METHOD FOR ELECTROCONDUCTIVE PATTERN FORMATION
    5.
    发明公开
    METHOD FOR ELECTROCONDUCTIVE PATTERN FORMATION 有权
    VERFAHREN ZUR ERZEUGUNG ELEKTRISCH LEITENDER STRUKTUREN

    公开(公告)号:EP2247170A1

    公开(公告)日:2010-11-03

    申请号:EP09706110.5

    申请日:2009-01-22

    IPC分类号: H05K3/06 G03F7/004 G03F7/38

    摘要: A method for forming a conductor pattern comprising the steps of (a) forming a photo-crosslinkable resin layer on a substrate provided with a conductive layer on its surface, (b) treating the photo-crosslinkable resin layer with an alkali aqueous solution to render it thinner, (c) carrying out exposure for a circuit pattern, (d) developing and (e) etching, the steps included in this order, said alkali aqueous solution being an aqueous solution containing 5 to 20 mass% of an inorganic alkaline compound, or method for forming a conductor pattern comprising the steps of (a') forming a photo-crosslinkable resin layer on a substrate provide with a conductive layer on its surface and inside a hole thereof, (i) curing the photo-crosslinkable resin layer on the hole alone or on the hole and a surrounding area thereof, (b') treating the photo-crosslinkable resin layer in an uncured portion with an alkali aqueous solution to render it thinner, (c) carrying out exposure for a circuit pattern, (d) developing and (e) etching, these steps included in this order, said alkali aqueous solution being an aqueous solution containing 5 to 20 mass% of an inorganic alkaline compound.

    摘要翻译: 一种形成导体图案的方法,包括以下步骤:(a)在其表面上具有导电层的基底上形成光可交联树脂层,(b)用碱水溶液处理光交联树脂层, 更薄,(c)进行电路图案的曝光,(d)显影和(e)蚀刻,依次包括的步骤,所述碱性水溶液是含有5〜20质量%的无机碱性化合物的水溶液 或形成导体图案的方法,包括以下步骤:(a)在基材上形成光交联性树脂层,在其表面和内部的孔内提供导电层,(i)固化光交联性树脂层 在孔单独或孔上及其周围区域,(b')用碱性水溶液处理未固化部分中的光交联性树脂层使其变薄,(c)进行电路图案的曝光, (d)中 显影和(e)蚀刻,这些步骤包括在该顺序中,所述碱性水溶液是含有5〜20质量%的无机碱性化合物的水溶液。