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    MASSENSPEKTROMETER, DESSEN VERWENDUNG, SOWIE VERFAHREN ZUR MASSENSPEKTROMETRISCHEN UNTERSUCHUNG EINES GASGEMISCHES
    1.
    发明公开
    MASSENSPEKTROMETER, DESSEN VERWENDUNG, SOWIE VERFAHREN ZUR MASSENSPEKTROMETRISCHEN UNTERSUCHUNG EINES GASGEMISCHES 审中-公开
    质谱仪其用途，和方法的混合气体质谱分析

    公开(公告)号：EP3020063A1

    公开(公告)日：2016-05-18

    申请号：EP14706019.8

    申请日：2014-02-20

    申请人： Carl Zeiss SMT GmbH ,  Carl Zeiss Microscopy GmbH

    发明人： FEDOSENKO, Gennady ,  ALIMAN, Michel ,  CHUNG, Hin Yiu Anthony ,  RANCK, Albrecht ,  GORKHOVER, Leonid

    IPC分类号： H01J49/14

    CPC分类号： H01J49/04 ,  H01J49/0027 ,  H01J49/105 ,  H01J49/14 ,  H01J49/145 ,  H01J49/147

    摘要： The invention relates to a mass spectrometer (1) for the mass spectrometric examination of gas mixtures (2), comprising: an ionizing apparatus (12), and an ion trap (10) for the storage and the mass spectrometric examination of the gas mixture (2). In one aspect of the invention, the ionizing apparatus (12) is designed to feed ions (13a) and/or metastable particles (13b) of an ionization gas (13) and/or electrons (20a) to the ion trap (10) for the ionization of the gas mixture (2) to be examined, and the mass spectrometer (1) is designed to determine, before the examination of the gas mixture (2), the number of ions (13a) and/or metastable particles (13b) of the ionization gas (13) that are present in the ion trap (10) and/or the number of ions (14a) of a residual gas (14), which residual gas is present in the ion trap (10). The invention further relates to the use of such a mass spectrometer (1) and to a method for the mass spectrometric examination of a gas mixture (2).

    摘要翻译： 本发明涉及质谱仪对于气体混合物的质谱检查，包括：一个电离装置和离子阱用于存储和气体混合物的质谱检查。 在本公开的一个方面中，电离装置被构造用于供给离子和/或离子化气体的亚稳定颗粒和/或用于提供电子到该离子阱用于电离气体混合物要被检查和质谱仪被实施为确定性的矿 离子和/或存在于离子阱和/或残余存在于之前检查气体混合物中的离子阱的气体的离子的数量的离子化气体的亚稳粒子的数量。 因此，本发明涉及使用寻求质谱仪和气体混合物的质谱检测的方法。

    METHOD FOR MASS SPECTROMETRIC EXAMINATION OF GAS MIXTURES AND MASS SPECTROMETER THEREFOR
    3.
    发明公开
    METHOD FOR MASS SPECTROMETRIC EXAMINATION OF GAS MIXTURES AND MASS SPECTROMETER THEREFOR 审中-公开
    气体混合和质谱仪方法质谱测试THEREOF

    公开(公告)号：EP2951851A2

    公开(公告)日：2015-12-09

    申请号：EP14701405.4

    申请日：2014-01-27

    申请人： Carl Zeiss SMT GmbH ,  Carl Zeiss Microscopy GmbH

    发明人： CHUNG, Hin Yiu Anthony ,  ALIMAN, Michel ,  FEDOSENKO, Gennady ,  RANCK, Albrecht

    IPC分类号： H01J49/00 ,  H01J49/10 ,  H01J49/14 ,  C23C16/44 ,  C23C16/52

    CPC分类号： H01J49/0031 ,  C23C16/4405 ,  C23C16/52 ,  H01J37/32862 ,  H01J49/009 ,  H01J49/105 ,  H01J49/107 ,  H01J49/145 ,  H01J49/424 ,  H01J2237/335

    摘要： The invention relates to a method for mass spectrometric examination of a gas mixture (2), comprising the following method steps: parallel or serial ionization of the gas mixture (2) to be examined by activating of at least two ionization devices (9a, 9b, 9c) operating using different ionization procedures, and/or ionizing of the gas mixture (2) in a detector (10), to which the gas mixture (2) and ions and/or metastable particles (29) of an ionization gas (30), which are produced by an ionization device (9), are fed, and detecting of the ionized gas mixture (2) in the detector (10) for the mass spectrometric examination thereof. The invention also relates to a mass spectrometer (21 ) for mass spectrometric examination of gas mixtures (2), comprising: an ionization unit (22) for ionizing the gas mixture (2), and a detector (10) for detecting the ionized gas mixture (2). The ionization unit (22) comprises at least two ionization devices (9a, 9b, 9c), arranged in parallel or in series, for ionizing the gas mixture (2) by means of different ionization procedures, wherein the ionization devices (9a, 9b, 9c) alternatively can be activated individually or together, and/or the ionization unit (22) has an ionization device (9) configured to feed ions and/or metastable particles (29) of an ionization gas (30) to the detector (10) in order to ionize the gas mixture (2) in the detector (10).

    摘要翻译： 一种方法，包括气体混合物的并行或串行电离通过激活使用不同的离子化过程操作至少两个电离装置，和/或通过在一个检测器，气体混合物和离子和/或亚稳的电离的粒子电离气体混合物 气体被供给。 因此，该方法包括在检测器用于其质谱检查检测电离气体混合物。 对于气体混合物的质谱检查一种质谱仪包括离子化单元，用于电离的气体混合物，和用于检测电离气体混合物的检测器。

    IONIZATION DEVICE AND MASS SPECTROMETER THEREWITH
    7.
    发明公开
    IONIZATION DEVICE AND MASS SPECTROMETER THEREWITH 审中-公开
    电离装置及其质谱仪

    公开(公告)号：EP3234978A1

    公开(公告)日：2017-10-25

    申请号：EP15804140.0

    申请日：2015-12-03

    申请人： Carl Zeiss SMT GmbH

    发明人： ALIMAN, Michel ,  CHUNG, Hin Yiu Anthony ,  FEDOSENKO, Gennady ,  REUTER, Rüdiger ,  LAUE, Alexander ,  KEUDELL, Achim von ,  BÖKE, Marc ,  BENTER, Thorsten ,  WINTER, Jörg ,  AWAKOWICZ, Peter ,  GORKHOVER, Leonid

    IPC分类号： H01J27/08 ,  H01J49/12 ,  H01J49/14

    CPC分类号： H01J49/145 ,  H01J27/08 ,  H01J37/08 ,  H01J49/12

    摘要： An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.

    摘要翻译： 本发明涉及一种电离装置（1），包括：用于在主等离子体区域（9）中产生电离气体（6）的亚稳颗粒（6a）和/或离子（6b）的等离子体产生装置（4） 用于在次级等离子体区域（10）中产生辉光放电（12）的场发生装置（13），用于将待电离的气体（3）供应到次级等离子体区域（10）中的入口（2） 用于将亚稳颗粒（6a）和/或电离气体（6）的离子（6b）供应到第二等离子体区域（10）中的进一步入口（5）。 本发明还涉及一种质谱仪（20），其包括设置在电离装置（1）的出口（16）下游的这种电离装置（1）和检测器（17），用于质谱分析 电离气体（3a，3a'）。