Abstract:
A chemical analysis method for determining the concentration of carbon monoxide, gaseous water and gaseous hydrocarbon in a combustion gas. The method includes the following steps: (a) directing wavelength modulated light from a single tunable diode laser at a wavelength in the range of from 2 to 2.5 micrometers through the combustion gas to a light detector to produce an absorption profile of the combustion gas (b) digitizing the adsorption profile of the combustion gas; (c) storing the digitized adsorption profile in a digital computer; (d) processing the digitized adsorption profile in the digital computer to produce an output from the computer indicative of the concentration of carbon monoxide, gaseous water and gaseous hydrocarbon in the combustion gas.
Abstract:
A technique is disclosed for the detection of water vapor in a natural gas background. The system includes a light source (519) emitting light approximately within wavelength ranges such as 920- 960 nm, 1.877 - 1.901, or 2.711 - 2.786 . The light source emits light through a sample of natural gas that is detected by a detector (523). In one embodiment, the light source is a tunable diode laser and the moisture level is determined by harmonic spectroscopy. In other embodiments, a VCSEL, a color center laser, or a quantum cascade laser is utilized.
Abstract:
Provided is a novel method for intelligent data acquisition in a measurement system. The method comprises the following steps: (a) providing a measurement system; (b) performing a measurement with the measurement system, thereby obtaining a measurement result; (c) writing the measurement result to a data file on a first storage device; (d) repeating steps (b) and (c) one or more times, thereby accumulating a plurality of measurement results in the data file; (e) generating one or more summary values from the measurement results; (f) saving the one or more summary values to a summary file on the first storage device or on a second storage device; (g) comparing at least one of the one or more summary values with a respective predefined standard summary value corresponding to the at least one summary value, wherein the comparing is made on the basis of a predefined inequality for each summary value being compared; and (h) saving the data file to the first storage device, the second storage device, or a third storage device if one or more of the at least one summary values compared in step (g) is outside of an acceptable range as defined by the respective inequalities, and/or optionally, when a trigger indicates that a condition is present. Particular applicability is found in in-situ moisture concentration measurement in a semiconductor processing apparatus.
Abstract:
A humidity sensor for use in a medical breathing circuit. The sensor comprises a sensor (10) located in the medical breathing circuit and a source of infrared radiation (13, 14) and an infrared detector (35) which are located remote from the sensor (10). Infrared radiation of a selected frequency spectrum is generated by the source (13, 14), propagated through an optical fibre (17) to the sensor (10) where it is pursed through gases in the breathing circuit and the remaining radiation is returned to the detector (35) through an optical fibre (27). The radiation incident on the detector (35) is a measure of the humidity of the gases in the breathing circuit.
Abstract:
An exhaust gas analyzing apparatus of a vehicle mounted type equipped with an analyzer that is configured to analyze components contained in exhaust gas, comprising: a sampling line that is an exhaust gas flow path extending from an exhaust gas introduction terminal that is configured to introduce the exhaust gas from the outside to the analyzer; a pressure reduction source that is configured to reduce a pressure in the sampling line to a predetermined pressure; and a temperature-regulating mechanism that is configured to regulate a temperature of the exhaust gas flowing in the sampling line to be at least a first temperature, wherein the first temperature is set to be a temperature equal to or higher than an evaporation temperature of moisture at the reduced predetermined pressure and lower than an evaporation temperature of moisture at one atmospheric pressure.
Abstract:
Method and apparatus for measuring a water concentration in ammonia, comprising using ammonia having a water concentration of 10 ppm or less as a reference gas, introducing the ammonia at a constant flow rate into a multi-reflection long optical path gas cell, and measuring infrared absorption intensity of water at at least one measurement wave number in the range of from 3,500 to 4,000 cm -1 , from 2,600 to 3,100 cm -1 , or from 1,900 to 2,400 cm -1 at which infrared absorptions of ammonia and water do not overlap. According to the present invention, analysis of water in a low concentration range of 10 ppm or less in ammonia gas and liquefied ammonia can be performed in a simple and convenient manner.
Abstract:
An optical fiber moisture sensor includes an optical fiber coated with a thin film of plasma polymerized hexamethyldisiloxane and ammonia, 1-2 µm thick. The light transmission characteristics of such a coated optical fiber changes as a function of moisture conditions in an environment to which the coating is exposed. Accordingly, the coated optical fiber may be utilized for sensing changes in moisture conditions in an environment by being placed in the environment, causing light to be transmitted through the fiber and detecting changes in the light transmitted through the fiber as a function of the moisture conditions in the environment.