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公开(公告)号：EP1223453A3
公开(公告)日：2004-01-21
申请号：EP01310931.9
申请日：2001-12-28
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , Y10S359/904
摘要： A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element (115) that is rotatably connected to a support structure (125) via torsional members (116,117,121,122). The torsional members (116,117,121,122) provide a restoring force to keep the actuated element (115) planar to the surface of an underlying substrate (110). The surface of the substrate (110) has electrodes (130-133,130'-133') formed thereon. The electrodes (130-133,130'-133') are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes (eg. 132',133'), an electrostatic force is generated which causes the actuated element (115) to rotate out of plane. The electrodes (130-133,130'-133') have three components (eg. 132',131,133'). At least a portion of two of the components (eg. 132',131) is within the tilting area of the actuated element (115). The third (eg. 133') is outside the tilting area of the actuated element (115). The tilting area is defined as the surface area of the actuated element (115) as projected onto the underlying substrate (110).
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公开(公告)号：EP1223453B1
公开(公告)日：2006-11-15
申请号：EP01310931.9
申请日：2001-12-28
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , Y10S359/904
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3.发明公开Electrostatically actuated micro-electro-mechanical system (MEMS) device 有权Systemvorrichtung的Elektrostatischbetätigtemikroelektromechanische Systemvorrichtung
公开(公告)号：EP1223453A2
公开(公告)日：2002-07-17
申请号：EP01310931.9
申请日：2001-12-28
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , Y10S359/904
摘要： A micro-electro-mechanical system (MEMS) actuator device is disclosed. The MEMS actuator device has an actuated element (115) that is rotatably connected to a support structure (125) via torsional members (116,117,121,122). The torsional members (116,117,121,122) provide a restoring force to keep the actuated element (115) planar to the surface of an underlying substrate (110). The surface of the substrate (110) has electrodes (130-133,130'-133') formed thereon. The electrodes (130-133,130'-133') are adapted to receive an electrical potential. When an electrical potential is applied to certain of the electrodes (eg. 132',133'), an electrostatic force is generated which causes the actuated element (115) to rotate out of plane. The electrodes (130-133,130'-133') have three components (eg. 132',131,133'). At least a portion of two of the components (eg. 132',131) is within the tilting area of the actuated element (115). The third (eg. 133') is outside the tilting area of the actuated element (115). The tilting area is defined as the surface area of the actuated element (115) as projected onto the underlying substrate (110).
摘要翻译： 公开了一种微机电系统（MEMS）致动器装置。 MEMS致动器装置具有经由扭转构件（116,117,121,122）可旋转地连接到支撑结构（125）的致动元件（115）。 扭转构件（116,117,121,122）提供恢复力以将致动元件（115）平坦地保持到下面的基底（110）的表面。 基板（110）的表面具有在其上形成的电极（130-133,130'-133'）。 电极（130-133,130'-133'）适于接收电位。 当电势施加到某些电极（例如132'，133'）时，产生静电力，使得致动元件（115）旋转离开平面。 电极（130-133,130'-133'）具有三个部件（例如132'，131,133'）。 两个部件（例如132'，131）中的至少一部分在致动元件（115）的倾斜区域内。 第三（例如133'）在致动元件（115）的倾斜区域之外。 倾斜区域被定义为被投影到下面的基底（110）上的致动元件（115）的表面积。
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公开(公告)号：EP0903606B1
公开(公告)日：2004-07-28
申请号：EP98307237.2
申请日：1998-09-08
IPC分类号： G02B21/00
CPC分类号： G01Q10/04 , H01H2001/0068 , H02N1/008 , Y10S977/872
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公开(公告)号：EP0961150A3
公开(公告)日：2004-05-19
申请号：EP99304071.6
申请日：1999-05-26
发明人： Aksyuk, Vladimir Anatolyevich , Barber, Bradley Paul , Bishop, David John , Gammel, Peter Ledel , Giles, Randy Clinton
IPC分类号： G02B6/35
CPC分类号： G02B6/353 , G02B6/3552 , G02B6/3566 , G02B6/3572 , G02B6/423 , G02B6/4232
摘要： A micro-opto-electromechanical systems (MOEMS) device comprises a micro-electromechanical systems (MEMS) device and a silicon optical-bench (SiOB) device or system. The MEMS device interacts with the SiOB mechanically or electromagnetically. In one embodiment, the MEMS device is operable to provide a switching function for the SiOB device. The MEMS device comprises an actuator that is mechanically linked to an optical interruptor that prevents at least a portion of an optical signal incident thereon from propagating therethrough. In an actuated state, the actuator causes the optical interruptor to move into an optical path of an optical signal traveling through an SiOB device. The signal is at least partially reflected or absorbed such that only a portion of the signal propagates beyond the point of contact with the optical interruptor. Since SiOB processing is typically incompatible with MEMS device processing, the MEMS and SiOB devices are formed on separate supports and then attached, such as via flip-chip bonding methods.
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公开(公告)号：EP0903607A3
公开(公告)日：2001-10-04
申请号：EP98306190.4
申请日：1998-08-04
CPC分类号： G02B6/3514 , G02B6/353 , G02B6/3548 , G02B6/3562
摘要： A bypass-exchange switch (102) for switching the path of at least one optical signal (92a) includes a telecentric imaging device (104) for high efficiency coupling of the optical signal into either of two outputs (90b,90d). The switch also includes an optical director (106) for changing the operating mode of the switch from an exchange state to a bypass state wherein the different outputs are selected. The optical director is implemented as a variable reflectivity mirror, or a mechanically-actuated mirror. The switch may include a wavelength selective filter for permanently bypassing or exchanging preselected wavelengths of the optical signals.
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公开(公告)号：EP0880040A3
公开(公告)日：1999-02-03
申请号：EP98303498.4
申请日：1998-05-05
IPC分类号： G02B6/26
CPC分类号： G02B6/357 , G02B6/3514 , G02B6/353 , G02B6/3548 , G02B6/3552 , G02B6/3594
摘要： Optical switches utilizing electrostatically-driven actuators formed from micro machined plates are disclosed. Under an applied voltage, a movable plate moves toward a fixed plate or a conductive region of an underlying support. The switches further include a mechanical linkage from the actuator to an optical device. The displacement of the movable plate generated at the actuator is transferred, via the mechanical linkage, to the optical device. The optical device, which is positioned in close proximity to optically-aligned spaced optical fibers, is movable into and out of an optical path defined by the optical cores of the optical fibers by the action of the actuator. An "in-plane" optical switch includes an actuator having two vertically-oriented electrodes, which generates a substantially horizontally-directed displacement of the movable plate and the linked optical device. An "out-of-plane" optical switch includes an actuator having at least one horizontally-disposed suspended above a conductive region of an underlying support. The actuator generates a substantially vertically-directed displacement of the movable plate and the linked optical device.
摘要翻译： 公开了利用由微加工板形成的静电致动致动器的光开关。 在施加的电压下，可移动板朝向下方支撑件的固定板或导电区域移动。 开关还包括从致动器到光学装置的机械联动。 在致动器处产生的可动板的位移通过机械连杆传递到光学装置。 靠近光学对准间隔开的光纤定位的光学器件可通过致动器的作用而进入和离开由光纤的光纤芯限定的光路。 “平面内”光开关包括具有两个垂直取向的电极的致动器，其产生可移动板和连接的光学装置的大致水平定向的位移。 “平面外”光开关包括具有至少一个水平地布置在下面的支撑件的导电区域上方的致动器。 致动器产生可移动板和连接的光学装置的基本垂直定向的位移。
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公开(公告)号：EP1093003B1
公开(公告)日：2002-10-09
申请号：EP00307182.6
申请日：2000-08-21
IPC分类号： G02B26/08
CPC分类号： G02B26/0866 , B81B3/004 , B81B3/0062 , B81B7/0003 , B81B2201/042 , G02B26/0841
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公开(公告)号：EP1093005A2
公开(公告)日：2001-04-18
申请号：EP00308683.2
申请日：2000-10-03
发明人： Aksyuk, Vladimir Anatolyevich , Bishop, David John , Bolle, Cristian A. , Giles, Randy Clinton , Pardo, Flavio
IPC分类号： G02B26/08
CPC分类号： B81B7/0003 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0866
摘要： A micro-electro-mechanical (MEM) optical device having a reduced footprint for increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and second pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second beam ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device for reducing the contact area between the optic device edge and the substrate.
摘要翻译： 微电子机械（MEM）光学器件具有减小的占地面积以增加衬底上的产量。 MEM装置包括具有外边缘并由设置在基板上的支撑结构支撑的光学元件。 该支撑结构通过第一和第二对梁机械地连接到基板，该第一和第二对梁将该结构移动到激活位置，以将光学装置升高到基板上方。 当处于升高的位置时，光学装置可以选择性地倾斜以偏转光学信号。 梁的一端连接到支撑结构，另一端连接到衬底并且被设置为使得第一和第二梁端位于光学装置外边缘附近。 在优选实施例中，在光学装置的外边缘上包括粘滞力减小元件，用于减小光学装置边缘与基底之间的接触面积。
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10.发明公开Hybrid electro-optic device with combined mirror arrays 审中-公开Elektrooptische Hybridvorrichtung mit Spiegelanordnung
公开(公告)号：EP1093004A2
公开(公告)日：2001-04-18
申请号：EP00308118.9
申请日：2000-09-18
发明人： Aksyuk, Vladimir Anatolyevich , Bishop, David John , Bolle, Christian A. , Gates II, John Vanatta , Giles, Randy Clinton , Scotti, Ronald Edward
CPC分类号： G02B26/0816 , G02B6/3512 , G02B6/3556 , H01L2224/48091 , H01L2224/48227 , Y10S359/904 , H01L2924/00014
摘要： An optical signal processing apparatus includes at least two mirror array chips mounted on an upper surface of a base in close proximity to each other to form a compound array. Each mirror array chip includes a substrate, and a plurality of spaced-apart mirrors mounted on an upper surface of the substrate. The mirrors are movable in response to an electrical signal. A plurality of electrical leads for conduct the electrical signals to the mirrors, at least a portion of the electrical leads extending at least partially along the upper surface of the base between a lower surface of the substrate and the upper surface of the base.
摘要翻译： 光信号处理装置包括安装在彼此靠近的基座的上表面上的至少两个反射镜阵列芯片，以形成复合阵列。 每个反射镜阵列芯片包括衬底和安装在衬底的上表面上的多个间隔开的反射镜。 反射镜响应于电信号而是可移动的。 用于将电信号传导到反射镜的多个电引线，至少一部分电引线至少部分地沿着基底的上表面延伸到基底的下表面和基底的上表面之间。
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