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21 条记录 (耗时 0.013 秒)

    Method for forming micron-sized and smaller liquid droplets
    5.
    发明公开
    Method for forming micron-sized and smaller liquid droplets 失效
    一种用于制备液体的亚微米液滴过程

    公开(公告)号：EP0878244A3

    公开(公告)日：1999-04-14

    申请号：EP98303487.7

    申请日：1998-05-05

    申请人： Lucent Technologies Inc.

    发明人： Aksyuk, Vladimir A. ,  Denk, Winfried ,  Bishop, David J. ,  Tank, David W.

    IPC分类号： B05C5/02

    CPC分类号： B01L3/0262 ,  B05C5/02 ,  B05C11/105 ,  Y10T29/49105 ,  Y10T29/49204 ,  Y10T29/4921 ,  Y10T29/49885

    摘要： A method for forming micron-sized or smaller drops of liquid, and the use of the method in fabricating micro electro mechanical and micro mechanical devices is disclosed. A micropipette (4) is formed having an inside diameter no larger than the size of the drops to be formed. The micropipette is connected to a system (14) capable of developing a positive and optionally negative pressure within the micropipette. The tip of the micropipette is placed in liquid. The liquid is drawn into the micropipette via capillary action or from the negative pressure developed by the system. The micropipette is then positioned to deliver liquid to an intended location on a surface. To deliver the liquid, a positive pressure is developed within the micropipette (4). The positive pressure forces a micron-sized or smaller drop of liquid out of the micropipette. The method can be used to form micron-sized or smaller drops of adhesive for fixing in place various structural members that form microdevices.

    Article comprising a light-actuated micromechanical photonic switch
    6.
    发明公开
    Article comprising a light-actuated micromechanical photonic switch 审中-公开
    包含光致微机械光子开关的物品

    公开(公告)号：EP0902538A2

    公开(公告)日：1999-03-17

    申请号：EP98307019.4

    申请日：1998-09-01

    申请人： LUCENT TECHNOLOGIES INC.

    发明人： Aksyuk, Vladimir A. ,  Gammel, Peter L. ,  Bishop, David J. ,  Giles, Clinton R.

    IPC分类号： H03K17/968

    CPC分类号： G02B6/3568 ,  G02B6/122 ,  G02B6/3514 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/357 ,  G02B6/3584 ,  G02B2006/12104

    摘要： An article comprising a light-actuated photonic switch is disclosed. The light-actuated photonic switch advantageously includes a photogenerator that powers a micro-electromechanical systems (MEMS) switch having very low voltage requirements. The MEMS switch is operable to move a reflector into or out of a path of an optical signal travelling between two waveguides. Since the MEMS switch has such low voltage requirements, a long wave photogenerator, which generates relatively low voltages, can be used. As long wavelength light experiences relatively little attenuation in optical fiber, active lightwave circuits incorporating the present light-actuated photonic switch can have very long fiber runs to remote nodes.

    摘要翻译： 公开了一种包括光致动光开关的物品。 光致动光开关有利地包括为具有非常低电压要求的微机电系统（MEMS）开关供电的光生成器。 MEMS开关可操作以将反射器移入或移出在两个波导之间传播的光信号的路径。 由于MEMS开关具有如此低的电压要求，因此可以使用产生相对较低电压的长波光发生器。 由于长波长的光在光纤中经受的衰减相对较小，因此包含本光驱动光开关的有源光波电路可以具有非常长的光纤到达远端节点。

    Method and apparatus for making a micro device
    7.
    发明公开
    Method and apparatus for making a micro device 失效
    用于制备微阵列的方法和装置

    公开(公告)号：EP0880077A2

    公开(公告)日：1998-11-25

    申请号：EP98303499.2

    申请日：1998-05-05

    申请人： LUCENT TECHNOLOGIES INC.

    发明人： Aksyuk, Vladimir A. ,  Gammel, Peter L. ,  Bishop, David J.

    IPC分类号： G03F9/00

    CPC分类号： G03F9/00 ,  C23C14/042

    摘要： A hinged mask and a method for its use in manufacturing MEMS device are disclosed. According to the invention, the hinged mask and a portion of the MEMS device are formed at the same time on a support. Openings are formed in the mask, the openings defining a pattern that is transferable in the form of a patterned layer. After release of the MEMS device, the hinged mask is rotated out-of-plane about 180° to lie on top of the MEMS device. The hinged mask is used as a micro-sized shadow mask to deposit a patterned film of arbitrary composition on the MEMS device. Since the hinged plate is formed by the original lithography, it is aligned to the MEMS device with a high degree of accuracy.

    Method for forming micron-sized and smaller liquid droplets
    8.
    发明公开
    Method for forming micron-sized and smaller liquid droplets 失效
    Verfahren zur Herstellung von Submikron-Flüssigkeitströpfchen

    公开(公告)号：EP0878244A2

    公开(公告)日：1998-11-18

    申请号：EP98303487.7

    申请日：1998-05-05

    申请人： Lucent Technologies Inc.

    发明人： Aksyuk, Vladimir A. ,  Denk, Winfried ,  Bishop, David J. ,  Tank, David W.

    IPC分类号： B05C5/02

    CPC分类号： B01L3/0262 ,  B05C5/02 ,  B05C11/105 ,  Y10T29/49105 ,  Y10T29/49204 ,  Y10T29/4921 ,  Y10T29/49885

    摘要： A method for forming micron-sized or smaller drops of liquid, and the use of the method in fabricating micro electro mechanical and micro mechanical devices is disclosed. A micropipette (4) is formed having an inside diameter no larger than the size of the drops to be formed. The micropipette is connected to a system (14) capable of developing a positive and optionally negative pressure within the micropipette. The tip of the micropipette is placed in liquid. The liquid is drawn into the micropipette via capillary action or from the negative pressure developed by the system. The micropipette is then positioned to deliver liquid to an intended location on a surface. To deliver the liquid, a positive pressure is developed within the micropipette (4). The positive pressure forces a micron-sized or smaller drop of liquid out of the micropipette. The method can be used to form micron-sized or smaller drops of adhesive for fixing in place various structural members that form microdevices.

    摘要翻译： 公开了一种用于形成微米级或更小液滴的方法，以及在制造微机电和微机械装置中使用该方法。 形成具有不大于要形成的液滴的尺寸的内径的微量移液管（4）。 微量移液管连接到能够在微量移液管内形成正的和可选的负压的系统（14）。 微量吸头的尖端放置在液体中。 液体通过毛细管作用或由系统产生的负压吸入微量吸移管。 然后将微量移液器定位成将液体输送到表面上的预期位置。 为了输送液体，在微量移液管（4）内产生正压力。 正压迫使微米尺寸或更小的液体滴出微量移液管。 该方法可用于形成用于固定各种形成微型装置的结构构件的微米级或更小的粘合剂滴。