摘要:
The invention relates to a magnetic latch for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The magnetic latch includes a permanent magnetic, which is moveable between a latching position, in which the permanent magnet magnetizes the latch for attracting a substrate holder, and an unlatching position, in which the permanent magnet is connected in a bypass circuit, thereby demagnetizing the latch for releasing the substrate holder.
摘要:
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding (41,42) can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
摘要:
The invention relates to an optical coupling device that provides passive compensation for a shift in center wavelength due to a change in ambient temperature. A conventional solution is to mount one of the elements to be coupled on a pedestal or cantilevered arm, which has a coefficient of thermal expansion (CTE) different from a frame fixed relative to the other of the elements to be coupled. Unfortunately, these devices do not provide consistent results over long periods of time, due to uncontrolled movement of the outer free end of the cantilevered arm or pedestal. The present invention provides an expansion arm fixed on one end to a frame, a holder on the other end of the expansion arm, and a pair of flexible arms connecting the holder to the frame. This arrangement enables the expansion arm to freely expand in a first direction, while greatly restricting movement in any other direction. The present invention also relates to a optical coupling device that includes a expansion arm with an adjustable effective length. Furthermore, optical coupling devices are disclosed that include an expansion arm for moving a lens relative to one or more waveguides providing thermal compensation.
摘要:
An electro-optic waveplate for changing the state of polarization of light passing therethrough is disclosed. The waveplate provides a substantially constant birefringence when the principle birefringent axes of the electro-optic waveplate are rotated. The waveplate is an electro-optical material having two principle orthogonal birefringent axes that are rotable when suitable voltages are applied. Two related different voltages are applied along sequential or contiguous regions along the length L of the electro-optical waveplate for providing a controllable and varying electric field along the length L, such that retardance of the waveplate of the length L remains substantially constant while the birefringent axes of the electro-optic waveplate are rotated by varying the voltages. The two different voltages have a phase relationship or a phase and magnitude relationship therebetween.
摘要:
Optic switches manipulate an optical signal that has been expanded by a collimating lens. Switching is effected by introducing a prism between collimating lenses to redirect the optical signal to an alternative lens. The prism preferably has a cross-section defining a parallelogram, so that the optical signal is reflected twice within the prism to minimize cross-sectional distortion and avoid spectral effects. A circuit provides feedback on the actual position of the relay and prism for fault detection and diagnosis.
摘要:
A drive towards automation, particularly in the fiber optics industry, has necessitated the use of materials and methods better suited for use by machines. The present invention takes advantage of the magnetic properties of these materials to create a strong magnetic bond between separate elements while they are being connected. Two independently controllable chucks (1,4) are used to align the elements (2,6) in accordance with design requirements. After proper alignment, the elements are magnetically attracted together and then permanently fixed using any one of a variety of standard methods, such as welding. In the embodiment of the invention used specifically in the fiber optics industry, the alignment process includes measuring the light transmitted or reflected by the two elements.
摘要:
A multilayer optical interference filter having a multiplicity of optical cavities separated by a dielectric reflector stacks to achieve either a very narrow passband region or sharp transition between the passband and reflective region is substantially free of stress to preserve the desired optical performance upon fabrication into miniature discrete filter elements. The substantial stress reduction is achieved by removing the filter from the substrate used in the deposition process in a controlled manner to preserve the structural integrity of the resulting free standing multilayer film structure. The structure can be further bonded or attached to other optical components to suppress a thermal shift in center wavelength without reintroducing stress or interposing a massive substrate in the optical path through the filter.
摘要:
Many optical components now use a microelectronic substrate called an optical micro-bench as a base from which to build. Conventional devices use one or more methods of fixing the various elements together and/or onto the semiconductor micro-bench. Typically these conventional methods require special coatings to be deposited on the substrate, and the use of a separate bonding material, e.g. solder, glass or adhesive. The present invention relates to the direct fixation of a semiconductor, e.g. silicon, indium phosphide or gallium arsenide, structural component to the micro-bench made of a similar material using a laser welding technique, which uses wavelengths that are not harmful to the other elements of the component. The present invention eliminates the use of any separate bonding material, as well as several steps in the bonding process.
摘要:
A Raman optical amplifier for amplifying an optical signal propagating in an optical fiber associated with an optical communications system. The amplifier includes a first Raman pump source including a first pump laser coupled to the fiber to provide first order Raman pump light for amplifying the optical signal, and a second Raman pump source including a second pump laser coupled to the fiber to provide second order Raman pump light for amplifying the first order Raman pump light. The first and second order Raman pump light is introduced into the fiber in either a co-propagating or counter-propagating direction relative to the propagation direction of the optical signal in the fiber. The second pump laser may include first and second pump laser elements that generate the second order Raman pump light, where a center wavelength of the light generated by the first laser element is different than the center wavelength of the light generated by the second laser element.