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13 条记录 (耗时 0.02 秒)

    MICROPOSITIONING DEVICE
    1.
    发明公开
    MICROPOSITIONING DEVICE 有权
    微定位装置

    公开(公告)号：EP1340112A1

    公开(公告)日：2003-09-03

    申请号：EP01999851.7

    申请日：2001-12-03

    申请人： Nanofactory Instruments AB

    发明人： OLIN, Hakan ,  ALTHOFF, Fredrik ,  SVENSSON, Krister

    IPC分类号： G02B21/32 ,  H01L41/08

    CPC分类号： G02B21/32 ,  G01Q10/04 ,  H01J2237/20264 ,  H02N2/0095 ,  H02N2/025

    摘要： This invention relates to a device for micropositioning of an object (4), e.g. for use in a microscope. The device comprises an acceleration unit (1) and an intermediate part (3), connecting said acceleration unit (1) with said object (4). The position of the object relative to the acceleration unit (1) is variable at high acceleration or retardation of said acceleration unit (1), owing to mechanical inertia of the object (4). Further, the intermediate part (3) has a first end (3'), being attached to said acceleration unit (1), and a second end (3'), being provided with an essentially circumferential contact surface (3a), and the object (4) is provided with clamping elements (4'). These clamping elements (4') are adapted to clamp around said contact surface (3a) of said intermediate part (3) in order to hold the object (4) in relation to the intermediate part (3) merely by the clamping force and the frictional force exerted by said clamping elements (4') upon said contact surface (3a).

    A DEVICE FOR MICROPOSITIONING OF AN OBJECT
    6.
    发明公开
    A DEVICE FOR MICROPOSITIONING OF AN OBJECT 审中-公开
    DEVICE微将对象定位

    公开(公告)号：EP1203258A1

    公开(公告)日：2002-05-08

    申请号：EP00944511.5

    申请日：2000-06-13

    申请人： Nanofactory Instruments AB

    发明人： OLIN, H kan ,  GUSTAVSSON, Kristian ,  GRALVIK, Per

    IPC分类号： G02B21/32 ,  B25J7/00

    CPC分类号： B82Y15/00 ,  B25J7/00 ,  G02B21/32 ,  Y10S977/872

    摘要： The invention relates to a device for micropositioning of objects (4), for example, in microscopy. The device comprises an accelerating means (1) and a positioning unit (3) connected therewith and connected with the object (4). The position of the object relative to the positioning unit (3) can be changed at high acceleration or retardation of the accelerating means (1) owing to mechanical inertia of the object (4). The positioning unit (3) comprises at least two clamping elements (3a, 3b), between which the object is intended to be held merely by the clamping force and the frictional force exerted by these clamping elements.

    MEMS NANOINDENTER
    8.
    发明公开
    MEMS NANOINDENTER 审中-公开
    MEMS的纳米压痕

    公开(公告)号：EP1706888A2

    公开(公告)日：2006-10-04

    申请号：EP05704766.4

    申请日：2005-01-26

    申请人： Nanofactory Instruments AB

    发明人： ENOKSSON, Peter ,  NAFARI, Alexandra ,  OLIN, Hakan ,  ALTHOFF, Fredrik ,  DANILOV, Andrey ,  DAHLSTRÖM, Jens

    IPC分类号： H01J37/26 ,  B81B3/00 ,  G01L1/00 ,  G01L1/14

    CPC分类号： G01Q60/366 ,  G01Q30/02 ,  G01Q80/00 ,  H01J2237/2067 ,  Y10T156/10

    摘要： A force sensor (200) and nanoidenation system (300) using such force sensor (200), wherein the force sensor (200) comprise a movable membrane (207) attached to a fixed bulk structure (210) with springs (201, 202, 203, 204) formed between the membrane (207) and bulk structure (210); the springs (201, 202, 203, 204) may be provided two on each side of a rectangular membrane(207) and each in the form of a U-shape with displacing elements (801) formed perpendicular to each open end of each U-shaped spring (800). The force sensor further comprises electrodes (206) for detecting capacitive changes between the movable membrane (207) and the electrodes (206) in order to measure a movement in relation to an applied force. The membrane (207) further comprises a probe holding structure (214) for providing a solution for interchangeable probes (211).