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公开(公告)号:EP4318560A1
公开(公告)日:2024-02-07
申请号:EP23177564.4
申请日:2023-06-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: HE, Ming , SAREMI, Mehdi , PARK, Rebecca , AHOSAN UL KARIM, Muhammed , SIMKA, Harsono , PARK, Sungil , KANG, Myungil , KIM, Kyungho , CHOI, Doyoung , PARK, JaeHyun
IPC: H01L21/822 , H01L21/8238 , H01L27/06 , H01L27/092 , H01L29/06 , H01L29/66 , H01L29/775 , H01L29/786
Abstract: Provided is a three-dimensionally stacked field-effect transistor (3DSFET) device (500) which includes: a 1 st lower source/drain region (512L) and a 2 nd lower source/drain region (512R) connected to each other through a 1 st lower channel structure (510) controlled by a 1 st gate structure (515); and a 1 st upper source/drain region (522L) and a 2 nd upper source/drain region (522R), respectively above the 1 st lower source/drain region and the 2 nd lower source/drain region, and connected to each other through a 1 st upper channel structure (520) controlled by the 1 st gate structure (515), wherein the 2 nd lower source/drain region and the 2 nd upper source/drain region form a PN junction therebetween.
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公开(公告)号:EP4318561A3
公开(公告)日:2024-04-03
申请号:EP23177889.5
申请日:2023-06-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: HE, Ming , SAREMI, Mehdi , PARK, Rebecca , AHOSAN UL KARIM, Muhammed , SIMKA, Harsono , PARK, Sungil , KANG, Myungil , KIM, Kyungho , CHOI, Doyoung , PARK, JaeHyun
IPC: H01L21/822 , H01L21/8238 , H01L27/06 , H01L27/092 , H01L29/06 , H01L29/66 , H01L29/775 , H01L29/786
Abstract: Provided is a three-dimensionally stacked field-effect transistor (3DSFET) device (20) which includes: a lower source/drain region (212) of a 1 st polarity type connected to a lower channel structure (210); an upper source/drain region (222) of a 2 nd polarity type, connected to an upper channel structure (220), above the lower source/drain region; and a PN junction structure (211+, 211-), between the lower source/drain region and the upper source/drain region, configured to electrically isolate the upper source/drain region from the lower source/drain region, wherein the PN junction structure includes a 1 st region (211+) of the 1 st polarity type and a 2 nd region (211-) of the 2 nd polarity type.
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公开(公告)号:EP4495987A2
公开(公告)日:2025-01-22
申请号:EP24186783.7
申请日:2024-07-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: KIM, Hyojin , HWANG, Donghoon , KANG, Myungil
IPC: H01L21/8234 , H01L27/088 , H01L29/06 , H01L29/66 , H01L29/775 , H01L29/786
Abstract: A semiconductor device includes gate structures (300) on an insulation structure (140, 420), the gate structures disposed in a second direction (D2) substantially parallel to an upper surface of the insulation structure, source/drain layers at opposite sides, respectively, of each gate structure in a first direction (D1) intersecting the second direction, semiconductor patterns (134) disposed in a third direction (D3) substantially perpendicular to the upper surface of the insulation structure, the semiconductor patterns extending through each of the gate structures and contacting the source/drain layers, a first division pattern (150) between the gate structures, and a connection pattern (370) extending into and contacting an upper portion of the first division pattern and upper portions of the gate structures adjacent to the first division pattern, a lower surface of the connection pattern being lower than upper surfaces of the gate structures and an upper surface of the connection pattern being higher than the upper surfaces of the gate structures.
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公开(公告)号:EP4345874A2
公开(公告)日:2024-04-03
申请号:EP23187220.1
申请日:2023-07-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: HWANG, Donghoon , KANG, Myungil , GWAK, Minchan , KIM, Kyungho , CHO, Kyung Hee , CHOI, Doyoung
IPC: H01L21/822 , H01L21/8238 , H01L27/06 , H01L27/092 , H01L29/06 , H01L29/66 , H01L29/775 , H01L29/786
Abstract: A three-dimensional semiconductor device includes a first active region on a substrate (100), the first active region including a lower channel pattern and a lower source/drain pattern (LSD1) connected to the lower channel pattern, a second active region stacked on the first active region, the second active region including an upper channel pattern and an upper source/drain pattern (USD1) connected to the upper channel pattern, a gate electrode on the lower channel pattern and the upper channel pattern, a lower contact (LCT) electrically connected to the lower source/drain pattern, the lower contact having a bar shape extending on the lower source/drain pattern in a first direction, a first active contact (AC1) coupled to the lower contact, and a second active contact (AC2) coupled to the upper source/drain pattern. A first width of the lower source/drain pattern in a second direction is larger than a second width of the lower contact in the second direction.
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公开(公告)号:EP4513543A1
公开(公告)日:2025-02-26
申请号:EP24168133.7
申请日:2024-04-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: PARK, Wooseok , SONG, Wookhwan , HWANG, Donghoon , KANG, Myungil , RYU, Taehyun , LEE, Namhyun
IPC: H01L21/8234 , H01L27/088 , H01L29/06 , H01L29/775 , H01L29/08 , H01L29/10 , H01L29/66 , H01L29/417 , B82Y10/00
Abstract: A semiconductor device may include a first active pattern, a second active pattern spaced apart at a first distance from the first active pattern, a third active pattern spaced apart at a second distance from the second active pattern, a first device isolation layer between the first and second active patterns, a second device isolation layer between the second and third active patterns, a first channel structure overlapping the first active pattern, a second channel structure overlapping the second active pattern, a third channel structure overlapping the third active pattern, and a separation dielectric layer between the first and second channel structures. The separation dielectric layer may overlap the first device isolation layer. A level of a top surface of the first device isolation layer may be higher than a level of a top surface of the second device isolation layer.
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公开(公告)号:EP4345874A3
公开(公告)日:2024-05-22
申请号:EP23187220.1
申请日:2023-07-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: HWANG, Donghoon , KANG, Myungil , GWAK, Minchan , KIM, Kyungho , CHO, Kyung Hee , CHOI, Doyoung
IPC: H01L21/822 , H01L21/8238 , H01L27/06 , H01L27/092 , H01L29/06 , H01L29/66 , H01L29/775 , H01L29/786
CPC classification number: H01L27/092 , H01L27/0688 , H01L21/823871 , H01L21/823842 , H01L21/823807 , H01L21/823814 , H01L21/8221 , H01L29/775 , H01L29/0673 , H01L29/66439 , H01L29/78696
Abstract: A three-dimensional semiconductor device includes a first active region on a substrate (100), the first active region including a lower channel pattern and a lower source/drain pattern (LSD1) connected to the lower channel pattern, a second active region stacked on the first active region, the second active region including an upper channel pattern and an upper source/drain pattern (USD1) connected to the upper channel pattern, a gate electrode on the lower channel pattern and the upper channel pattern, a lower contact (LCT) electrically connected to the lower source/drain pattern, the lower contact having a bar shape extending on the lower source/drain pattern in a first direction, a first active contact (AC1) coupled to the lower contact, and a second active contact (AC2) coupled to the upper source/drain pattern. A first width of the lower source/drain pattern in a second direction is larger than a second width of the lower contact in the second direction.
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公开(公告)号:EP4318561A2
公开(公告)日:2024-02-07
申请号:EP23177889.5
申请日:2023-06-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: HE, Ming , SAREMI, Mehdi , PARK, Rebecca , AHOSAN UL KARIM, Muhammed , SIMKA, Harsono , PARK, Sungil , KANG, Myungil , KIM, Kyungho , CHOI, Doyoung , PARK, JaeHyun
IPC: H01L21/822 , H01L21/8238 , H01L27/06 , H01L27/092 , H01L29/06 , H01L29/66 , H01L29/775 , H01L29/786
Abstract: Provided is a three-dimensionally stacked field-effect transistor (3DSFET) device (20) which includes: a lower source/drain region (212) of a 1 st polarity type connected to a lower channel structure (210); an upper source/drain region (222) of a 2 nd polarity type, connected to an upper channel structure (220), above the lower source/drain region; and a PN junction structure (211+, 211-), between the lower source/drain region and the upper source/drain region, configured to electrically isolate the upper source/drain region from the lower source/drain region, wherein the PN junction structure includes a 1 st region (211+) of the 1 st polarity type and a 2 nd region (211-) of the 2 nd polarity type.
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