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    Method for producing functional film
    5.
    发明公开
    Method for producing functional film 有权
    生产功能膜的方法

    公开(公告)号：EP2085497A1

    公开(公告)日：2009-08-05

    申请号：EP09001303.8

    申请日：2009-01-30

    申请人： FUJIFILM Corporation

    发明人： Nakagame, Masami ,  Nishida, Hiroyuki ,  Kadota, Norihiro ,  Fujinawa, Jun ,  Onodera, Daisuke

    IPC分类号： C23C16/54 ,  C23C14/56 ,  B05D7/24 ,  B05D3/04 ,  B65H20/02 ,  B65H27/00

    CPC分类号： C23C16/545 ,  B05D1/28 ,  B05D3/067 ,  B05D7/04 ,  B05D7/54 ,  B05D2252/02 ,  C23C14/562

    摘要： A functional film having a particular organic film and a particular inorganic film is produced. The functional film is consistently produced and exhibits the intended performance. The functional film production method includes forming an organic film on a surface of a substrate, handling the substrate having the organic film formed thereon so that no member comes in contact with an organic film surface in vacuum until formation of an inorganic film, and forming the inorganic film by vacuum deposition on the organic film surface.

    摘要翻译： 生产具有特定有机膜和特定无机膜的功能膜。 功能薄膜始终如一地生产并呈现出预期的性能。 该功能性膜制造方法包括：在基板的表面上形成有机膜，处理其上形成有机膜的基板，使得在真空中没有部件与有机膜表面接触直至形成无机膜，并且形成 无机膜通过真空沉积在有机膜表面上。

    Film deposition method
    10.
    发明公开
    Film deposition method 有权
    Filmabscheidungsverfahren

    公开(公告)号：EP2298956A1

    公开(公告)日：2011-03-23

    申请号：EP10174110.6

    申请日：2010-08-26

    申请人： Fujifilm Corporation

    发明人： Fujinami, Tatsuya ,  Takahashi, Shinsuke ,  Fujinawa, Jun ,  Tonohara, Kouji

    IPC分类号： C23C16/44 ,  C23C16/50 ,  C23C16/503 ,  C23C16/505 ,  C23C16/509 ,  C23C16/517 ,  C23C16/54

    CPC分类号： C23C16/50 ,  C23C16/44 ,  C23C16/503 ,  C23C16/505 ,  C23C16/509 ,  C23C16/517 ,  C23C16/54 ,  C23C16/545

    摘要： A film deposition method deposits a film on a surface of a substrate in strip form traveling on a peripheral surface of a cylindrical drum in at least one film deposition compartment around the peripheral surface of the drum. The method disposes previously a differential compartment between one film deposition compartment and a compartment including a wrapping space containing at least one of a first position at which the substrate starts to travel on the drum and a second position at which the substrate separates from the drum, the differential compartments communicating with the compartment including the wrapping space and the film deposition compartment, sets a first pressure of the wrapping space lower than a second pressure of the at least one film deposition compartment and performs film deposition in the film deposition compartment with electric power supplied to the drum.

    摘要翻译： 薄膜沉积方法将薄膜沉积在基板的表面上，以带状形式在圆筒形滚筒的圆周表面上行进，在至少一个薄膜沉积室中围绕滚筒周边表面。 该方法事先将一个膜沉积隔室和隔室之间的差动隔间置于包括一个包裹空间的隔间，该包装空间包含基板开始在滚筒上行进的第一位置和基板与滚筒分离的第二位置中的至少一个， 与包括所述包裹空间和所述成膜室的所述隔室连通的所述差动隔间将所述包装空间的第一压力设定为低于所述至少一个成膜室的第二压力，并且在所述成膜室中进行电沉积 提供给鼓。