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36 条记录 (耗时 0.019 秒)

    Fit arrangement in spectrum analysis
    3.
    发明专利
    Fit arrangement in spectrum analysis 审中-公开

    公开(公告)号：JP2011527006A

    公开(公告)日：2011-10-20

    申请号：JP2011516220

    申请日：2009-06-10

    申请人： センセエアー アーベー

    发明人： ゲラン エヴァルト マーチン、ハンス

    IPC分类号： G01J3/36 ,  G01J3/26 ,  G01N21/35

    CPC分类号： G01N21/3504 ,  G01J3/02 ,  G01J3/021 ,  G01J3/26 ,  G01J3/427 ,  G01J2003/1226 ,  G01J2003/1243 ,  H01L2224/48091 ,  H01L2924/00014

    摘要： An arrangement adapted for a spectral analysis, having a light transmitting means, a delimited space in the form of a cavity serving as a measuring cell and defining an optical measuring distance, a light sensing means for detecting radiation passing said optical measuring distance from said light transmitting means, and a unit, connected at least to said light sensing means and performing the spectral analysis. Beams of radiation from the light transmitting means are made to pass through an optical band-pass filter at different angles of incidence. The filter is structured so as to pass a wavelength in dependence of the angle of incidence. A first chosen wavelength component is separated from a second wavelength component, each being received in its opto-electric means. Said unit is adapted for detecting and calculating an occurring radiation intensity for each such wavelength component.

    Surface profile measuring device and exposure device
    4.
    发明专利
    Surface profile measuring device and exposure device 有权
    表面型材测量装置和曝光装置

    公开(公告)号：JP2009276269A

    公开(公告)日：2009-11-26

    申请号：JP2008129231

    申请日：2008-05-16

    申请人： Canon Inc ,  キヤノン株式会社

    发明人： CHITOKU KOICHI ,  MATSUMOTO TAKAHIRO ,  OISHI SATORU ,  INE HIDEKI

    IPC分类号： G01B11/24 ,  G01B9/02 ,  G01B21/30 ,  G01Q20/02 ,  H01L21/027

    CPC分类号： G03B27/54 ,  G01B11/24 ,  G01J3/45 ,  G01J2003/1213 ,  G01J2003/1226 ,  G03F9/7003 ,  G03F9/7015 ,  G03F9/7026 ,  G03F9/7088

    摘要： PROBLEM TO BE SOLVED: To provide a surface profile measuring device for highly accurately measuring the surface profile of an object to be measured in a simple configuration, and to provide an exposure device. SOLUTION: The surface profile measuring device makes white color light from a light source incident on a substrate and a reference face at an incident angle of 80 degrees or more by using a prism having a moth eye shaped reflection prevention part to obtain white color interference light. The device decomposes the white color interference light into interference light due to a plurality of single lights by using an optical filter enabling wavelength selection. The device performs fast Fourier transform for a plurality of the interference lights to obtain power spectrum distribution and uses peak position information of spectra to measure the surface profile of the substrate. COPYRIGHT: (C)2010,JPO&INPIT

    摘要翻译： 要解决的问题：提供一种用于以简单的配置高精度地测量被测量物体的表面轮廓并提供曝光装置的表面轮廓测量装置。 解决方案：表面轮廓测量装置通过使用具有蛾眼反射防止部分的棱镜，从入射到基板上的光源和参考面以80度或更大的入射角使得白色光获得白色 颜色干扰光。 该装置通过使用能够进行波长选择的光学滤波器，将白色干涉光分解为多根单一光的干涉光。 该装置对多个干涉光进行快速傅里叶变换以获得功率谱分布，并使用光谱的峰值位置信息来测量衬底的表面轮廓。 版权所有（C）2010，JPO＆INPIT

    Spectrum image acquisition device
    7.
    发明专利
    Spectrum image acquisition device 有权
    光谱图像采集装置

    公开(公告)号：JP2013072771A

    公开(公告)日：2013-04-22

    申请号：JP2011212478

    申请日：2011-09-28

    申请人： Topcon Corp ,  株式会社トプコン

    发明人： OTOMO FUMIO ,  MOMIUCHI MASAYUKI ,  OSARAGI KAZUKI ,  OTANI HITOSHI

    IPC分类号： G01J3/28 ,  G02B5/20

    CPC分类号： H04N5/332 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/2823 ,  G01J3/32 ,  G01J2003/1226 ,  G02B26/008 ,  H04N9/045

    摘要： PROBLEM TO BE SOLVED: To provide a spectrum image acquisition device that acquires a spectrum image within a predetermined wavelength region with a simple configuration.SOLUTION: A spectrum image acquisition device includes: first optical systems 47 and 48 that include an objective lens; a light beam selecting member 55 that selectively transmits a part of a light beam that has passed through the first optical systems; an optical member 58 that is arranged such that the light beam selecting member is placed at an object-side focal position or substantially at an object-side focal position, has an interference film formed thereon, and selects a wavelength region of the light beam that transmits the light beam selecting member in accordance with the position of the light beam selecting member; a second optical system 49 that guides a light beam to the optical member; and an image pick-up device 52 that receives light in the wavelength region selected by the optical member.

    摘要翻译： 解决的问题：提供以简单的结构获取预定波长区域内的光谱图像的光谱图像采集装置。 解决方案：光谱图像采集装置包括：包括物镜的第一光学系统47和48; 光束选择构件55，其选择性地透射已经通过第一光学系统的光束的一部分; 将光束选择部件设置在物体侧焦点位置或大致位于物体侧焦点位置的光学部件58具有形成在其上的干涉膜，并且选择光束的波长区域， 根据光束选择部件的位置传输光束选择部件; 将光束引导到光学构件的第二光学系统49; 以及摄像装置52，其接收由光学构件选择的波长区域中的光。 版权所有（C）2013，JPO＆INPIT

    Spectroscopic sensor device and electronic apparatus
    9.
    发明专利
    Spectroscopic sensor device and electronic apparatus 有权
    光谱传感器和电子设备

    公开(公告)号：JP2011185634A

    公开(公告)日：2011-09-22

    申请号：JP2010048848

    申请日：2010-03-05

    申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

    发明人： UEMATSU AKIRA ,  SATO YOICHI ,  KOMATSU AKIRA ,  YANO KUNIHIKO

    IPC分类号： G01J3/36 ,  G01J3/26 ,  G01N21/27 ,  H01L27/146

    CPC分类号： G01N21/31 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0278 ,  G01J3/28 ,  G01J3/36 ,  G01J3/51 ,  G01J2003/1226 ,  G02B5/285 ,  G02B7/006 ,  H01L27/1443 ,  H01L27/14625

    摘要： PROBLEM TO BE SOLVED: To provide a spectroscopic sensor, along with an electronic apparatus or the like, capable of being miniaturized. SOLUTION: A spectroscopic sensor device includes a light source 110, and a spectroscopic sensor 100 upon which light acquired by irradiating an observation object with light from the light source 110 is incident. The spectroscopic sensor 100 includes a plurality of optical bandpass filters 61-64 whose transmittable wavelength are different, and a plurality of photosensors 31-34. The first optical bandpass filter 61 has a wavelength characteristic capable of transmitting a first specific wavelength, and the second optical bandpass filter 62 has a wavelength characteristic capable of transmitting a second specific wavelength different from the first specific wavelength. The first photosensor 31 senses light of the first specific wavelength transmitted through the first optical bandpass filter, and the second photosensor senses light of the second specific wavelength transmitted through the second optical bandpass filter. COPYRIGHT: (C)2011,JPO&INPIT

    摘要翻译： 要解决的问题：提供能够小型化的光谱传感器以及电子设备等。 解决方案：光谱传感器装置包括光源110和光谱传感器100，在该光谱传感器100上，通过用来自光源110的光照射观察对象而获取的光。 光谱传感器100包括可透射波长不同的多个光学带通滤波器61-64，以及多个光电传感器31-34。 第一光带通滤波器61具有能够发射第一特定波长的波长特性，第二光带通滤波器62具有能够发射与第一特定波长不同的第二特定波长的波长特性。 第一光传感器31感测通过第一光学带通滤波器传输的第一特定波长的光，并且第二光传感器感测通过第二光学带通滤波器传输的第二特定波长的光。 版权所有（C）2011，JPO＆INPIT

    Spectroscopic device
    10.
    发明专利
    Spectroscopic device 有权
    光谱仪器

    公开(公告)号：JP2011149799A

    公开(公告)日：2011-08-04

    申请号：JP2010011012

    申请日：2010-01-21

    申请人： Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

    发明人： FUKUYO FUMITSUGU ,  YONEZAWA MICHIHARU

    IPC分类号： G01J3/26 ,  G01N21/64

    CPC分类号： G02B26/007 ,  G01J3/0235 ,  G01J3/12 ,  G01J3/32 ,  G01J2003/1226 ,  G01J2003/1243 ,  G01N21/64 ,  G01N2021/6419 ,  G01N2021/6463 ,  G01N2021/6471 ,  G02B5/28

    摘要： PROBLEM TO BE SOLVED: To easily broaden the variable range of a selected wavelength without enlarging the size of a device. SOLUTION: The spectroscopic device 1 includes: four band pass filters 11a-11d through which light L2 from a light source 3 is selectively transmitted in a wavelength range in accordance with an incidence angle of the light L2; and a flat rotary table 10 having a main face 10a on which the band pass filters 11a-11d are erected and are rotatable around a rotation center C 1 along the main face 10a. The four band pass filters 11a-11d are disposed so that light incidence faces 12 or light exit faces 13 are inclined relative to lines connecting the rotation center C 1 on the main face 10a of the rotary table 10 and center points 15a-15d of the band pass filters 11a-11d on the main face 10a, respectively. COPYRIGHT: (C)2011,JPO&INPIT

    摘要翻译： 要解决的问题：为了容易地扩大选定波长的可变范围，而不扩大设备的尺寸。 解决方案：分光装置1包括：四个带通滤波器11a-11d，来自光源3的光L2根据光L2的入射角在波长范围内有选择地透射; 以及平面旋转台10，其具有主面10a，带通滤波器11a-11d竖立在该主面10a上，并且沿着主面10a围绕旋转中心C 1可旋转。 四个带通滤波器11a-11d被布置成使得光入射面12或光出射面13相对于连接旋转台10的主面10a上的旋转中心C 1 的线倾斜，以及 分别在主面10a上的带通滤波器11a-11d的中心点15a-15d。 版权所有（C）2011，JPO＆INPIT