Magnetic latch for a vapour deposition system
    1.
    发明公开
    Magnetic latch for a vapour deposition system 有权
    Magnetverschlussfüreine Dampfabscheidungsvorrichtung

    公开(公告)号:EP1630260A2

    公开(公告)日:2006-03-01

    申请号:EP05255001.9

    申请日:2005-08-11

    申请人: JDS Uniphase Inc.

    IPC分类号: C30B25/12 C30B31/14 C23C16/44

    摘要: The invention relates to a magnetic latch for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The magnetic latch includes a permanent magnetic, which is moveable between a latching position, in which the permanent magnet magnetizes the latch for attracting a substrate holder, and an unlatching position, in which the permanent magnet is connected in a bypass circuit, thereby demagnetizing the latch for releasing the substrate holder.

    摘要翻译: 本发明涉及一种用于将基板固定在悬浮在气相沉积系统的真空室中的涂覆源上方的行星旋转平台上的磁性闩锁, 化学气相沉积(CVD)系统或物理气相沉积(PVD)系统。 磁性闩锁包括永久磁铁,该永久磁铁可以在永久磁铁磁化闩锁以吸引衬底保持器的闩锁位置与永久磁铁连接在旁路电路中的解锁位置之间移动,从而使 用于释放衬底保持器的闩锁。

    Electrical X-talk shield for MEMs micromirrors
    3.
    发明公开
    Electrical X-talk shield for MEMs micromirrors 有权
    ElektrischeÜbersprechungsabschirmungfürMEMS Mikrospiegel

    公开(公告)号:EP1479647A2

    公开(公告)日:2004-11-24

    申请号:EP04405318.9

    申请日:2004-05-21

    申请人: JDS Uniphase Inc.

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding (41,42) can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.

    摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链在其中部附近枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此这些“钢琴”MEM装置中的几个可以彼此相邻地定位成围绕相同的轴线枢转地安装,仅具有相对的 它们之间的空气间隙很小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。 为了限制相邻反射镜之间的电串扰量,屏蔽层(41,42)可以位于电极之间。 屏蔽层可以从基板向上延伸和/或从反射镜的下表面向下延伸。 当提供两种类型的屏蔽时,一组彼此偏移以防止其邻接,并且能够实现重叠效果,这增强了保护。

    Athermal optical coupler
    4.
    发明公开
    Athermal optical coupler 审中-公开
    无热光耦合器

    公开(公告)号:EP1326107A3

    公开(公告)日:2004-03-10

    申请号:EP02023884.6

    申请日:2002-10-24

    IPC分类号: G02B6/30 G02B6/34

    摘要: The invention relates to an optical coupling device that provides passive compensation for a shift in center wavelength due to a change in ambient temperature. A conventional solution is to mount one of the elements to be coupled on a pedestal or cantilevered arm, which has a coefficient of thermal expansion (CTE) different from a frame fixed relative to the other of the elements to be coupled. Unfortunately, these devices do not provide consistent results over long periods of time, due to uncontrolled movement of the outer free end of the cantilevered arm or pedestal. The present invention provides an expansion arm fixed on one end to a frame, a holder on the other end of the expansion arm, and a pair of flexible arms connecting the holder to the frame. This arrangement enables the expansion arm to freely expand in a first direction, while greatly restricting movement in any other direction. The present invention also relates to a optical coupling device that includes a expansion arm with an adjustable effective length. Furthermore, optical coupling devices are disclosed that include an expansion arm for moving a lens relative to one or more waveguides providing thermal compensation.

    Method and device for controlling the polarization of a Beam of Light
    5.
    发明公开
    Method and device for controlling the polarization of a Beam of Light 审中-公开
    装置和方法,用于控制光束的偏振

    公开(公告)号:EP1148373A3

    公开(公告)日:2003-11-19

    申请号:EP01810342.4

    申请日:2001-04-05

    申请人: JDS Uniphase Inc.

    IPC分类号: G02F1/01

    CPC分类号: G02F1/0136 G02F1/035

    摘要: An electro-optic waveplate for changing the state of polarization of light passing therethrough is disclosed. The waveplate provides a substantially constant birefringence when the principle birefringent axes of the electro-optic waveplate are rotated. The waveplate is an electro-optical material having two principle orthogonal birefringent axes that are rotable when suitable voltages are applied. Two related different voltages are applied along sequential or contiguous regions along the length L of the electro-optical waveplate for providing a controllable and varying electric field along the length L, such that retardance of the waveplate of the length L remains substantially constant while the birefringent axes of the electro-optic waveplate are rotated by varying the voltages. The two different voltages have a phase relationship or a phase and magnitude relationship therebetween.

    MXN optical switch with improved stability
    6.
    发明公开
    MXN optical switch with improved stability 审中-公开
    MxN-optischer Schalter mit verbesserterStabilität

    公开(公告)号:EP1118896A3

    公开(公告)日:2003-10-22

    申请号:EP01300275.3

    申请日:2001-01-12

    申请人: JDS Uniphase Inc.

    IPC分类号: G02B6/35 G02B26/02

    摘要: Optic switches manipulate an optical signal that has been expanded by a collimating lens. Switching is effected by introducing a prism between collimating lenses to redirect the optical signal to an alternative lens. The prism preferably has a cross-section defining a parallelogram, so that the optical signal is reflected twice within the prism to minimize cross-sectional distortion and avoid spectral effects. A circuit provides feedback on the actual position of the relay and prism for fault detection and diagnosis.

    摘要翻译: 光开关操纵已被准直透镜扩展的光信号。 通过在准直透镜之间引入棱镜以将光信号重定向到替代透镜来实现切换。 棱镜优选地具有限定平行四边形的横截面,使得光学信号在棱镜内被反射两次以最小化横截面畸变并避免光谱效应。 电路为继电器和棱镜的实际位置提供故障检测和诊断反馈。

    Method and apparatus for connecting optical elements
    7.
    发明公开
    Method and apparatus for connecting optical elements 审中-公开
    Methode und Vorrichtung zum Verbinden optischer Elemente

    公开(公告)号:EP1195631A3

    公开(公告)日:2003-01-15

    申请号:EP01308448.8

    申请日:2001-10-03

    申请人: JDS Uniphase Inc.

    IPC分类号: G02B6/38 G02B6/42

    摘要: A drive towards automation, particularly in the fiber optics industry, has necessitated the use of materials and methods better suited for use by machines. The present invention takes advantage of the magnetic properties of these materials to create a strong magnetic bond between separate elements while they are being connected. Two independently controllable chucks (1,4) are used to align the elements (2,6) in accordance with design requirements. After proper alignment, the elements are magnetically attracted together and then permanently fixed using any one of a variety of standard methods, such as welding. In the embodiment of the invention used specifically in the fiber optics industry, the alignment process includes measuring the light transmitted or reflected by the two elements.

    摘要翻译: 实现自动化,特别是在光纤行业中的驱动力,必须使用更适合机器使用的材料和方法。 本发明利用这些材料的磁特性在分离元件连接时产生强磁性键。 两个可独立控制的卡盘(1,4)用于根据设计要求对准元件(2,6)。 在正确对准之后,将元件磁吸引到一起,然后使用各种标准方法(例如焊接)中的任何一种永久地固定。 在本发明的光纤行业特别使用的实施例中,对准过程包括测量由两个元件透射或反射的光。

    Stress free thermally stabilized dielectric optical filter
    8.
    发明公开
    Stress free thermally stabilized dielectric optical filter 审中-公开
    Thermisch stableisiertes dielektrisches optisches Filter frei von inneren Spannungen

    公开(公告)号:EP1262803A1

    公开(公告)日:2002-12-04

    申请号:EP02253502.5

    申请日:2002-05-17

    申请人: JDS Uniphase Inc.

    IPC分类号: G02B5/28 G02B1/10

    摘要: A multilayer optical interference filter having a multiplicity of optical cavities separated by a dielectric reflector stacks to achieve either a very narrow passband region or sharp transition between the passband and reflective region is substantially free of stress to preserve the desired optical performance upon fabrication into miniature discrete filter elements. The substantial stress reduction is achieved by removing the filter from the substrate used in the deposition process in a controlled manner to preserve the structural integrity of the resulting free standing multilayer film structure. The structure can be further bonded or attached to other optical components to suppress a thermal shift in center wavelength without reintroducing stress or interposing a massive substrate in the optical path through the filter.

    摘要翻译: 具有由介电反射器叠层隔开的多个光学空腔的多层光学干涉滤光器实现非常窄的通带区域或通带和反射区域之间的尖锐过渡,基本上没有应力,从而在制造成微型离散时保持所需的光学性能 过滤元件。 通过以可控的方式从沉积过程中使用的衬底上除去过滤器来实现显着的应力降低,以保持所得自立式多层膜结构的结构完整性。 该结构可以进一步结合或附着到其它光学部件上,以抑制中心波长的热偏移而不会再次引入应力或者通过滤光器将大块基片插入到光路中。

    Laser welding components to a micro-optical bench
    9.
    发明公开
    Laser welding components to a micro-optical bench 审中-公开
    Komponenten-Laserverschweissung auf einer mikrooptischen银行

    公开(公告)号:EP1240971A2

    公开(公告)日:2002-09-18

    申请号:EP02251155.4

    申请日:2002-02-20

    申请人: JDS Uniphase Inc.

    发明人: Musk, Robert W.

    IPC分类号: B23K26/20 G02B6/30

    摘要: Many optical components now use a microelectronic substrate called an optical micro-bench as a base from which to build. Conventional devices use one or more methods of fixing the various elements together and/or onto the semiconductor micro-bench. Typically these conventional methods require special coatings to be deposited on the substrate, and the use of a separate bonding material, e.g. solder, glass or adhesive. The present invention relates to the direct fixation of a semiconductor, e.g. silicon, indium phosphide or gallium arsenide, structural component to the micro-bench made of a similar material using a laser welding technique, which uses wavelengths that are not harmful to the other elements of the component. The present invention eliminates the use of any separate bonding material, as well as several steps in the bonding process.

    摘要翻译: 许多光学组件现在使用称为光学微型台架的微电子衬底作为构建基座。 常规设备使用将各种元件固定在一起和/或将其固定到半导体微型台架上的一种或多种方法。 通常,这些常规方法需要沉积在基底上的特殊涂层,以及使用单独的粘合材料,例如, 焊料,玻璃或粘合剂。 本发明涉及半导体的直接固定,例如, 硅,磷化铟或砷化镓,由使用激光焊接技术的类似材料制成的微型台架的结构部件,其使用对组件的其它元件无害的波长。 本发明消除了使用任何单独的接合材料,以及在接合过程中的几个步骤。

    High order fiber raman amplifiers
    10.
    发明公开
    High order fiber raman amplifiers 审中-公开
    Ramanfaserverstärkerhoher Ordnung

    公开(公告)号:EP1225666A2

    公开(公告)日:2002-07-24

    申请号:EP01310719.8

    申请日:2001-12-20

    申请人: JDS Uniphase Inc

    IPC分类号: H01S3/30

    摘要: A Raman optical amplifier for amplifying an optical signal propagating in an optical fiber associated with an optical communications system. The amplifier includes a first Raman pump source including a first pump laser coupled to the fiber to provide first order Raman pump light for amplifying the optical signal, and a second Raman pump source including a second pump laser coupled to the fiber to provide second order Raman pump light for amplifying the first order Raman pump light. The first and second order Raman pump light is introduced into the fiber in either a co-propagating or counter-propagating direction relative to the propagation direction of the optical signal in the fiber. The second pump laser may include first and second pump laser elements that generate the second order Raman pump light, where a center wavelength of the light generated by the first laser element is different than the center wavelength of the light generated by the second laser element.

    摘要翻译: 一种拉曼光放大器,用于放大在与光通信系统相关联的光纤中传播的光信号。 放大器包括第一拉曼泵浦源,其包括耦合到光纤的第一泵浦激光器以提供用于放大光信号的一阶拉曼泵浦光,以及第二拉曼泵浦源,其包括耦合到该光纤的第二泵激光器以提供二阶拉曼 泵浦光用于放大一阶拉曼泵浦光。 第一和第二级拉曼泵浦光以相对于光纤中的光信号的传播方向的共传播或反向传播方向被引入光纤。 第二泵激光器可以包括产生二阶拉曼泵浦光的第一和第二泵浦激光元件,其中由第一激光元件产生的光的中心波长不同于由第二激光元件产生的光的中心波长。