ALIGNMENT-TOLERANT PHOTONIC SENSING SYSTEM
    4.
    发明公开

    公开(公告)号:EP4390375A1

    公开(公告)日:2024-06-26

    申请号:EP22215684.6

    申请日:2022-12-21

    申请人: Imec VZW

    摘要: A sensing system (100) comprising an illumination module (108), a cartridge (102) with photonic sensor chip (110; 200; 300), and a cartridge holder (104) for locking the cartridge into a sensing position. The photonic sensor chip comprises a plurality of grating couplers (202; 302) in a first areal portion (303) and a plurality of sensing sites (204), and is aligned relative to the illumination module up to permitted alignment tolerances when the cartridge is locked into the sensing position. A permitted amount of longitudinal misalignment (δx) and lateral misalignment (δy) define a peripheral portion (304) of the photonic sensor chip, surrounding the first areal portion. The illumination module is arranged to illuminate a second areal portion (301) of the photonic sensor chip, when the sensor cartridge is locked into the sensing position. The second areal portion fully includes the first areal portion and at least partially includes the peripheral portion.