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公开(公告)号：EP3299788A2
公开(公告)日：2018-03-28
申请号：EP17187742.6
申请日：2017-08-24
发明人： HÜGEL, Michael , UEHLIN, Thomas , LEMKE, Benjamin
CPC分类号： G01L19/0046 , G01L13/025 , G01L19/003 , G01L19/0681 , G01L19/142
摘要： Es ist ein Flansch-Satz für einen Differenzdruck-Messaufnehmer mit zwei auf einander gegenüberliegende, jeweils eine mit einem Druck zu beaufschlagende Membran (7) umfassende Außenseiten eines Messwerks (3) des Differenzdruck-Messaufnehmers montierbaren Seitenflanschen (1, 49, 57), sowie ein damit ausgestatteter Differenzdruck-Messaufnehmer beschrieben. Die Seitenflansche (1, 49, 57) umfassen jeweils eine Seitenwand (17), die im montierten Zustand eine der beiden Membranen (7) des Messwerks (3) überdeckt und unter sich eine an die jeweilige Membran (7) angrenzende Druckkammer (19) einschließt, und einen auf einer ersten Stirnseiten der Seitenwand (17) angeordneten ersten Prozessanschluss (27), der einen Druckkanal-Anschlussbereich (31) umfasst, in dem ein durch den Seitenflansch (1, 49, 57) hindurch zur Druckkammer (19) führender Druckkanal (33) mündet. Erfindungsgemäß sind die ersten Prozessanschlüsse (27) derart ausgebildet, dass ein mit dem Flansch-Satz ausgestatteten Differenzdruck-Messaufnehmer über diese ohne Zwischenfügung eines Adapters auf einen Prozessanschluss (37) montierbar und anschließbar ist, der eine für den Anschluss und die Montage von Differenzdruck-Messaufnehmern mit Messwerken mit in einer Ebene nebeneinander angeordneten Membranen ausgelegte erste Prozessanschlussgeometrie aufweist.
摘要翻译： 有一个凸缘设置压差传感器具有两个对置，各一个与作用在隔膜的压力（7），其包括测量机构的外侧（3）的压力差换能器安装侧面凸缘（1，49，57），和 描述了装有它的差压传感器。 侧面凸缘（1，49，57）的每一个包括侧壁（17），其覆盖在组装状态下的两个膜（7），测量元件（3）和一对相应的隔膜（7）邻接压力腔室中的一个（19） 包括，和一个在侧壁的第一端部（17）布置的第一过程连接（27）包括连接区域（31），其中，通过所述侧面凸缘（1，49，57）穿过其中通向压力室中的压力通道（19） 压力通道（33）打开。 根据本发明的第一过程的连接（27）被形成为使得一个设置有凸缘设置差压传感器此无适配器到处理连接的插入（37）安装和连接时，一个用于差速器的连接和安装 测量变送器具有并排排列的膜片，设计了第一个过程连接几何形状。
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公开(公告)号：EP3077783A1
公开(公告)日：2016-10-12
申请号：EP14796464.7
申请日：2014-11-03
发明人： JOCHEM, Bernhard , KOBER, Timo , LEMKE, Benjamin , RIEMER, Darina , TEIPEN, Rafael , THAM, Anh Tuan , WERTHSCHÜTZKY, Roland
CPC分类号： G01L19/0618 , G01L13/025
摘要： A differential pressure sensor (101) comprises a measuring diaphragm (110) made of an electrically conductive material; two electrically insulating mating bodies (120, 130); and at least one capacitive transducer, wherein the measuring diaphragm (110) is connected to the mating bodies (120, 130) in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge, wherein the mating bodies each have a diaphragm bed which is concave in the centre, wherein the mating bodies each have a pressure channel (125, 135) which extends through the mating body into the measuring chamber, wherein the capacitive transducer has at least one mating body electrode which is formed by a metal coating of the surface of the mating body in the region of the diaphragm bed (124, 134) and with which contact can be made by a metal coating of the wall of the pressure channel, wherein the mating body electrode is formed by an inner region (127, 137) of the metal coating, which inner region is annularly enclosed by an outer region (126, 136) of the coating and is separated from the latter by an annular insulation region (129, 139).
摘要翻译： 差压传感器包括由导电材料制成的测量膜，两个电绝缘配合体和至少一个电容换能器。 测量膜片以压紧方式连接到配合体上，每个壳体沿周向边缘形成测量室。 配合体各自具有在中心凹入的隔膜床，其中配合体各自具有通过配合体延伸到测量室中的压力通道。 电容式换能器具有至少一个配合体电极，其由隔膜床的区域中的配合体的表面的金属涂层形成，并且可以通过压力通道的壁的金属涂层形成接触。 配对体电极由金属涂层的内部区域形成，该内部区域被涂层的外部区域环形地包围，并且通过环形绝缘区域与内部区域隔开。
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公开(公告)号：EP3126805A1
公开(公告)日：2017-02-08
申请号：EP15712339.9
申请日：2015-03-24
发明人： THAM, Anh Tuan , KLÖFER, Peter , TEIPEN, Rafael , LEMKE, Benjamin
摘要： The invention relates to a differential pressure sensor (1) comprising a differential pressure measuring cell (2) with a measuring membrane (10), two counter elements (20, 30), between which the measuring membrane is arranged, and a converter (40) and comprising an elastic clamping device (50) that has two clamping surfaces (53), each of which acts on a counter element (20, 30) rear face (26, 36) facing away from the measuring membrane (10). The clamping device (50) has at least one elastic element (56, 58) via which the clamping surfaces (52, 54) are mechanically coupled in order to clamp the differential pressure measuring cell (2) by means of an axial clamping force. The clamping surfaces (52, 54) are dimensionally stable, and the clamping device (50) has a bracket with two clamping elements (60, 62), each of which has one of the clamping surfaces (52, 54). At least one of the clamping elements has an elastic element, and the clamping elements are connected to each other under tension in order to exert a clamping force onto the differential pressure measuring cell (2). The two clamping elements (60, 62) have a central dimensionally stable section (64, 66) which comprises the clamping surfaces (52, 54). Elastic sections adjoin the dimensionally stable section (64, 66) of at least one clamping element, in particular of both clamping elements, said elastic sections forming the elastic elements (56, 58).
摘要翻译： 本发明涉及一种压差传感器（1），该压差传感器包括具有测量膜（10）的压差测量单元（2），布置有测量膜的两个计数器元件（20,30），以及转换器 ）并且包括具有两个夹紧表面（53）的弹性夹紧装置（50），每个夹紧表面作用在背对测量膜（10）的反面元件（20,30）背面（26,36）上。 夹紧装置（50）具有至少一个弹性元件（56,58），夹紧表面（52,54）通过该至少一个弹性元件机械地连接，以借助于轴向夹紧力来夹紧差压测量单元（2）。 夹紧表面（52,54）尺寸稳定，并且夹紧装置（50）具有带两个夹紧元件（60,62）的支架，每个夹紧元件具有夹紧表面（52,54）中的一个。 至少一个夹紧元件具有弹性元件，并且夹紧元件在张紧状态下彼此连接以将夹紧力施加到差压测量单元（2）上。 两个夹紧元件（60,62）具有包括夹紧表面（52,54）的中央尺寸稳定部分（64,66）。 弹性部分与至少一个夹紧元件，特别是两个夹紧元件的尺寸稳定部分（64,66）邻接，所述弹性部分形成弹性元件（56,58）。
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公开(公告)号：EP3268304A1
公开(公告)日：2018-01-17
申请号：EP16710114.6
申请日：2016-03-04
发明人： TEIPEN, Rafael , LEMKE, Benjamin
CPC分类号： B81B3/0072 , B81B2201/0264 , B81B2203/0127 , B81B2203/0315 , B81B2203/04 , B81C1/00531 , B81C2201/0132 , G01L9/0048 , G01L9/0073 , G01L13/025 , G01L19/0618
摘要： The invention relates to a MEMS sensor for metrologically sensing a measurement variable having improved resistance to overloading, which MEMS sensor comprises a plurality of layers (1, 3, 5), in particular silicon layers, arranged one on the other, the layers (1, 3, 5) of which MEMS sensor comprise at least one inner layer (5), which is arranged between a first layer (1) and a second layer (3), and in the inner layer (5) of which MEMS sensor at least one cut-out (7) extending through the inner layer (5) perpendicularly to the plane of the inner layer (5) is provided, which cut-out is adjoined on the outside at least in some segments by a region of the inner layer (5) forming a connecting element (9), which region is connected to the first layer (1) and the second layer (3), the MEMS sensor being distinguished in that a lateral surface (11) of the connecting element (9) bounding the cut-out (7) on the outside at least in some segments has, in an end region facing the first layer (1), a rounded shape that reduces the cross-sectional area of the cut-out (7) in the direction of the first layer (1) and, in an end region facing the second layer (3), a rounded shape that reduces the cross-sectional area of the cut-out (7) in the direction of the second layer (3).
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5.发明公开BAUTEILANORDNUNG MIT MINDESTENS ZWEI BAUTEILEN UND VERFAHREN ZUM HERSTELLEN EINER BAUTEILANORDNUNG 审中-公开至少有两个组件组件装置及其制造方法部件布置
公开(公告)号：EP3110590A1
公开(公告)日：2017-01-04
申请号：EP15701499.4
申请日：2015-01-16
发明人： THAM, Anh Tuan , LEMKE, Benjamin , BRÄUER, Jörg , BESSER, Jan , WIEMER, Maik , GESSNER, Thomas
IPC分类号： B23K20/16
CPC分类号： G01L9/0044 , B23K20/165 , B23K2201/40 , B81B3/0021 , B81B2201/0264 , B81B2203/0127 , B81C1/00269 , B81C2203/037
摘要： The invention relates to a component arrangement (1) comprising a first component (10) which has a first joining surface (11) and a second component (20) which has a second joining surface (21). The first joining surface (11) is connected to the second joining surface (21) using an integrated reactive material system (30). The integrated reactive material system comprises at least one coating of at least one of the joining surfaces (11), and the integrated material system comprises an activation region (33) on one surface. The activation region (33) is arranged outside of first or second joining surface regions which are joined together and adjoins the regions which are joined together.
摘要翻译： A组分装置，其包括具有第一紧固面和具有第二接合表面的第二部件的第一部件。 第一接合表面连接到使用集成反应材料系统的所述第二接合表面，整合式反应材料系统包括接合表面中的至少一个的至少一个涂层，并且所述集成反应性材料系统的激活区的一个表面上包括 ， 集成的激活区域被布置在第一或第二接合面的接合在一起的区域外面并且邻接接合在一起的区域。
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6.发明公开HYDRAULISCHES MESSWERK MIT KOPLANAREN DRUCKEINGÄNGEN UND DIFFERENZDRUCKSENSOR MIT EINEM SOLCHEN MESSWERK 有权共面压力输入和差压传感器，这样一个烂摊子厂液压测厂
公开(公告)号：EP2936100A1
公开(公告)日：2015-10-28
申请号：EP13814473.8
申请日：2013-12-06
CPC分类号： G01L13/06 , G01L9/0072 , G01L13/025 , G01L19/0023
摘要： The invention relates to a hydraulic measuring unit for recording differential pressures, comprising a measuring unit body (10) with a process connection surface (16) and two pressure input openings, in each of which a pressure tube (20, 22) is arranged, which protrudes at the rear side from the measuring unit body (10) and supports a differential pressure measuring cell (40), wherein the pressure tubes (20, 22) are connected pressure-tightly to the measuring unit body (10) from the side of the process connection surface (16).
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公开(公告)号：EP3158305A1
公开(公告)日：2017-04-26
申请号：EP15726989.5
申请日：2015-06-08
发明人： TEIPEN, Rafael , LEMKE, Benjamin
摘要： A differential pressure sensor which is of simple design and can be produced cost-effectively is described, comprising a first and a second counterelectrode (1, 3), a conductive plate (5) arranged between the two counterelectrodes (1, 3), a first insulating layer (7), via which an outer edge of the plate (5) is connected to an outer edge of the first counterelectrode (1) to form a first pressure chamber (9), a second insulating layer (11), via which an outer edge of the plate (5) is connected to an outer edge of the second counterelectrode (3) to form a second pressure chamber (9), a cutout (13) which is provided in the first counterelectrode (1) and via which a first pressure (p
1 ) can be applied to the first pressure chamber (9), and a cutout (13) which is provided in the second counterelectrode (3) and via which a second pressure (p
2 ) can be applied to the second pressure chamber (9), which sensor is distinguished by the fact that the plate (5) is subdivided by a trench (17) into an inner region (19) serving as electrode and an outer region (21) electrically insulated therefrom by the trench (17), the inner region (19) comprises a measuring membrane (15) arranged between the two pressure chambers (9) and an edge region (23) enclosing the measuring membrane (15) and clamped in between the inner edges (25) of the insulating layers (7, 11), and the inner region (19) forms with each of the counterelectrodes (1, 3) in each case a capacitor having a capacitance (C1, C3) dependent on a differential pressure (Δρ) acting on the measuring membrane (15).摘要翻译： 描述了一种简单设计并且可以低成本生产的压差传感器，其包括第一和第二反电极（1,3），设置在两个反电极（1,3）之间的导电板（5）， 第一绝缘层（7），板（5）的外边缘通过该第一绝缘层连接到第一反电极（1）的外边缘以形成第一压力室（9），第二绝缘层（11） （5）的外边缘连接到第二对向电极（3）的外边缘以形成第二压力室（9），设置在第一对置电极（1）中的切口（13）和通孔 ，其中第一压力（p1）可以施加到第一压力室（9）;以及切口（13），其设置在第二对置电极（3）中并且第二压力（p2）可以通过切口（13）施加到第二 （9），该传感器的特征在于板（5）被沟槽（17）细分为 作为电极的内部区域（19）和由沟槽（17）与之电绝缘的外部区域（21），内部区域（19）包括布置在两个压力室（9）之间的测量膜（15） 包括测量膜（15）并夹在绝缘层（7,11）的内边缘（25）之间的区域（23），并且内区域（19）与每个反电极（1,3）一起形成在 每种情况下电容器具有取决于作用在测量膜（15）上的压差（Δρ）的电容（C1，C3）。
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8.发明公开MECHANISCHE STABILISIERUNG UND ELEKTRISCHE SOWIE HYDRAULISCHE ADAPTIERUNG EINES SILIZIUM CHIPS DURCH KERAMIKEN 审中-公开机械稳定性和电气和液压BY陶瓷硅芯片的适应化修改
公开(公告)号：EP2936103A2
公开(公告)日：2015-10-28
申请号：EP13802350.2
申请日：2013-12-06
发明人： LEMKE, Benjamin , TEIPEN, Rafael , THAM, Anh Tuan
CPC分类号： G01L13/025 , G01L19/0618
摘要： The invention relates to a differential pressure sensor comprising a differential pressure measuring cell (10) having a measuring cell body with measuring chambers (13, 15) in the interior thereof to which pressure can be applied, a first installation surface (17) and a second installation surface (19), wherein the installation surfaces (17, 19) have a variable distance from one another under the application of pressure to the measuring chambers (13, 15). The differential pressure sensor further comprises a first stiffening body (20) with a first planar stiffening surface and a second stiffening body (20) with a second planar stiffening surface. Bending of the installation surfaces due to the application of pressure to the measuring chambers is reduced by the stiffening bodies, and more particularly, at least 50% of an effective rigidity K= 1/(dx/dp) of the stiffening bodies, which are connected by the differential pressure measuring cell, is provided only due to this connection of the stiffening bodies to the measuring cell body without additional connections between the stiffening bodies in a shunt, where x is the distance between the first installation surface and the second insulation surface which has the greatest pressure dependency dx/dp.
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公开(公告)号：EP2904363A2
公开(公告)日：2015-08-12
申请号：EP13766300.1
申请日：2013-09-24
IPC分类号： G01L9/00
CPC分类号： G01L9/065 , G01L9/0042 , G01L9/0052 , G01L9/085
摘要： The invention relates to a pressure sensor (1) comprising a substrate (2) having a formed measuring membrane (3) and an electrically conductive cover layer (4) which comprises electrical contact elements (5, 6, 7, 8) and which is electrically insulated in relation to the substrate (2) by means of an insulating layer (9). The cover layer (4) is structured such that in two regions (10, 11), that are electrically insulated from one another, two independent measurements of the respective resistance between two contact elements (5, 6, 7, 8) are possible. The regions (10, 11) of the cover layer (4) serve for shielding the sensor elements (12, 13) of the measuring membrane (3) from electromagnetic influences from the outside, for detecting damage to the measuring membrane (3) as well as for the exact temperature determination.
摘要翻译： 一种压力传感器，包括：具有形成在其中的测量膜的基板; 以及导电覆盖层，其具有电接触元件并且通过绝缘层与基板电隔离。 覆盖层被分割成使得两个接触元件之间的相应电阻的两个独立测量在彼此电隔离的两个区域中是可能的。 覆盖层的区域用于屏蔽来自测量膜的传感器元件的外部电磁影响，以便检测对测量膜的损伤以及用于确定精确温度。
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