公开(公告)号：EP1197778B1

公开(公告)日：2006-03-29

申请号：EP01308610.3

申请日：2001-10-09

申请人： Agere Systems Guardian Corporation ,  LUCENT TECHNOLOGIES INC.

发明人： Aksyuk, Vladimir A. ,  Jin, Sungho ,  Kim, Jungsang ,  Mavoori, Hareesh ,  Pardo, Flavio ,  Ramirez, Ainissa

IPC分类号： G02B26/08 ,  B81B3/00

CPC分类号： G02B26/0841 ,  B81B2201/042 ,  B81B2203/0127 ,  B81C1/00666 ,  B81C2201/0164 ,  G02B6/122 ,  G02B6/266 ,  G02B2006/12104

公开(公告)号：EP1197778A3

公开(公告)日：2003-07-16

申请号：EP01308610.3

申请日：2001-10-09

申请人： Agere Systems Guardian Corporation ,  Lucent Technologies Inc.

发明人： Aksyuk, Vladimir A. ,  Jin, Sungho ,  Kim, Jungsang ,  Mavoori, Hareesh ,  Pardo, Flavio ,  Ramirez, Ainissa

IPC分类号： G02B26/08 ,  B81B3/00

CPC分类号： G02B26/0841 ,  B81B2201/042 ,  B81B2203/0127 ,  B81C1/00666 ,  B81C2201/0164 ,  G02B6/122 ,  G02B6/266 ,  G02B2006/12104

摘要： The present invention provides a micro-electro-mechanical system (MEMS) optical device (100). The micro-electro-mechanical system (MEMS) optical device (100) includes a mirror (110) having a substrate (140) with an implanted light reflective optical layer (130) thereover, and a mounting substrate (120) on which the mirror (110) is movably mounted. The inclusion of the dopant (150) within the light reflective optical layer (130) increases the tensile stress of the device (100) and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.

公开(公告)号：EP1197778A2

公开(公告)日：2002-04-17

申请号：EP01308610.3

申请日：2001-10-09

申请人： Agere Systems Guardian Corporation ,  Lucent Technologies Inc.

发明人： Aksyuk, Vladimir A. ,  Jin, Sungho ,  Kim, Jungsang ,  Mavoori, Hareesh ,  Pardo, Flavio ,  Ramirez, Ainissa

IPC分类号： G02B26/08 ,  B81B3/00

CPC分类号： G02B26/0841 ,  B81B2201/042 ,  B81B2203/0127 ,  B81C1/00666 ,  B81C2201/0164 ,  G02B6/122 ,  G02B6/266 ,  G02B2006/12104

摘要： The present invention provides a micro-electro-mechanical system (MEMS) optical device (100). The micro-electro-mechanical system (MEMS) optical device (100) includes a mirror (110) having a substrate (140) with an implanted light reflective optical layer (130) thereover, and a mounting substrate (120) on which the mirror (110) is movably mounted. The inclusion of the dopant (150) within the light reflective optical layer (130) increases the tensile stress of the device (100) and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.

摘要翻译： 本发明提供了一种微机电系统（MEMS）光学装置（100）。 所述微机电系统（MEMS）光学装置（100）包括反射镜（110），其具有基材（140），在植入的光反射性光学层（130）有在和安装基板（120）在其上镜 （110）可移动地安装。 光反射光学层（130）内的掺杂剂（150）的内含物提高了设备​​（100）的拉伸应力，并倾向于以校正反射镜结构的凹曲度朝向理想平坦的构造。