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公开(公告)号：EP2035597B1
公开(公告)日：2012-03-07
申请号：EP07765396.2
申请日：2007-06-13
发明人： PELLETIER, Jacques Henri , LACOSTE, Ana , BES, Alexandre , BECHU, Stéphane Jean Louis , SIROU, Jérôme
CPC分类号： H01J37/32862 , C23C16/4405 , H01J37/32871 , H01L21/67069
摘要： The invention concerns a device and a process, the device being a cleaning device utilizing a dry chemical means assisted by plasma from a reactor (10) containing an unwanted deposit on its walls and at least one other polarizable surface (12), characterized in that it comprises means (13, 14) for positively polarizing one or each of the polarizable surfaces relative to the reactor walls maintained at a reference potential.
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公开(公告)号：EP2044816A2
公开(公告)日：2009-04-08
申请号：EP07765802.9
申请日：2007-07-04
CPC分类号： H05H1/46 , H01J37/32192 , H01J37/32623 , H01J37/32678
摘要： The invention concerns a device for producing and/ or confining a plasma (10), comprising a recipient (13) within the volume of which the plasma is produced or confined, wherein said recipient comprises a wall (1) defining a lining (15) at the inside of the recipient and encompassing the volume, characterized in that it comprises at least one annular magnet (30), centered around a normal (14) with respect to the lining, having radial magnetization direction, such that the magnetization direction is significantly perpendicular to said normal to the lining. The invention also concerns a method for producing and/ or confining a plasma.
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公开(公告)号：EP2035597A2
公开(公告)日：2009-03-18
申请号：EP07765396.2
申请日：2007-06-13
发明人： PELLETIER, Jacques Henri , LACOSTE, Ana , BES, Alexandre , BECHU, Stéphane Jean Louis , SIROU, Jérôme
CPC分类号： H01J37/32862 , C23C16/4405 , H01J37/32871 , H01L21/67069
摘要： The invention concerns a device and a process, the device being a cleaning device utilizing a dry chemical means assisted by plasma from a reactor (10) containing an unwanted deposit on its walls and at least one other polarizable surface (12), characterized in that it comprises means (13, 14) for positively polarizing one or each of the polarizable surfaces relative to the reactor walls maintained at a reference potential.
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公开(公告)号：EP2353347A1
公开(公告)日：2011-08-10
申请号：EP09740707.6
申请日：2009-10-28
申请人： Centre National de la Recherche Scientifique (C.N.R.S) , Universite Joseph Fourier - Grenoble 1
CPC分类号： H05H1/46 , H01J37/32623 , H01J37/3266
摘要： The invention relates to a device for producing and/or confining a plasma (10), said device comprising a chamber (13) in the space of which the plasma is produced and/or confined, said chamber (13) including a wall (1) defining a housing (15) inside the chamber (15) and encompassing said space, wherein said device is characterised in that it comprises at least one assembly (30) for producing and/or confining plasma, each assembly (30) being composed of magnets (3) having only an axial magnetisation direction and being recessed in the wall (1) defining the housing, so that the magnetisation direction of all the magnets (3) defining each assembly (30) is substantially perpendicular to the housing (15) defined by the wall (1) and so that the assembly (30) is substantially symmetrical to the housing, wherein the magnetic field lines (5) do not extend through the wall (1) of the chamber. The invention also relates to a method for producing and/or confining a plasma.
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公开(公告)号：EP1518256B1
公开(公告)日：2018-12-19
申请号：EP03756046.3
申请日：2003-06-03
CPC分类号： H01J37/32211 , H01J37/32192 , H01J37/32678 , H05H1/46
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公开(公告)号：EP1488443B1
公开(公告)日：2006-08-16
申请号：EP03720650.5
申请日：2003-02-27
IPC分类号： H01J37/32
CPC分类号： H01J37/32623 , H01J37/32688
摘要： The invention relates to a device for confinement of a plasma (5) within a housing (1), comprising means for creating a magnetic field, said means being a series of permanent magnets (3) for creation of a magnetic field presenting an alternating multi-polar magnetic structure to the plasma. The invention is characterised in that the magnets (3) restrict the plasma to a large volume, the magnets begin distributed in a discontinuous manner around the volume and said magnets (3) are arranged within the housing at a separation from the walls of the housing by means of support shafts (4).
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公开(公告)号：EP1459345B1
公开(公告)日：2007-06-20
申请号：EP02799845.9
申请日：2002-12-23
发明人： PELLETIER, Jacques , LACOSTE, Ana , ARNAL, Yves
IPC分类号： H01J11/00
摘要： The invention concerns a plasma display device comprising in a screen a chamber (17) containing a discharge gas capable of being excited to generate, alone or in combination with luminophor means (18) themselves designed to be excited by a radiation emitted by said gas, a visible light. The device comprises means for generating on one side of said chamber (17) a uniformly distributed electric field (E) designed to ignite a plasma in the gas, as well as a matrix of controllable elements (19) and means controlling said elements (19) so that they modulate individually the electric field (E) or the radiation emitted by the plasma or the generated visible light thereby generating selectively luminous zones on the screen.
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公开(公告)号：EP1216493B1
公开(公告)日：2003-07-23
申请号：EP00962606.0
申请日：2000-09-12
发明人： PELLETIER, Jacques , LACOSTE, Ana , LAGARDE, Thierry, Léon , MOISAN, Michel , ARNAL, Yves, Alban-Marie , ZAKRZEWSKI, Zenon
IPC分类号： H01P5/16
CPC分类号： H01J37/32211 , H01J37/32192 , H01J37/32311 , H01P5/16
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公开(公告)号：EP1451846B1
公开(公告)日：2005-06-01
申请号：EP02796900.5
申请日：2002-12-06
IPC分类号： H01J37/077
CPC分类号： H01J37/077 , H01J3/025 , H01J2237/0041
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公开(公告)号：EP2353347B1
公开(公告)日：2016-07-27
申请号：EP09740707.6
申请日：2009-10-28
CPC分类号： H05H1/46 , H01J37/32623 , H01J37/3266
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