公开(公告)号：EP2544026A1

公开(公告)日：2013-01-09

申请号：EP12173975.9

申请日：2012-06-28

申请人： FEI COMPANY

发明人： Kooijman, Cees ,  Van Veen, Gerard

IPC分类号： G01T1/24 ,  H01J37/244 ,  H01L31/115

CPC分类号： G01T1/24 ,  G01T1/2928 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01L31/115

摘要： The invention relates to a detector with a Silicon Drift Diode (SDD) ( 10 , 200) for use in a charged particle apparatus. Such detectors are well-known for the detection of X-rays, but are not capable to detect secondary or backscattered electrons for two reasons:
1. the volume (20) in the SDD where electron/hole pairs must be generated is too far removed from the surface ( 18 ). This can be solved by known techniques resulting in a shallow layer, for example using thin boron layers.
2. Secondary and/or backscattered electrons are generated with a much higher efficiency than X-rays, as a result of which the current of backscattered electrons is typically too high to be detected due to the limited count rate of a SDD (typically up to 1 Mc/s, equivalent to a maximum electron current of up to 0.16 pA).
The invention describes a detector with a SDD ( 200 ) and an amplifier (206), and a feed-back element in the form of, for example, a resistor (208) or a diode, switchably connected to the output of the amplifier. When the feedback element is selected via a switch (209), the detector operates in a Current Measurement Mode for determining electron current, and when the element is not selected the detector operates in its well-known Pulse Height Measurement Mode for determining the energy of X-ray quanta.

摘要翻译： 本发明涉及一种用于带电粒子装置的具有硅漂移二极管（SDD）（10,200）的检测器。 这种探测器众所周知用于检测X射线，但由于以下两个原因而不能检测二次或背散射电子：1. SDD中必须产生电子/空穴对的体积（20）太远 从表面（18）开始。 这可以通过导致浅层的已知技术来解决，例如使用薄硼层。 2.以比X射线高得多的效率产生次级和/或背散射电子，结果背散射电子的电流通常太高而不能被检测，这是由于SDD的有限计数率（通常高达 1 Mc / s，相当于最大电子电流高达0.16 pA）。 本发明描述了具有SDD（200）和放大器（206）的检测器以及可切换地连接到放大器的输出端的形式为例如电阻器（208）或二极管的反馈元件。 当通过开关（209）选择反馈元件时，检测器以电流测量模式操作以确定电子电流，并且当元件未被选择时，检测器以其众所周知的脉冲高度测量模式操作以确定 X射线量子。

公开(公告)号：EP4123682A3

公开(公告)日：2023-05-17

申请号：EP22180090.7

申请日：2022-06-21

申请人： FEI Company

发明人： Janssen, Bart ,  Van Veen, Gerard ,  Kieft, Erik

IPC分类号： H01J37/244

摘要： Electron beam modulation in response to optical pump pulses applied to a sample is measured using SPAD elements. Individual detection events are used to form histograms of numbers of events in time bins associated with pump pulse timing. The histograms can be produced at a SPAD array, simplifying data transfer. In some examples, two SPAD arrays are stacked and a coincidence circuit discriminates signal events from noise events by determining corresponding events are detected withing a predetermined time window.

公开(公告)号：EP2322271A1

公开(公告)日：2011-05-18

申请号：EP10188635.6

申请日：2010-10-25

申请人： FEI COMPANY ,  Stichting Het Nederlands Kanker Instituut

发明人： Van Veen, Gerard ,  Dona, Pleun ,  De Jong, Frank ,  Peters, Jacobus

IPC分类号： B01J19/00 ,  B01L3/00 ,  H01J37/20

CPC分类号： B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00824 ,  B01J2219/00831 ,  B01J2219/00833 ,  B01J2219/0086 ,  B01J2219/00905 ,  B01J2219/0097 ,  B01L3/502761 ,  B01L7/54 ,  B01L2200/0668 ,  B01L2300/0822 ,  B01L2400/0415 ,  B01L2400/0439 ,  B01L2400/0442 ,  B01L2400/0487 ,  G01N2021/058 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2004 ,  Y10T436/143333

摘要： The invention relates to a micro-reactor (100) for observing small particles, cells, bacteria, viruses or protein molecules in a fluid. The micro-reactor shows a first channel (106) formed between two layers (102, 104) for containing the fluid, with an inlet (112) and an outlet (114), the two layers separated by a first distance. A likewise second channel (108) with an inlet (118) and an outlet (116) is placed adjacent to the first channel. A gap connects the first channel and the second channel, at the gap at least one layer showing a window (120) transparent to the method of inspection and at the window the two layers being separated by a very small distance of, for example, 1 µm or less.
The micro-reactor may be used with an optical microscope (in which all particles are in focus), inspection with a Scanning Transmission Electron Microscope (in which the range of the electrons is limited), inspection with soft X-rays in the 250-500 eV range (also showing a limited range), etc.
A method of using the micro-reactor includes applying a gradient over the gap, thereby causing the particles to cross the gap. The gradient may be static or dynamic, and may be a gradient in concentration, of a chemical or biological material, in pressure, in temperature, in electric potential, or in magnetic field. By detecting a property of the particles upstream in the first channel, e.g. using fluorescent labels on the particles, and then applying a pressure burst over the channels when the property meets certain preset criteria, only selected particles can be placed in the gap.

摘要翻译： 本发明涉及用于观察流体中的小颗粒，细胞，细菌，病毒或蛋白质分子的微反应器（100）。 微反应器示出在两个层（102,104）之间形成的用于容纳流体的第一通道（106），其具有入口（112）和出口（114），这两层分开第一距离。 同样具有入口（118）和出口（116）的第二通道（108）与第一通道相邻放置。 间隙连接第一通道和第二通道，在间隙中至少一层显示对检查方法透明的窗口（120），并且在窗口处两层间隔非常小的距离，例如1 μm或更小。 微反应器可以与光学显微镜一起使用（其中所有颗粒都聚焦），使用扫描透射电子显微镜（其中电子范围受限）检查，使用软X射线在250- 500eV范围（也显示有限的范围）等。使用微反应器的方法包括在间隙上施加梯度，由此导致颗粒穿过间隙。 梯度可以是静态的或动态的，并且可以是浓度，化学或生物材料，压力，温度，电势或磁场中的梯度。 通过检测第一通道中上游颗粒的特性，例如， 在颗粒上使用荧光标记，然后当性质符合某些预设标准时在通道上施加压力脉冲，只有选定的颗粒可以放置在间隙中。

公开(公告)号：EP2316565A1

公开(公告)日：2011-05-04

申请号：EP09174002.7

申请日：2009-10-26

申请人： FEI COMPANY

发明人： Dona, Pleun ,  Van Veen, Gerard ,  Peters, Jacobus ,  De Jong, Alan

IPC分类号： B01J19/00 ,  B01L3/00 ,  H01J37/20

CPC分类号： B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00824 ,  B01J2219/00831 ,  B01J2219/00833 ,  B01J2219/0086 ,  B01J2219/00905 ,  B01J2219/0097 ,  B01L3/502761 ,  B01L7/54 ,  B01L2200/0668 ,  B01L2300/0822 ,  B01L2400/0415 ,  B01L2400/0439 ,  B01L2400/0442 ,  B01L2400/0487 ,  G01N2021/058 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2004 ,  Y10T436/143333

摘要： The invention relates to a micro-reactor (100) for observing small particles, cells, bacteria, viruses or protein molecules in a fluid. The micro-reactor shows a first channel (106) formed between two layers (102, 104) for containing the fluid, with an inlet (112) and an outlet (114), the two layers separated by a first distance. A likewise second channel (108) with an inlet (118) and an outlet (116) is placed adjacent to the first channel. A gap connects the first channel and the second channel, at the gap at least one layer showing a window (120) transparent to the method of inspection and at the window the two layers being separated by a very small distance of, for example, 1 µm or less.
The micro-reactor may be used with an optical microscope (in which all particles are in focus), inspection with a Scanning Transmission Electron Microscope (in which the range of the electrons is limited), inspection with soft X-rays in the 250-500 eV range (also showing a limited range), etc.
A method of using the micro-reactor includes applying a gradient over the gap, thereby causing the particles to cross the gap. The gradient may be static or dynamic, and may be a gradient in concentration, of a chemical or biological material, in pressure, in temperature, in electric potential, or in magnetic field. By detecting a property of the particles upstream in the first channel, e.g. using fluorescent labels on the particles, and then applying a pressure burst over the channels when the property meets certain preset criteria, only selected particles can be placed in the gap.

摘要翻译： 本发明涉及用于在流体中观察小颗粒，细胞，细菌，病毒或蛋白质分子的微反应器（100）。 微反应器示出了形成在用于容纳流体的两个层（102,104）之间的第一通道（106），其具有入口（112）和出口（114），两个层分开第一距离。 具有入口（118）和出口（116）的同样的第二通道（108）被放置成与第一通道相邻。 间隙连接第一通道和第二通道，在间隙处，至少一层显示对于检查方法是透明的窗口（120），并且在窗口处，两层被隔开非常小的距离，例如1 μm以下。 微反应器可以与光学显微镜一起使用（其中所有颗粒都在焦点中），用扫描透射电子显微镜（其中电子的范围被限制）进行检查，在250- 500eV范围（也显示有限范围）等。使用微反应器的方法包括在间隙上施加梯度，从而使颗粒穿过间隙。 梯度可以是静态或动态的，并且可以是化学或生物材料在压力，温度，电位或磁场中的浓度梯度。 通过检测第一通道上游的颗粒的性质，例如， 在颗粒上使用荧光标记，然后当性能达到某些预设标准时，在通道上施加压力突发，只有选定的颗粒才能放置在间隙中。

公开(公告)号：EP2544026B1

公开(公告)日：2013-12-11

申请号：EP12173975.9

申请日：2012-06-28

申请人： FEI COMPANY

发明人： Kooijman, Cees ,  Van Veen, Gerard

IPC分类号： G01T1/24 ,  H01J37/244 ,  H01L31/115

CPC分类号： G01T1/24 ,  G01T1/2928 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01L31/115

公开(公告)号：EP2544025A1

公开(公告)日：2013-01-09

申请号：EP11172955.4

申请日：2011-07-07

申请人： FEI Company

发明人： Kooijman, Cees ,  Van Veen, Gerard

IPC分类号： G01T1/24 ,  H01J37/244 ,  H01L31/115

CPC分类号： G01T1/24 ,  G01T1/2928 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01L31/115

摘要： The invention relates to a detector with a Silicon Drift Diode (SDD) ( 10 , 200) for use in a charged particle apparatus. Such detectors are well-known for the detection of X-rays, but are not capable to detect secondary or backscattered electrons for two reasons:
1. the volume (20) in the SDD where electron/hole pairs must be generated is too far removed from the surface ( 18 ). This can be solved by known techniques resulting in a shallow layer, for example using thin boron layers.
2. Secondary and/or backscattered electrons are generated with a much higher efficiency than X-rays, as a result of which the current of backscattered electrons is typically too high to be detected due to the limited count rate of a SDD (typically up to 1 Mc/s, equivalent to a maximum electron current of up to 0.16 pA).
The invention describes a detector with a SDD ( 200 ) and an amplifier (206), and a feed-back element in the form of, for example, a resistor (208) or a diode, switchably connected to the output of the amplifier. When the feedback element is selected via a switch (209), the detector operates in a Current Measurement Mode for determining electron current, and when the element is not selected the detector operates in its well-known Pulse Height Measurement Mode for determining the energy of X-ray quanta.

摘要翻译： 本发明涉及一种用于带电粒子装置的具有硅漂移二极管（SDD）（10,200）的检测器。 这种检测器是众所周知的，用于检测X射线，但不能检测次级或反向散射电子的原因有两个：1. SDD中必须产生电子/空穴对的体积（20）太远， 从表面（18）。 这可以通过已知的技术来解决，从而产生浅层，例如使用薄硼层。 二次和/或反向散射电子以比X射线高得多的效率产生，其结果是后向散射电子的电流通常太高以致不能被检测到，这是由于SDD的计数率有限（通常高达 1 Mc / s，相当于最大电子电流高达0.16 pA）。 本发明描述了具有SDD（200）和放大器（206）的检测器，以及例如可切换地连接到放大器的输出端的电阻器（208）或二极管形式的反馈元件。 当通过开关（209）选择反馈元件时，检测器以用于确定电子电流的电流测量模式操作，并且当元件未被选择时，检测器以其公知的脉冲高度测量模式操作，以确定 X射线量子。

公开(公告)号：EP2346095A3

公开(公告)日：2011-07-27

申请号：EP11150672.1

申请日：2011-01-12

申请人： FEI COMPANY

发明人： Nanver, Lis ,  Scholtes, Thomas ,  Sakic, Agata ,  Van Veen, Gerard ,  Kooijman, Cees

IPC分类号： H01L31/0224 ,  H01L31/118

CPC分类号： H01L31/1185 ,  H01J37/244 ,  H01L31/022408 ,  H01L31/105

摘要： The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope.
The detector is a PIN photodiode with a thin layer of pure boron connected to the p + -diffusion layer. The boron layer is connected to an electrode with an aluminium grid to form a path of low electrical resistance between each given point of the boron layer and the electrode.
The invention addresses forming the aluminium grid on the boron layer without damaging the boron layer. To that end the grid of aluminium is formed by covering the boron layer completely with a layer of aluminium and then removing part of the layer of aluminium by etching, the etching comprising a first step (304) of dry etching, the step of dry etching defining the grid but leaving a thin layer of aluminium on the part of the boron layer to be exposed, followed by a second step (308) of wet etching, the step of wet etching completely removing the aluminium from the part of the boron layer to be exposed.

公开(公告)号：EP4123682A2

公开(公告)日：2023-01-25

申请号：EP22180090.7

申请日：2022-06-21

申请人： FEI Company

发明人： Janssen, Bart ,  Van Veen, Gerard ,  Kieft, Erik

IPC分类号： H01J37/244

摘要： Electron beam modulation in response to optical pump pulses applied to a sample is measured using SPAD elements. Individual detection events are used to form histograms of numbers of events in time bins associated with pump pulse timing. The histograms can be produced at a SPAD array, simplifying data transfer. In some examples, two SPAD arrays are stacked and a coincidence circuit discriminates signal events from noise events by determining corresponding events are detected withing a predetermined time window.

公开(公告)号：EP2631929A1

公开(公告)日：2013-08-28

申请号：EP12157055.0

申请日：2012-02-27

申请人： FEI Company ,  Delft University Of Technology

发明人： Zandbergen, Henny ,  Dona, Pleun ,  Van Veen, Gerard

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J2237/022 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

摘要： The invention relates to a holder assembly for cooperating with an environmental cell ( 101 ) and an electron microscope, the environmental cell showing a fluid inlet (103), the electron microscope showing a vacuum wall (110) for separating an evacuable part of the electron microscope from the outside of the electron microscope, the holder assembly comprising an electron microscope interface for forming a sealing interface with the electron microscope, the holder assembly comprising an environmental cell interface for forming a sealing interfacing with the fluid inlet (103) of the environmental cell (101), and the holder assembly comprising a tube (126) for connecting a fluid supply to the fluid inlet (103) of the environmental cell (101), characterized in that the holder assembly comprises a first and a second part, the first part detachable from the second part, the first part comprising the tube (126) and the environmental cell interface and the second part comprising the electron microscope interface, as a result of which the first part can be cleaned at high temperatures without exposing the second part to said high temperature.
By forming the holder assembly from to detachable parts, one part can be cleaned by heating it to a high temperature of, for example, 1000 °C, clogging in the tubes can be removed by reduction of carbon, while keeping the other part (often comprising mechanical fittings, ball bearing, sliders, or such like) cool. The cleaning can be enhanced by blowing, for example, oxygen or hydrogen through the tubes.

摘要翻译： 本发明涉及一种用于与环境单元（101）和电子显微镜配合的支架组件，所述环境单元示出了流体入口（103），所述电子显微镜示出了真空壁（110），用于将电子的可抽真空部分 所述保持器组件包括用于与所述电子显微镜形成密封界面的电子显微镜界面，所述保持器组件包括用于形成与所述环境的所述流体入口（103）接口连接的环境单元接口 所述保持器组件包括用于将流体供应连接到所述环境单元（101）的所述流体入口（103）的管（126），其特征在于，所述保持器组件包括第一部分和第二部分，所述 第一部分可从第二部分拆卸，第一部分包括管（126）和环境单元接口，第二部分包括电子麦克风 从而可以在高温下清洁第一部分而不会使第二部分暴露于所述高温。 通过将支架组件形成为可拆卸的部件，可以通过将一个部件加热至例如1000℃的高温来清洁一个部件，可以通过减少碳来去除管道中的堵塞，同时保持另一部件（通常 包括机械配件，滚珠轴承，滑块等）冷却。 例如，通过吹入氧气或氢气可以增强清洁。

公开(公告)号：EP2346095A2

公开(公告)日：2011-07-20

申请号：EP11150672.1

申请日：2011-01-12

申请人： FEI COMPANY

发明人： Nanver, Lis ,  Scholtes, Thomas ,  Sakic, Agata ,  Van Veen, Gerard ,  Kooijman, Cees

IPC分类号： H01L31/118 ,  H01L31/0224

CPC分类号： H01L31/1185 ,  H01J37/244 ,  H01L31/022408 ,  H01L31/105

摘要： The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope.
The detector is a PIN photodiode with a thin layer of pure boron connected to the p + -diffusion layer. The boron layer is connected to an electrode with an aluminium grid to form a path of low electrical resistance between each given point of the boron layer and the electrode.
The invention addresses forming the aluminium grid on the boron layer without damaging the boron layer. To that end the grid of aluminium is formed by covering the boron layer completely with a layer of aluminium and then removing part of the layer of aluminium by etching, the etching comprising a first step (304) of dry etching, the step of dry etching defining the grid but leaving a thin layer of aluminium on the part of the boron layer to be exposed, followed by a second step (308) of wet etching, the step of wet etching completely removing the aluminium from the part of the boron layer to be exposed.

摘要翻译： 本发明公开了一种制造辐射探测器的方法，用于探测例如 200 eV电子。 这使得检测器适合于例如 在扫描电子显微镜中使用。 探测器是一个PIN光电二极管，带有一层薄的纯硼，连接到p +扩散层。 硼层连接到具有铝栅格的电极以在硼层的每个给定点与电极之间形成低电阻路径。 本发明解决了在硼层上形成铝栅格而不损坏硼层。 为此，通过用铝层完全覆盖硼层然后通过蚀刻去除部分铝层来形成铝的栅格，该蚀刻包括干法蚀刻的第一步骤（304），干法蚀刻的步骤 限定栅格，但在硼层的一部分上留下薄铝层以暴露，接着进行湿法蚀刻的第二步骤（308），湿法蚀刻的步骤将硼从硼层的一部分完全去除至步骤 被暴露。