Detection method of the stress fade layer

    公开(公告)号:JP5486905B2

    公开(公告)日:2014-05-07

    申请号:JP2009261626

    申请日:2009-11-17

    Abstract: PROBLEM TO BE SOLVED: To provide a nondestructive inspection that can make simple and quantitative evaluation on a single-crystalline work-affected layer. SOLUTION: An analysis method is provided for an X-ray locking curve obtainable from a single crystal for detecting a work-affected layer, namely, the method is provided for evaluating the work-affected layer based on a ratio of a skirt-part strength vs peak intensity. In this case, the position of the skirt part is that where the X-ray analysis strength attenuates up to the background level, or the position away from the peak position by ±5,000 seconds. COPYRIGHT: (C)2011,JPO&INPIT

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