W. ,  NOTTE, John, A., IV ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall G. ,  HILL, Raymond

IPC分类号： H01J37/28

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

公开(公告)号：EP2416343A3

公开(公告)日：2013-06-05

申请号：EP11182566.7

申请日：2006-11-15

申请人： Alis Corporation

发明人： Mantz, Ulrich ,  Steigerwald, Michael ,  Ward, Billy W. ,  Notte, John A. ,  Farkas, Louis ,  Percival, Randall ,  Hill, Raymond

IPC分类号： H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B81B1/00 ,  H01J27/26 ,  B82Y10/00 ,  H01J37/20

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a system, comprising a scanning electron microscope capable of providing an electron beam and a gas field ion source (120) capable of interacting with a gas (182) to generate an ion beam (192). The scanning electron microscope and the gas field ion microscope (100) are positioned so that, during use, both the electron beam and the ion beam can be used to investigate a sample (180). A system according to the present invention also comprises a focused ion beam instrument.
The figure published with the abstract only shows the gas field ion microscope (100).

摘要翻译： 本发明涉及一种系统，其包括能够提供电子束的扫描电子显微镜和能够与气体（182）相互作用以产生离子束（192）的气体场离子源（120）。 扫描电子显微镜和气体场离子显微镜（100）的位置使得在使用过程中，电子束和离子束都可用于研究样品（180）。 根据本发明的系统还包括聚焦离子束仪器。 与摘要一起公布的数字仅显示气田离子显微镜（100）。

公开(公告)号：EP1974365A2

公开(公告)日：2008-10-01

申请号：EP06837732.4

申请日：2006-11-15

申请人： Alis Corporation

发明人： WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard ,  MCVEY, Shawn ,  BIHR, Johannes

IPC分类号： H01J9/02

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

公开(公告)号：EP2418674A3

公开(公告)日：2013-06-05

申请号：EP11183114.5

申请日：2006-11-15

申请人： Alis Corporation

发明人： Markwort, Lars ,  Aderhold, Dirk ,  Ward, Billy W. ,  Notte, John A. ,  Farkas, Louis ,  Percival, Randall ,  Hill, Raymond

IPC分类号： H01J37/28 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  H01J9/02 ,  B81B1/00 ,  G01N23/225

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a system comprising a gas field ion source (120) capable of interacting with a gas (182) to generate an ion beam (192) and an ion optics (130) configured to focus the ion beam onto a surface (181) of a sample (180) so that the ion beam can interact with a sample to cause particles (194) to leave the sample, wherein the ion beam has a spot size with a dimension of 10 nm or less at the surface of the sample. The system also comprises at least one detector (150), which is configured so that, during use, the at least one detector can detect secondary ions (194) emitted by the sample due to the interaction of the ion beam with the surface of the sample, wherein the at least one detector is further configured to analyse the detected secondary ions according to their mass. The system according to the present invention also comprises an electronic processor that can process information based on the detected secondary ions to determine information about the mass of the detected secondary ions.

摘要翻译： 本发明涉及一种系统，该系统包括能够与气体（182）相互作用以产生离子束（192）的气体场离子源（120）和配置成将离子束聚焦到表面上的离子光学器件（130） 样品（180）的表面（181），使得离子束可以与样品相互作用以使粒子（194）离开样品，其中离子束具有在其表面上的尺寸为10nm或更小的点尺寸 样品。 该系统还包括至少一个检测器（150），该检测器被配置为使得在使用期间，至少一个检测器可以检测由于离子束与第一离子束的表面相互作用而由样品发射的第二离子（194） 样品，其中所述至少一个检测器进一步配置成根据它们的质量分析检测到的二级离子。 根据本发明的系统还包括电子处理器，其可以基于检测到的二次离子处理信息以确定关于检测到的二次离子的质量的信息。

公开(公告)号：EP2416344A3

公开(公告)日：2013-06-05

申请号：EP11183110.3

申请日：2006-11-15

申请人： Alis Corporation

发明人： Edinger, Klaus ,  Markwort, Lars ,  Mantz, Ulrich ,  Ward, Billy W. ,  Notte, John A. ,  Farkas, Louis ,  Percival, Randall ,  Hill, Raymond ,  Aderhold, Dirk

IPC分类号： H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B82Y10/00 ,  H01J27/26 ,  H01J37/20

CPC分类号： H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample.
The figure shows a gas field ion microscope system (100).