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公开(公告)号：JP5302048B2
公开(公告)日：2013-10-02
申请号：JP2009046926
申请日：2009-02-27
Applicant: 株式会社神戸製鋼所
IPC: H01J27/26
Abstract: PROBLEM TO BE SOLVED: To provide a film removing device of a beam irradiation electrode capable of removing a film of a beam irradiation electrode while suppressing a damage in an ion source, an ion source equipped with this, and a member for removing a film of a beam irradiation electrode. SOLUTION: In this device, a voltage is impressed between a beam irradiation electrode 25 at a position opposing a tip end of the beam irradiation electrode 25, and thereby, an ion raw material gas or a liquid metal supplied to the tip end of the beam irradiation electrode 25 is field-ionized by a high electric field and the ionized ion raw material gas or the liquid metal is extracted as ion beams, and a secondary electron discharging part 51 which discharges secondary electrons after colliding with these ion beams is provided on a moving member 150, and this secondary electron discharging part 51 has a shape for shielding an advance of the ion beams, when being at the discharge position P2 at which the discharge of secondary electrons is possible while opposing to the tip end of the beam irradiation electrode 25. COPYRIGHT: (C)2010,JPO&INPIT
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公开(公告)号：JP4977558B2
公开(公告)日：2012-07-18
申请号：JP2007226967
申请日：2007-08-31
Applicant: 株式会社神戸製鋼所
IPC: H01J27/26 , H01J37/08 , H01J37/252 , H01J37/317
CPC classification number: H01J2237/0807
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公开(公告)号：JP5562278B2
公开(公告)日：2014-07-30
申请号：JP2011056782
申请日：2011-03-15
Applicant: 株式会社神戸製鋼所
CPC classification number: H04N5/2256 , G01B11/25 , G01M17/027
Abstract: In order to enable the shape of the surface of a tire including the shoulder sections thereof to be detected, a tire shape testing device comprises: a first linear light application means (10) for applying linear light to the tread section (8) of the tire; a second linear light application means (12) for applying linear light to the sidewall sections (7) of the tire; a third linear light application means (13) for applying linear light to the shoulder sections (9) and to regions outside the shoulder sections (9); and image capturing means (16) for capturing the images of the linear light applied by the first linear light application means (10), the second light application means, and the third linear light applications means (13) and reflected by the surface of the tire.
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公开(公告)号：JP5491947B2
公开(公告)日：2014-05-14
申请号：JP2010104474
申请日：2010-04-28
Applicant: 株式会社神戸製鋼所
IPC: G09F9/30 , C22C19/03 , C22C21/00 , C22C22/00 , C22C23/00 , C22C27/04 , C22C28/00 , C22C38/00 , G02F1/1368 , H01L21/28 , H01L21/3205 , H01L21/768 , H01L23/532 , H01L29/417 , H01L29/786 , H01L51/50
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Patent Agency Ranking
公开(公告)号：JP5371848B2
公开(公告)日：2013-12-18
申请号：JP2010068107
申请日：2010-03-24
Applicant: 株式会社神戸製鋼所
IPC: G01B11/24
CPC classification number: G01B11/0608 , G01M17/027 , G01N21/95 , G06T7/001 , G06T2207/30164
Abstract: Boundary lines which are contours of uneven marks are detected in a sample original image which is a two-dimensional image of the sidewall surface of a sample tyre, and a mask image showing the position of the boundary lines is generated. Thereupon, a height offset image which shows a height of the uneven marks is generated by, in use of a plurality of discrete height threshold values, classifying the height of regions in the sample original image which remain after excluding regions corresponding to the positions of the boundary lines shown in the mask image. An unevenness-excluded image is generated by excluding the uneven marks from an inspection image, which is a two-dimensional image of a sidewall surface of a tyre under inspection, by subtracting the height offset image from the inspection image. A shape defect in the sidewall surface of the tyre under inspection is inspected on the basis of the unevenness-excluded image.
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公开(公告)号：JP5341562B2
公开(公告)日：2013-11-13
申请号：JP2009050671
申请日：2009-03-04
Applicant: 株式会社神戸製鋼所
Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing an ion source that facilitates positioning an field ionization electrode toward the opening hole periphery of a vessel, and to provide an ion source manufactured by the method. SOLUTION: The method of manufacturing the ion source includes a step of preparing a field ionization electrode 23 with a sacrifice layer 60, a step of positioning the electrode 23 with the sacrifice layer 60 attached to a vessel 20, a step of fixing the electrode 23 to the vessel 20, and a step of removing the sacrifice layer 60 from the electrode 23, wherein the sacrifice layer 60 is composed of a protection layer 62 and an outer layer 64, the protection layer 62 is made of a silicon oxide, the outer layer 64 is made of a material capable of being removed by a means having less influence on a micro opening hole periphery 21r than a means removing the protection layer 62 with a hydrofluoric acid and/or an ammonium fluoride aqueous solution, and in the step of removing the layer, the outer layer 64 and the protection layer 62 are removed in order. COPYRIGHT: (C)2010,JPO&INPIT
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公开(公告)号：JP5180927B2
公开(公告)日：2013-04-10
申请号：JP2009181181
申请日：2009-08-04
Applicant: 株式会社神戸製鋼所
IPC: H01L23/36
CPC classification number: H01L2924/0002 , H01L2924/00
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