Piezoelectric / electrostrictive film type element

    公开(公告)号:JP5475272B2

    公开(公告)日:2014-04-16

    申请号:JP2008317328

    申请日:2008-12-12

    CPC classification number: H01L41/1876 H01L41/0973 H01L41/43

    Abstract: An actuator includes a first electrode disposed on the top surface of a ceramic substrate (for example, zirconium oxide), a piezoelectric/electrostrictive substance (30) disposed on the first electrode, and a second electrode disposed on the piezoelectric/electrostrictive substance, wherein the input of an electric power alters the volume of the piezoelectric/electrostrictive substance. The piezoelectric/electrostrictive substance contains a plurality of crystal grains (32,32a,32b) that have a wavy structure composed of wavy grain boundaries (31) including concave portions (33) and convex portions (34). The crystal grains contain ABO 3 as the main component. The A site is Pb, and the B site contains such an amount of M that M becomes excessive after the piezoelectric/electrostrictive substance is formed (wherein M is at least one element selected from Mg, Ni, and Zn). The crystal grains of the piezoelectric/electrostrictive substance are oriented in the electric field direction, independently of the orientation of the substrate.

    Honeycomb-type piezoelectric / electrostrictive element
    38.
    发明专利

    公开(公告)号:JP5288436B2

    公开(公告)日:2013-09-11

    申请号:JP2007273838

    申请日:2007-10-22

    Abstract: PROBLEM TO BE SOLVED: To provide a honeycomb type piezoelectric/electrostrictive element which is excellent in durability, suitable for making light in weight, and manufactured inexpensively. SOLUTION: The honeycomb type piezoelectric/electrostrictive element includes a honeycomb structure portion 1 having a partition wall 3 which divides and forms a plurality of cells 2 penetrating in an axial direction, and an electrode (internal electrode) 5 disposed on an inner wall face 4 of the cells 2 so that the electrode may cover the entire inner wall face 4 from an inside. The partition wall 3 is a piezoelectric/electrostrictive material, and the honeycomb structure portion 1 can be deformed by applying a voltage between the electrodes 5, 5 disposed at the adjacent cells 2, 2 holding the partition wall 3 therebetween. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种耐用性优异的蜂窝型压电/电致伸缩元件,其适用于重量轻,制造成本低廉。 解决方案:蜂窝型压电/电致伸缩元件包括蜂窝结构部分1,其具有分隔并形成沿轴向贯穿的多个电池单元2的分隔壁3和设置在内部的电极(内部电极)5 电池2的壁面4,使得电极可以从内部覆盖整个内壁面4。 分隔壁3是压电/电致伸缩材料,并且蜂窝结构部分1可以通过在设置在其间分隔壁3的相邻单元2,2处的电极5,5之间施加电压而变形。 版权所有(C)2008,JPO&INPIT

    The method of manufacturing the crystal oriented ceramics

    公开(公告)号:JP5011066B2

    公开(公告)日:2012-08-29

    申请号:JP2007283186

    申请日:2007-10-31

    Abstract: PROBLEM TO BE SOLVED: To provide a method for producing a crystal-oriented ceramic whereby crystal orientation can be increased through an easier method. SOLUTION: The method for producing the crystal-oriented ceramic comprises the steps of: forming a first sheet 21 with a thickness of ≤10 μm containing a first inorganic material in which grain growth occurs at a first temperature or higher and a second sheet 22 containing a second inorganic material in which grain growth occurs at a second temperature higher than the first temperature; laminating once or more the first and second sheets to form a laminated body 20; firing the laminated body 20 at a temperature equal to or higher than the first temperature and lower than the second temperature to grain grow a first inorganic material, at this time, since the thickness of the first sheet 21 is ≤10 μm, the grain growth in the first inorganic material is more promoted along its plane of contact between the second sheet 22; and firing the laminated body at a temperature equal to or higher than the second temperature to grain grow the second inorganic material contained in the second sheet 22, at this time, grain growth in the second inorganic material occurs along the orientation of grains in the first inorganic material in which grain growth occurred along the contact plane. Overall grain growth thus occurs in a prescribed direction. COPYRIGHT: (C)2009,JPO&INPIT

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