Method for forming a thin film pattern
    3.
    发明公开
    Method for forming a thin film pattern 失效
    形成薄膜图案的方法

    公开(公告)号:EP0193820A3

    公开(公告)日:1988-01-07

    申请号:EP86102335

    申请日:1986-02-22

    IPC分类号: H01L31/18 H01L31/02 H01L21/00

    摘要: A method for forming a thin film pattern comprising the steps in sequence of forming a lift-off layer directly on a substrate wherein a pattern of the lift-off layer is reverse to a desired thin film pattern, forming a thin film on the substrate, removing an undesirable portion of the thin film together with the lift-off layer; and a method for producing a semiconductor device comprising the steps in sequence of forming a first electrode on an insulated substrate, removing a part of the first electrode, forming a semiconductor including amorphous material on the first electrode, forming a lift-off layer on the semiconductor including amorphous material at such a place whereon a second electrode is not desired to be formed, and forming a second electrode on the semiconductor. According to the present invention, a thin film pattern can be formed at low production cost, with high productivity and accuracy, and with less danger during the process.

    Method for forming a thin film pattern
    4.
    发明公开
    Method for forming a thin film pattern 失效
    赫尔斯特伦·赫尔斯特伦(Dénnschichtmusters)。

    公开(公告)号:EP0193820A2

    公开(公告)日:1986-09-10

    申请号:EP86102335.6

    申请日:1986-02-22

    IPC分类号: H01L31/18 H01L31/02 H01L21/00

    摘要: A method for forming a thin film pattern comprising the steps in sequence of forming a lift-off layer directly on a substrate wherein a pattern of the lift-off layer is reverse to a desired thin film pattern, forming a thin film on the substrate, removing an undesirable portion of the thin film together with the lift-off layer; and a method for producing a semiconductor device comprising the steps in sequence of forming a first electrode on an insulated substrate, removing a part of the first electrode, forming a semiconductor including amorphous material on the first electrode, forming a lift-off layer on the semiconductor including amorphous material at such a place whereon a second electrode is not desired to be formed, and forming a second electrode on the semiconductor.
    According to the present invention, a thin film pattern can be formed at low production cost, with high productivity and accuracy, and with less danger during the process.

    摘要翻译: 一种用于形成薄膜图案的方法,包括以下步骤:直接在基板(1)上形成剥离层(2),其中剥离层的图案与期望的薄膜图案相反,形成 薄膜(3),与剥离层(2)一起去除薄膜(3)的不希望的部分; 以及一种半导体器件(8)的制造方法,包括以下步骤:在绝缘基板(4)上形成第一电极(5),去除第一电极(5)的一部分,形成包含非晶材料的半导体 6)在第一电极(5)上,在半导体上形成第二电极(7)的半导体的半导体层上形成剥离层,所述半导体包括无定形材料,其中不希望形成第二电极。 根据本发明,可以以低生产成本,高生产率和精确度地形成薄膜图案,并且在该过程中具有较小的危险。