公开(公告)号：EP2474211A1

公开(公告)日：2012-07-11

申请号：EP10747865.3

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： GALIAZZO, Marco ,  BACCINI, Andrea ,  CELLERE, Giorgio ,  DE SANTI, Luigi ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: H05K3/12 ,  H01L31/0224

CPC classification number: H05K1/0269 ,  H01L31/1876 ,  H05K3/12 ,  H05K2201/0969 ,  H05K2201/09727 ,  H05K2201/09918 ,  H05K2203/1476 ,  H05K2203/166 ,  H05K2203/173 ,  Y02E10/50 ,  Y02P70/521

Abstract: A method for centering a print track, in which by means of at least a printing station at least a first print track and at least a second print track are deposited on a print substrate according to a determinate orientation, comprises a first step, in which at least a first print track and at least a marker element are deposited on the support in correspondence with a portion of said substrate on which at least a second print track is able to be deposited and a second step, in which at least a second print track is deposited on said substrate, and in which at least a second print track provides at least a centering interruption conformed in a manner coordinated with said marker element, which centering interruption is positioned and centered with respect to said marker element to define the positioning and centering of said second print track with respect to said first print track.

公开(公告)号：EP2474212A1

公开(公告)日：2012-07-11

申请号：EP10751646.0

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： DE SANTI, Luigi ,  BACCINI, Andrea ,  CELLERE, Giorgio ,  GALIAZZO, Marco ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: H05K3/12 ,  H01L31/0224

CPC classification number: H01L21/67736 ,  B41P2215/11 ,  H01L21/681 ,  H01L31/1876 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/1216 ,  H05K3/1241 ,  H05K2203/163 ,  Y02E10/50 ,  Y02P70/521

Abstract: A method of detecting the alignment of a substrate during a sequence of printing steps, comprises detecting in a detection unit a position of at least one printing track forming a pattern printed onto a surface of the substrate in a first printing station, determining a reference point in at least a portion of said printing track, comparing in a detection unit the actual position of said reference point with an expected or previously detected position of said reference point, determining an offset between the actual position and the expected or previously detected position of said reference point, adjusting the reciprocal position between the printing head of a second printing station and the substrate for to account for the determined offset and printing a second pattern onto the first pattern.

公开(公告)号：EP2474028A1

公开(公告)日：2012-07-11

申请号：EP10747869.5

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： BACCINI, Andrea ,  CELLERE, Giorgio ,  DE SANTI, Luigi ,  GALIAZZO, Marco ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: H01L21/68

CPC classification number: H01L21/67346 ,  H01L21/67736

Abstract: Housing device for positioning and moving a substrate, or wafer, comprising a base body and at least a support surface, made on the base body and on which the substrate is able to be disposed. The housing device comprises one or more elements of metal material physically associated with the base body and able to function both as a structural reinforcement for the mechanical attachment of the base body to an operating attachment plane, and also as a fiducial for the magnetic or electromagnetic positioning of the base body on a magnetic work plane.

公开(公告)号：EP2474212B1

公开(公告)日：2015-02-18

申请号：EP10751646.0

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： DE SANTI, Luigi ,  BACCINI, Andrea ,  CELLERE, Giorgio ,  GALIAZZO, Marco ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: H05K3/12 ,  H01L31/0224 ,  H01L21/677 ,  H01L31/18 ,  H01L21/68 ,  H05K1/02 ,  H05K3/00

CPC classification number: H01L21/67736 ,  B41P2215/11 ,  H01L21/681 ,  H01L31/1876 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/1216 ,  H05K3/1241 ,  H05K2203/163 ,  Y02E10/50 ,  Y02P70/521

公开(公告)号：EP2474208A1

公开(公告)日：2012-07-11

申请号：EP10747871.1

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： GALIAZZO, Marco ,  BACCINI, Andrea ,  CELLERE, Giorgio ,  DE SANTI, Luigi ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: H05K1/02 ,  H05K3/12 ,  H01L31/0224

CPC classification number: H05K3/12 ,  H01L31/022425 ,  H01L31/1876 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/245 ,  H05K2203/1476 ,  H05K2203/163 ,  Y02E10/50 ,  Y02P70/521

Abstract: Printing method to print one or more print tracks on a print support, or substrate, comprising two or more printing steps in each of which, by means of printing means, a layer of material is deposited on the print support according to a predetermined print profile. In each printing step, subsequent to the first, each layer of material is deposited at least partially on top of the layer of material printed in the preceding printing step, so that each layer of printed material has an identical print profile or different with respect to at least a layer of material underneath so as to achieve an area of contact equal to or different from at least an area previously printed, the material deposited in each printing step being equal to or different from the material deposited in at least one of the prints underneath.

公开(公告)号：EP2473356B1

公开(公告)日：2018-07-18

申请号：EP10747867.9

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： GALIAZZO, Marco ,  BACCINI, Andrea ,  CELLERE, Giorgio ,  DE SANTI, Luigi ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: H01L31/18 ,  B41M3/14 ,  B41M3/00 ,  H05K3/12

CPC classification number: H01L31/18 ,  B41M3/008 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/12 ,  H05K2203/1476 ,  H05K2203/163 ,  H05K2203/166

Abstract: A method for multi-layer printing on a support, comprising a first printing step performed in a printing station in a system, one or more subsequent printing steps that are performed in one or more subsequent printing stations in the system and a plurality of alignment steps performed in the system, wherein the alignment steps are used to effect the correct positioning of a material printed in a subsequent printing step. The method comprises, downstream of each printing step and upstream of each alignment step, a control step in which detection devices detect the position of a layer printed on a support and/or the position of the support in the system by use of a control unit that compares at least one of the positions detected with predefined positions and/or with the positions detected in the previous control step, and wherein the results of the comparison are used in the alignment step.

公开(公告)号：EP2474211B1

公开(公告)日：2014-03-05

申请号：EP10747865.3

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： GALIAZZO, Marco ,  BACCINI, Andrea ,  CELLERE, Giorgio ,  DE SANTI, Luigi ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: H01L31/18 ,  H05K1/02 ,  H05K3/12 ,  H01L31/0224

CPC classification number: H05K1/0269 ,  H01L31/1876 ,  H05K3/12 ,  H05K2201/0969 ,  H05K2201/09727 ,  H05K2201/09918 ,  H05K2203/1476 ,  H05K2203/166 ,  H05K2203/173 ,  Y02E10/50 ,  Y02P70/521

公开(公告)号：EP2473356A1

公开(公告)日：2012-07-11

申请号：EP10747867.9

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： GALIAZZO, Marco ,  BACCINI, Andrea ,  CELLERE, Giorgio ,  DE SANTI, Luigi ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: B41M3/14 ,  H05K3/12

CPC classification number: H01L31/18 ,  B41M3/008 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/12 ,  H05K2203/1476 ,  H05K2203/163 ,  H05K2203/166

Abstract: A method for multi-layer printing on a support, comprising a first printing step performed in a printing station in a system, one or more subsequent printing steps that are performed in one or more subsequent printing stations in the system and a plurality of alignment steps performed in the system, wherein the alignment steps are used to effect the correct positioning of a material printed in a subsequent printing step. The method comprises, downstream of each printing step and upstream of each alignment step, a control step in which detection devices detect the position of a layer printed on a support and/or the position of the support in the system by use of a control unit that compares at least one of the positions detected with predefined positions and/or with the positions detected in the previous control step, and wherein the results of the comparison are used in the alignment step.

公开(公告)号：EP2473352A1

公开(公告)日：2012-07-11

申请号：EP10747866.1

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： PASQUALIN, Gianfranco ,  BACCINI, Andrea ,  CELLERE, Giorgio ,  DE SANTI, Luigi ,  GALIAZZO, Marco ,  VERCESI, Tommaso

IPC: B41F15/42 ,  B41F15/44 ,  H02K41/035

CPC classification number: H02K41/0356 ,  B41F15/44 ,  H05K3/1233 ,  H05K2203/0139

Abstract: Blade (10) for the silk-screen printing of one or more print tracks on substrates (150) by means of a print material deposited on a print substrate (150) by means of a silk-screen printing net (50). The blade (10) comprises a print extremity (18) and a supporting structure able to support the print extremity (18). The supporting structure comprises a support frame (12) fixed to a slider (14) mobile with respect to the support frame (12), which slider positions the print extremity (18) at least with respect to the net (50) below. Actuation members are provided to determine the movement of the slider (14) with respect to the support frame (12). The actuation members comprise a linear actuator of the voice coil type.

公开(公告)号：EP2473351A1

公开(公告)日：2012-07-11

申请号：EP10747868.7

申请日：2010-09-02

Applicant: Applied Materials, Inc.

Inventor： BACCINI, Andrea ,  CELLERE, Giorgio ,  DE SANTI, Luigi ,  GALIAZZO, Marco ,  PASQUALIN, Gianfranco ,  VERCESI, Tommaso

IPC: B41F15/08 ,  B41F15/26 ,  H01L31/18 ,  H05K3/12

CPC classification number: H01L21/67225 ,  B41F15/0863 ,  B41F15/26 ,  B41F33/0081 ,  H01L21/67173 ,  H01L21/6723

Abstract: Apparatus for processing a substrate (150) comprising: - support means (131) to support the substrate (150); - input means (111) able to position the support means (131) in a first position; - inspection means (200) able to detect location and orientation data of the substrate (150) disposed on the support means (131) in the first position ("1", "3"); - at least a first processing head (102) able to perform, in a second position ("2", "4"), a first process; - at least a second processing head (202) able to perform, in a third position ("5"), a second process, different from the first process; - movement means (140) able to move the support means (131) at least from the first position ("1", '3") to the second position ("2", "4") and between the second position ("2' "4") and third position ("5"); the support means (131) and the at least one second processing head (202) are reciprocally configured so as to keep the substrate (150) on the same support means (131) during the second process also.

Abstract translation: 用于处理衬底（150）的设备，包括： - 支撑装置（131），用于支撑衬底（150）; - 输入装置（111），其能够将所述支撑装置（131）定位在第一位置; - 能够检测在第一位置（“1”，“3”）中设置在支撑装置（131）上的衬底（150）的位置和取向数据的检测装置（200） - 至少第一处理头（102），其能够在第二位置（“2”，“4”）中执行第一处理; - 至少第二处理头（202），其能够在第三位置（“5”）中执行与第一处理不同的第二处理; - 能够将支撑装置（131）至少从第一位置（“1”，“3”）移动到第二位置（“2”，“4”）并且在第二位置（“ 2'“4”）和第三位置（“5”）; 支撑装置（131）和至少一个第二处理头（202）被相互配置以便在第二处理期间也将衬底（150）保持在相同的支撑装置（131）上。