摘要:
The invention relates to an electromechanical microstructure (1) consisting of a first mechanical part (102) which is made from a first conductive material and which comprises (i) an elastically-deformable area (104) having a given thickness value and an exposed surface (2) and (ii) a first organic film (4) having a given thickness, which is disposed over the entire exposed surface (2) of the aforementioned deformable area (104). The invention is characterised in that (a) the thickness of the first film (4) is such that the elastic response of the deformable area (104) comprising the first film (4) does not change by more than 5 % in relation to the response of the bare deformable area (104) or (b) in that the thickness of the first film (4) is ten times smaller than the thickness of the deformable area (104). The invention is suitable for the production of electromechanical microstructures.
摘要:
The invention relates to the use of radicals RO?, R representing a hydrogen atom, an alkyl group comprising between 2 and 15 carbon atoms, a -COR' acyl group in which R' represents an alkyl group comprising between 2 and 15 carbon atoms, or a -COAr aroyl group in which Ar represents an aromatic group comprising between 6 and 15 carbon atoms, for the hydroxylation, alcoxylation or oxycarbonylation of polymer surfaces or mixtures of polymers, said polymers comprising monomeric units, at least 50 % thereof comprising aliphatic units, and said RO? radicals being generated electrochemically or photochemically.
摘要:
The invention relates to a method for selective coating of specific regions of a composite surface with a conducting film, a method for production of microelectronic interconnections, methods and processes for the production of integrated circuits and, more particularly, the formation of networks of metallic interconnections. The invention further relates to methods and processes for the production of microsystems and connectors.
摘要:
The invention relates to a coating support comprising numerous conductive tracks (12) which are associated with a shared addressing contact (18) and with means of selecting at least one track from said numerous tracks, which is to be electrochemically coated. According to the invention, the aforementioned selection means comprise means (20) of shifting a polarisation voltage, which are connected between the shared addressing contact and at least one track to be addressed. The invention can be used to coat conductive tracks.
摘要:
The invention relates to a method of coating a surface of a substrate with a nucleation film made from a metal material, said surface being a conducting or semiconducting surface and comprising recesses and/or protrusions. The inventive method consists in: depositing an organic film on the surface, the thickness of said film being such that the free face thereof conformally follows the recesses and/or protrusions of the conducting or semiconducting surface on which it is deposited; inserting a precursor of the metal material into the organic film deposited on the surface, simultaneously with or following the step consisting in depositing the organic film on said surface; and transforming the precursor of the metal material into the metal material. The inventive method can be used for the production of integrated circuits, microelectronic interconnections and microsystems.
摘要:
The invention relates to a method of soldering a polymer surface with a conducting or semiconducting surface. The inventive method is characterised in that it comprises: a) the electro-grafting of an organic film on the conducting or semiconducting surface and b) an operation consisting in soldering the polymer surface with the thus grafted conducting or semiconducting surface. The invention also relates to the applications of said method and the structures obtained using same.