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    ELECTRONIC DEVICE SURFACE SIGNAL CONTROL PROBE AND METHOD OF MANUFACTURING THE PROBE
    1.
    发明公开
    ELECTRONIC DEVICE SURFACE SIGNAL CONTROL PROBE AND METHOD OF MANUFACTURING THE PROBE 有权
    电子设备的表面信号命令probe及其制备方法

    公开(公告)号：EP1054249A1

    公开(公告)日：2000-11-22

    申请号：EP99973122.7

    申请日：1999-11-12

    申请人： Daiken Chemical Co. Ltd.

    发明人： NAKAYAMA, Yoshikazu ,  AKITA, Seiji ,  HARADA, Akio, Daiken Chemical Co., Ltd

    IPC分类号： G01N13/12 ,  G01B21/30 ,  G12B21/04

    CPC分类号： G01Q60/16 ,  G01Q60/38 ,  G01Q60/54 ,  G01Q70/12 ,  Y10S977/869 ,  Y10S977/873 ,  Y10S977/876

    摘要： The present invention realizes a probe with a high resolution, high rigidity and high bending elasticity which can be used in a scanning probe microscope and makes it possible to pick up images of surface atoms with a high resolution. Also, a high-precision input-output probe which can be used in high-density magnetic information processing devices is also realized.
    In order to accomplish the object, the electronic device surface signal operating probe of the present invention is constructed from a nanotube 24, a holder 2a which holds this nanotube 24, and a fastening means which fastens the base end portion 24b of the nanotube 24 to the surface of the holder so that the tip end portion 24a of the nanotube 24 protrudes; and the tip end portion 24a of the nanotube 24 is used as a probe needle. Furthermore, as one example of the fastening means, a coating film 29 which covers the base end portion 24b of the nanotube 24 is formed. If a coating film 30 is also formed on an intermediate portion 24c on the root side of the tip end portion, the strength of the probe needle and the resolution are further increased. As another example of the fastening means, the base end portion 24b of the nanotube 24 is fusion-welded to the holder surface. All or part of the base end portion 24b forms a fusion-welded part so that the nanotube 24 is firmly fastened to the holder.
    A common nanotube such as a carbon nanotube (CNT), BCN type nanotube or BN type nanotube, etc., can be used as the above-described nanotube. Since nanotubes have a small tip end curvature radius, signals can be operated at a high resolution. Furthermore, since nanotubes have a high rigidity and bending elasticity, they are extremely resistant to damage and have a long useful life. Moreover, since the raw materials are inexpensive, high-performance probes can be inexpensively obtained. Furthermore, such probes can be used as probe needles in scanning tunnel microscopes or atomic force microscopes, or as input-output probes in place of magnetic heads in magnetic disk drives.

    摘要翻译： 本发明实现具有高分辨率，高刚性和高的弯曲弹性可以在扫描探针显微镜中使用并且能够拾取表面原子的图像具有高分辨率的样品。 如此，其可以以高密度磁信息处理装置中使用的高精度的输入输出测试因此实现。 为了实现上述目的，本发明的电子器件表面信号操作探针从纳米管24，其保持该纳米管24的保持器2a中，以及紧固装置，其紧固在纳米管24的基端部24b，以构建 保持器的表面，从而做了纳米管的前端部24a突出24; 和纳米管24的前端部24a被用作一个探针。 进一步，随着紧固装置，涂膜-29，其覆盖纳米管24的基端部24b的一个实施例形成。 如果涂层膜30被形成在对前端部的根部侧的中间部分24C，探针接触针和分辨率的强度进一步增加。 由于紧固装置的另一实施例中，纳米管24的基端部24b是熔焊到支架表面上。 所有或部分的基端部24b的形成熔焊部分所以没有纳米管24被牢固地固定到保持器。 公共搜索纳米管，其是碳纳米管（CNT），BCN类型的纳米管或BN型纳米管等，可以被用作上述的纳米管。 由于纳米管具有小的尖端曲率半径，信号能够以高分辨率进行操作。 进一步，由于碳纳米管具有高的刚性和弯曲弹性，它们损坏十分耐并且具有长使用寿命。 更上方，由于原料是廉价，高性能的探针可以廉价地获得。 进一步，求探针可以被用作在扫描隧道显微镜或原子力显微镜，探针或作为替代的磁头在磁盘驱动器的输入输出探针。

    NANOTWEEZERS AND NANOMANIPULATOR
    2.
    发明公开
    NANOTWEEZERS AND NANOMANIPULATOR 审中-公开
    Nanopinzette和Nanomanipulator

    公开(公告)号：EP1193216A1

    公开(公告)日：2002-04-03

    申请号：EP01912179.7

    申请日：2001-03-08

    申请人： Daiken Chemical Co. Ltd. ,  Nakayama, Yoshikazu

    发明人： NAKAYAMA, Yoshikazu ,  AKITA, Seiji ,  HARADA, Akio c/o Daiken Chemical Co., Ltd. ,  OKAWA, Takashi c/o Daiken Chemical Co., Ltd.

    IPC分类号： B82B1/00

    CPC分类号： B25J7/00 ,  B81B2201/032 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/002 ,  B82B3/00 ,  G01Q80/00 ,  Y10S977/732 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/778 ,  Y10S977/78 ,  Y10S977/837 ,  Y10S977/842 ,  Y10S977/858 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/876 ,  Y10S977/89 ,  Y10S977/901 ,  Y10S977/962

    摘要： To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes.
    Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc.

    摘要翻译： 为了提供纳米扫描器和纳米管操纵器，其允许部件的极小化，并且能够夹持各种类型的纳米物质，例如绝缘体，半导体和导体，并且夹持各种形状的纳米物质。 静电纳米针筒2的特征在于，纳米针筒2由多个纳米管组成，其基端部固定在支架6上，使得纳米管从保持件6突出，涂覆膜绝缘并覆盖纳米管的表面， 引线10,10连接到两个纳米管8,9; 并且通过在这些引线上施加电压而产生的静电吸引力自由地打开和闭合两个纳米管的末端。 此外，通过在纳米管9的表面形成压电膜32，通过使压电膜膨胀收缩自由地开闭封闭纳米管的顶端，能够使任意的纳米物质 无论纳米物质是绝缘体，半导体还是导体，都要被处理。 此外，如果通过设计三个纳米管以通过静电系统自由地打开和关闭，则可以使用诸如球形，棒状等各种形状的纳米物质。

    ELECTRONIC DEVICE SURFACE SIGNAL CONTROL PROBE AND METHOD OF MANUFACTURING THE PROBE
    3.
    发明公开
    ELECTRONIC DEVICE SURFACE SIGNAL CONTROL PROBE AND METHOD OF MANUFACTURING THE PROBE 有权
    电子设备的表面信号命令probe及其制备方法

    公开(公告)号：EP1054249A8

    公开(公告)日：2002-01-30

    申请号：EP99973122.7

    申请日：1999-11-12

    申请人： Daiken Chemical Co. Ltd. ,  Nakayama, Yoshikazu

    发明人： NAKAYAMA, Yoshikazu ,  AKITA, Seiji ,  HARADA, Akio, Daiken Chemical Co., Ltd

    IPC分类号： G01N13/12 ,  G01B21/30 ,  G12B21/04

    CPC分类号： G01Q60/16 ,  G01Q60/38 ,  G01Q60/54 ,  G01Q70/12 ,  Y10S977/869 ,  Y10S977/873 ,  Y10S977/876

    摘要： The present invention realizes a probe with a high resolution, high rigidity and high bending elasticity which can be used in a scanning probe microscope and makes it possible to pick up images of surface atoms with a high resolution. Also, a high-precision input-output probe which can be used in high-density magnetic information processing devices is also realized. In order to accomplish the object, the electronic device surface signal operating probe of the present invention is constructed from a nanotube 24, a holder 2a which holds this nanotube 24, and a fastening means which fastens the base end portion 24b of the nanotube 24 to the surface of the holder so that the tip end portion 24a of the nanotube 24 protrudes; and the tip end portion 24a of the nanotube 24 is used as a probe needle. Furthermore, as one example of the fastening means, a coating film 29 which covers the base end portion 24b of the nanotube 24 is formed. If a coating film 30 is also formed on an intermediate portion 24c on the root side of the tip end portion, the strength of the probe needle and the resolution are further increased. As another example of the fastening means, the base end portion 24b of the nanotube 24 is fusion-welded to the holder surface. All or part of the base end portion 24b forms a fusion-welded part so that the nanotube 24 is firmly fastened to the holder. A common nanotube such as a carbon nanotube (CNT), BCN type nanotube or BN type nanotube, etc., can be used as the above-described nanotube. Since nanotubes have a small tip end curvature radius, signals can be operated at a high resolution. Furthermore, since nanotubes have a high rigidity and bending elasticity, they are extremely resistant to damage and have a long useful life. Moreover, since the raw materials are inexpensive, high-performance probes can be inexpensively obtained. Furthermore, such probes can be used as probe needles in scanning tunnel microscopes or atomic force microscopes, or as input-output probes in place of magnetic heads in magnetic disk drives.

    PROBE FOR SCANNING MICROSCOPE PRODUCED BY FOCUSED ION BEAM MACHINING
    6.
    发明公开
    PROBE FOR SCANNING MICROSCOPE PRODUCED BY FOCUSED ION BEAM MACHINING 审中-公开
    SONDEFÜREIN ABTASTMIKROSKOP，HERGESTELLT DURCH BEARBEITUNG MIT FOKUSSIERTEM IONENSTRAHL

    公开(公告)号：EP1278056A1

    公开(公告)日：2003-01-22

    申请号：EP01970309.9

    申请日：2001-09-28

    申请人： Daiken Chemical Co., Ltd ,  Seiko Instruments Inc. ,  Nakayama, Yoshikazu

    发明人： NAKAYAMA, Yoshikazu ,  AKITA, Seiji ,  HARADA, Akio, c/o Daiken Chemical Co., Ltd. ,  OKAWA, Takashi, c/o DAIKEN Chemical Co., Ltd. ,  TAKANO, Yuichi, c/o DAIKEN Chemical Co., Ltd. ,  YASUTAKE, Masatoshi, c/o SEIKO Instruments Inc. ,  SHIRAKAWABE, Yoshiharu, c/o SEIKO Instruments Inc.

    IPC分类号： G01N13/16 ,  G12B21/08

    CPC分类号： G01Q60/38 ,  G01Q70/12

    摘要： The present invention realizes a probe for a scanning type microscope by which the quality of a nanotube probe needle can be improved by means of fastening and cutting the nanotube probe needle, furthermore by means of implanting ions of another element. For the object, a probe for a scanning type microscope produced by a focusing ion beam related to the present invention is characterized in that, in a probe for a scanning type microscope which captures substance information of the surface of a specimen by the tip end 14a of a nanotube probe needle 12 fastened to a cantilever 4, an organic gas G is decomposed by a focused ion beam I in a focused ion beam apparatus 2, and the nanotube 12 is bonded to the cantilever 4 with a deposit of the decomposed component thus produced. Furthermore, the present invention provides a probe for a scanning type microscope by which the quality of the nanotube probe needle can be improved by means of removing an unnecessary deposit 24 adhering to the nanotube tip end portion 14 using a ion beam I, by means of cutting an unnecessary part of the nanotube in order to control length of the probe needle and by means of injecting ions into the tip end portion 14 of the nanotube.

    摘要翻译： 本发明实现了扫描型显微镜的探针，借助于通过固定和切割纳米管探针，还可以通过注入另一元件的离子来提高纳米管探针的质量。 为了该目的，本发明涉及的由聚焦离子束产生的扫描型显微镜的探针的特征在于，在用于通过前端14a拍摄试样表面的物质信息的扫描式显微镜用探针 在紧固到悬臂4的纳米管探针12上，有机气体G在聚焦离子束装置2中被聚焦离子束I分解，并且纳米管12以分解成分的沉积物结合到悬臂4上 产生的。 此外，本发明提供了一种扫描型显微镜的探针，通过该扫描型显微镜，可以通过使用离子束I去除附着在纳米管末端部14上的不必要的沉积物24，从而可以提高纳米管探针的质量，借助于 切割不需要的纳米管部分，以便控制探针的长度，并通过将离子注入到纳米管的末端部分14中。

    CANTILEVER FOR VERTICAL SCANNING MICROSCOPE AND PROBE FOR VERTICAL SCAN MICROSCOPE USING IT
    7.
    发明公开
    CANTILEVER FOR VERTICAL SCANNING MICROSCOPE AND PROBE FOR VERTICAL SCAN MICROSCOPE USING IT 审中-公开
    KRAGTRÄGERFÜRVERTIKAL-ABTASTMIKROSKOP UND SONDEFÜRVERTIKAL-ABTASTMIKROSKOP DAMIT

    公开(公告)号：EP1278055A1

    公开(公告)日：2003-01-22

    申请号：EP01970308.1

    申请日：2001-09-28

    申请人： Daiken Chemical Co., Ltd ,  Seiko Instruments Inc. ,  Nakayama, Yoshikazu

    发明人： NAKAYAMA, Yoshikazu ,  AKITA, Seiji ,  HARADA, Akio, c/o Daiken Chemical Co., Ltd. ,  OKAWA, Takashi, c/o DAIKEN Chemical Co., Ltd. ,  TAKANO, Yuichi, c/o DAIKEN Chemical Co., Ltd. ,  YASUTAKE, Masatoshi, c/o SEIKO Instruments Inc. ,  SHIRAKAWABE, Yoshiharu, c/o SEIKO Instruments Inc.

    IPC分类号： G01N13/16 ,  G12B21/08

    CPC分类号： G01Q70/10 ,  G01Q70/12

    摘要： The present invention realizes a probe for a vertical scanning type microscope in which a tip end of a nanotube serving as a probe is caused to abut substantially perpendicularly against the surface of a specimen and can detect surface information of a specimen at a high sensitivity. In order to accomplish the object, in a probe 20 for a scanning type microscope which captures substance information of the surface of a specimen 24 by the tip end of a nanotube probe needle fastened to a cantilever 2, a probe for a vertical scanning type microscope related to the present invention is characterized in that a fixing region, to which the base end portion 14 of a nanotube 12 is fastened, is provided in a cantilever 2 and when the cantilever 2 is set in a measuring state with respect to a mean surface 26 of a specimen, height direction of the above described fixing region is set up substantially perpendicular to the mean surface 26 of the specimen and the base end portion 14 of the nanotube 12 is bonded in the height direction of the fixing region.

    摘要翻译： 本发明实现了一种用于垂直扫描型显微镜的探针，其中用作探针的纳米管的末端大致垂直地抵靠试样的表面，并且可以以高灵敏度检测样品的表面信息。 为了实现该目的，在扫描型显微镜的探针20中，通过紧固在悬臂2上的纳米管探针的前端捕获试样24的表面的物质信息，用于垂直扫描式显微镜的探针 本发明的特征在于，在悬臂2中设置固定有纳米管12的基端部14的固定区域，当悬臂2相对于平均面设置为测量状态时 26的上述固定区域的高度方向与试样的平均面26大致垂直地设置，并且在固定区域的高度方向上接合有纳米管12的基端部14。