FLAME-PERFORATED APERTURE MASKS
    7.
    发明公开
    FLAME-PERFORATED APERTURE MASKS 审中-公开
    火焰穿孔孔径口罩

    公开(公告)号:EP1964163A1

    公开(公告)日:2008-09-03

    申请号:EP06839016.0

    申请日:2006-12-05

    IPC分类号: H01L21/20

    摘要: An aperture mask is provided comprising an elongated web of flexible film having at least one deposition mask pattern formed in the film, wherein the deposition mask pattern defines deposition apertures that extend through the film that define at least a portion of one or more electronic circuit elements, and wherein deposition apertures are bounded by a rim, the rim being a portion of the mask which has a thickness greater than an average thickness for the mask. In another aspect, the present invention provides a method of making such an aperture mask comprising the steps of: providing a support surface, wherein the support surface includes a plurality of lowered portions; providing a burner, wherein the burner supports a flame, and wherein the flame includes a flame tip opposite the burner; contacting at least a portion of an elongated web of flexible film against the support surface; and heating the film with a flame from a burner to create apertures in the film in the areas covering the plurality of lowered portions.