摘要:
A circuit module includes a board, a boosting circuit, a processing unit and a plasma tube. The boosting circuit includes at least one conductive path including a power input portion electrically connecting with a power output portion and two power output terminals with which the plasma tube is electrically connecting. The processing unit is includes a frequency changing circuit electrically connected with the power input portion and the boosting circuit and being capable of transferring an input power having a first frequency from the power input portion to at least one output power having a second frequency and an output power having a third frequency which are transmitted to the boosting circuit, the first and second frequencies are different, and the second and third frequencies are different. An electronic device includes one said circuit module and a circuit board device electrically connected to the circuit module.
摘要:
The invention relates to a laser device comprising at least two laser units (10), which are stacked in layers, each laser unit being configured to emit a laser beam, and each laser unit comprising a plurality of resonator tubes (12) for a gas to be excited, the resonator tubes being in fluidic communication with each other and forming a common tubular space, connecting elements (20,21) for connecting adjacent resonator tubes, excitation means (70) for the resonator tubes for exciting the gas in the resonator tubes for generating a laser light, mirrors (22) arranged in the connecting elements for reflecting the laser light between the resonator tubes, and a partially reflecting output coupler (42) for coupling out a laser beam. The invention also relates to a method for marking an object.
摘要:
Gas discharge lasers comprise a discharge tube, main and auxiliary electrodes, resonator mirrors and an electrical excitation circuit, which generates light pulses in a sub-nanosecond range. Said lasers have a large application spectrum, for example in the form of an excitation or ionisation light source for different spectroscopy methods associated with an UV-microscope. The known gas discharge lasers are provided with different seals in the discharge tube area at a final assembly stage and are unable to be adjusted afterwards. The inventive maintenance-free gas discharge laser (GL) exhibits a performance of about 100 millions light pulses, the main electrodes (HE1, HE2) are mounted, for the accurate adjustment thereof, in deformable carrier baths (TW) and the resonator mirrors (RS) are mounted in deformable carrier baths (TR), wherein said baths are assembled by hard soldering (HL) in such a way that they are integrally jointed with partial metal layers (MB) on the discharge tube (ER). All ultra-high vacuum-suitable components are sintered in such a way that water is completely removed at a second water limit (355°C). The preferred production method consists in carrying out hard soldering, at greater than 900 °C, of the carrying components with the metal layers (MB) on the discharge tube (ER), in welding the resonator (RS) mirrors, in sintering at the second water limit and subsequently in carrying out the accurate adjustment.
摘要:
The present invention provides gas discharge laser systems capable of reliable long-term operation in a production line capacity at repetition rates in the range of 6,000 to 10,000 pulses per second. Preferred embodiments are configured as KrF, ArF and F2 lasers used in photolithography. Improvements include a suction fan (555) in the immediate vicinity of the anode (542) to increase gas flow. The intake of the fan (555) is between the anode (542) and the insulating spacer (544B).
摘要:
Disclosed is a gas laser utilizing radio frequency discharge excitation in the area of sonic or supersonic/subsonic transfer gas flow. The laser uses various types of gases and mixtures of gases as the active medium and provides for RF or UV pre-ionization of the gaseous medium before using radio frequency discharge excitation. The gas is supplied into a receiver (3a), and has downstream therefrom a supersonic nozzle (1) for acceleration of the active gaseous flow to high subsonic or supersonic speeds in order to provide intensive dynamic cooling of the active gas medium. The gas is excited using radio frequency discharge excitation in the critical area (1b) of the supersonic nozzle or downstream therefrom. The radio frequency discharge and excitation can also occur within the optical resonator region (23) which is located within the supersonic area of the nozzle. The present invention provides compact, efficient and super-powerful continuous, quasi-continuous and pulse laser systems with wavelengths from 2.03 mkm to 10.6 mkm with a high quality output beam. The present laser device may be utilized in scientific, commercial, aerospace and free space applications.
摘要:
Die vorliegende Erfindung betrifft einen Excimer-Laser mit einem Ladekreis umfassend eine Parallelschaltung eines Speicherkondensators (C B ) mit einer Serienschaltung aus einer Umschwinginduktivität (L B ), einer Ladeinduktivität (L L ) und einer Zündvorrichtung (Z) zum Zünden des Excimer-Lasers, wobei der Speicherkondensator (C B ) zwei Kontakte zum Anschließen einer Stromversorgung (U L ) aufweist, einem Peakingkondensator (C P ), der der Ladeinduktivität (L L ) parallelgeschaltet ist, einer Entladestrecke umfassend zwei sich gegenüberliegende Elektroden (E1, E2), die dem Peakingkondensator (C P ) parallelgeschaltet ist, und einer Ansteuervorrichtung zur Ansteuerung der Zündvorrichtung (Z), wobei die Zündvorrichtung (Z) als MOSFET-Array ausgebildet ist. Die Erfindung betrifft auch ein korrespondierendes Verfahren zum Betreiben eines derartigen Excimer-Lasers.