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    관통 요소의 마스크-에칭을 위한 방법
    91.
    发明公开
    관통 요소의 마스크-에칭을 위한 방법 有权
    一种刺激元件的掩蔽方法

    公开(公告)号：KR1020140051449A

    公开(公告)日：2014-04-30

    申请号：KR1020147007538

    申请日：2012-09-19

    申请人： 에프. 호프만-라 로슈 아게

    发明人： 치펠마르첼리누스 ,  로페즈므라스앙겔

    IPC分类号： A61B5/15 ,  A61B5/151 ,  G01N1/10 ,  B01L3/00

    CPC分类号： A61B5/150282 ,  A61B5/1411 ,  A61B5/150022 ,  A61B5/150358 ,  A61B5/150419 ,  A61B5/150519 ,  A61B5/157 ,  B01D67/0034 ,  B01D67/0058 ,  B44C1/227 ,  C23F1/02

    摘要： 본원은, 세장형 샤프트 (16), 원위방향으로 돌출된 팁 (18), 근위 유지부 (20), 및 체액을 수집하고 샤프트 (16) 를 따라서 팁 (18) 의 영역까지 연장되는 측방향으로 개방된 수집 채널 (22) 을 갖는 관통 요소 (14) 의 마스크-에칭을 위한 방법에 관한 것이다. 이 목적을 위해서, 양면 에칭 마스크 (10) 가 기재 (12) 의 2 개의 측부들에 적용되고, 에칭제의 작용하에서, 관통 요소 (14) 는 화학 블랭킹에 의해서 만들어진 부분으로서 형성되고, 에칭 마스크 (10) 의 채널 측부 (28) 는 수집 채널 (22) 의 일측성 (unilateral) 에칭을 위한 채널 에칭 슬릿 (38) 을 구비한다. 채널 에칭 슬릿 (38) 의 근위 및/또는 원위 단부 (40, 60) 는 슬릿의 단부를 향해서 테이퍼링되도록 구성된다.

    摘要翻译： 公开了一种用于穿孔元件的掩模蚀刻的方法，所述穿孔元件具有细长轴，远端突出尖端，近侧保持部分和侧向开放的收集通道，该收集通道收集体液并且沿轴延伸至该区域 尖端，其中双面蚀刻掩模的一侧分别施加到基板的两侧，并且在蚀刻剂的作用下，穿孔元件形成为通过化学消隐制成的部分，其中通道侧为 蚀刻掩模设置有用于单向蚀刻收集通道的沟道蚀刻狭缝。

    레이저를 이용한 양각 금형 제작 방법 및 장치
    92.
    发明公开
    레이저를 이용한 양각 금형 제작 방법 및 장치 无效
    使用激光工艺切割板模的制造方法及其设备

    公开(公告)号：KR1020130081598A

    公开(公告)日：2013-07-17

    申请号：KR1020120002666

    申请日：2012-01-09

    申请人： 한국기계연구원

    发明人： 서정 ,  강희신

    IPC分类号： C23F1/02 ,  B23K26/00

    CPC分类号： C23F1/02 ,  C08F2/50 ,  C23F1/08

    摘要： PURPOSE: A manufacturing method of an embossable mold using laser and an apparatus thereof are provided to facilitate manufacture by embossing on a mold by using laser, and to implement the precise embossing pattern. CONSTITUTION: A manufacturing method of an embossable mold using laser includes a laser scanning unit (100), a stage unit (200), and a beam control unit (300). The laser scanning unit scans the laser beam. The stage unit comprises a stage and a driving portion. A mold (40) may be fixed on the top of the stage. The driving portion is driven by a rail and a motor that are capable of rotating the stage in the X-axis or the Y-axis direction. The beam control unit controls the laser beam, which is scanned from the laser scanning unit, according to the pattern layout.

    摘要翻译： 目的：提供使用激光的可压纹模具的制造方法及其装置，以便于通过使用激光在模具上压花来制造，并且实现精确的压花图案。 构成：使用激光的可压纹模具的制造方法包括激光扫描单元（100），台单元（200）和光束控制单元（300）。 激光扫描单元扫描激光束。 舞台单元包括舞台和驱动部分。 模具（40）可以固定在工作台的顶部。 驱动部分由轨道和电动机驱动，该轨道和电动机能够在X轴或Y轴方向上旋转平台。 光束控制单元根据图案布局控制从激光扫描单元扫描的激光束。

    마스킹을 이용한 항공기용 부품 제조 방법
    93.
    发明公开
    마스킹을 이용한 항공기용 부품 제조 방법 无效
    使用掩蔽的飞机零件的制造方法

    公开(公告)号：KR1020130062002A

    公开(公告)日：2013-06-12

    申请号：KR1020110128371

    申请日：2011-12-02

    申请人： 주식회사 코텍

    发明人： 박상언 ,  강성민

    IPC分类号： C23F1/02 ,  B05B15/04 ,  B05D1/32

    CPC分类号： C23F1/02 ,  B05D1/32

    摘要： PURPOSE: A method for manufacturing components of an airplane using of masking is provided to previously prevent a surface processed object from corrosion due to medicine or deformation due to heat and to form a masking coating layer with constant thickness. CONSTITUTION: A method for manufacturing components of an airplane using of masking comprises the following steps: a step of setting variable of a masking coating device for coating masking solution and a surface processed object for the airplane(S100); a step of coating the masking solution to the surface processed object by operating the masking coating device(S200); a step of forming a masking coating layer by hardening the masking solution(S300); a step of exposing the surface of the surface processed object by controlling a part of the masking coating layer(S400); a step of surface-processing the exposed part in which a mask is removed from the surface processed object(S500); and a step of completing the component for the airplane by removing the masking coating layer remaining on the surface of the surface processed object(S600). [Reference numerals] (S100) Preparing step; (S200) Liquid coating step; (S300) Liquid hardening step; (S400) Mask cutting step; (S500) Etching step; (S600) Mask removing step

    摘要翻译： 目的：提供一种用于制造使用掩模的飞机部件的方法，以预先防止表面处理物体由于药物引起的腐蚀或由于热而变形，并形成具有恒定厚度的掩模涂层。 构成：使用掩模制造飞机的部件的方法包括以下步骤：设置用于涂覆掩蔽溶液的掩蔽涂覆装置的变量和用于飞机的表面处理物体的步骤（S100）; 通过操作掩模涂布装置将掩模溶液涂覆到表面处理物体的步骤（S200）; 通过硬化掩蔽溶液形成掩模涂层的步骤（S300）; 通过控制一部分掩模涂层来暴露表面处理物体的表面的步骤（S400）; 表面处理从表面处理对象去除掩模的露出部分的步骤（S500）; 以及通过去除残留在表面处理物体的表面上的掩模涂层来完成飞机的部件的步骤（S600）。 （附图标记）（S100）准备步骤; （S200）液体涂布步骤; （S300）液体硬化步骤; （S400）面罩切割步骤; （S500）蚀刻步骤; （S600）掩模去除步骤

    알칸계 혼합가스를 이용한 자성박막의 식각방법
    97.
    发明公开
    알칸계 혼합가스를 이용한 자성박막의 식각방법 有权
    使用烷烃混合气体蚀刻磁薄膜的方法

    公开(公告)号：KR1020130019308A

    公开(公告)日：2013-02-26

    申请号：KR1020110081384

    申请日：2011-08-16

    申请人： 인하대학교 산학협력단

    发明人： 정지원 ,  김은호 ,  이태영

    IPC分类号： C23F1/04 ,  H01L21/306 ,  H01L21/3065

    CPC分类号： H01L21/3065 ,  C23F1/02 ,  C23F1/12 ,  H01F10/10

    摘要： PURPOSE: An etching method of a magnetic thin film using alkane mixing gas is provided to be applied to all devices and instruments where a magnetic thin film is used by providing a fast etching rate and an etching profile, and the method is especially effective in forming micro patterns. CONSTITUTION: An etching method of a magnetic thin film includes the following steps: masking a magnetic thin film after patterning with a mask; making mixing gas composed of 40-80 volume% of alkane gas, 15-50 volume% of inactive gas, and 5-10 volume% of oxygen gas as plasma; etching the masked magnetic thin film by using the plasma. The etching method of a magnetic thin film comprises the following steps: masking the magnetic thin film by patterning the magnetic thin film with a mask; making mixing gas composed of 20-80 volume% of alkane gas, 15-65 volume% of inactive gas, and 5-15 volume% of oxygen gas as plasma; etching the masked magnetic thin film by using the plasma. The magnetic thin film is one of a group composed of CoFe, CoFeB, CoFeSiB, CoFeTb, CoZrB, CoZrTb, CoPt, NiFeCo, NiFeCr and NiFe.

    摘要翻译： 目的：提供使用烷烃混合气体的磁性薄膜的蚀刻方法，通过提供快速蚀刻速率和蚀刻轮廓，将其应用于所有使用磁性薄膜的器件和仪器，该方法在成型中特别有效 微图案。 构成：磁性薄膜的蚀刻方法包括以下步骤：用掩模图案化之后掩蔽磁性薄膜; 由40-80体积％的烷烃气体，15-50体积％的惰性气体和5-10体积％的氧气作为等离子体组成的混合气体; 通过使用等离子体蚀刻被掩蔽的磁性薄膜。 磁性薄膜的蚀刻方法包括以下步骤：通过用掩模图案化磁性薄膜来掩蔽磁性薄膜; 由20-80体积％的烷烃气体，15-65体积％的惰性气体和5-15体积％的氧气作为等离子体制成混合气体; 通过使用等离子体蚀刻被掩蔽的磁性薄膜。 磁性薄膜是由CoFe，CoFeB，CoFeSiB，CoFeTb，CoZrB，CoZrTb，CoPt，NiFeCo，NiFeCr和NiFe组成的组之一。

    관성센서 및 그 제조방법
    98.
    发明公开
    관성센서 및 그 제조방법 无效
    惯性传感器及其制造方法

    公开(公告)号：KR1020130016607A

    公开(公告)日：2013-02-18

    申请号：KR1020110078638

    申请日：2011-08-08

    申请人： 삼성전기주식회사

    发明人： 김종운 ,  이성준 ,  정원규 ,  최민규 ,  박흥우

    IPC分类号： G01C19/56 ,  G01P15/02 ,  H01L29/84

    CPC分类号： G01C25/00 ,  B32B37/0076 ,  B32B37/02 ,  B32B37/12 ,  B32B37/18 ,  B32B38/10 ,  B32B2457/00 ,  C23F1/02 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/135 ,  G01P2015/084 ,  Y10T156/1064

    摘要： PURPOSE: An inertia sensor and a method for manufacturing the same are provided to put an adhesive into a first cavity in the lower part of a lower cap when adhering a post and the lower cap, thereby preventing the adhesive from permeating into the post. CONSTITUTION: An inertia sensor(100) comprises a membrane(110), a mass(120), a post(130), and a lower cap(150). The membrane is formed into a plate shape. The mass is arranged in the lower part of a central portion(113) of the membrane. The post is arranged in the lower part of an edge(115) of the membrane in order to support the membrane. An edge of the lower cap is adhered to the downside of the post with an adhesive(140) in order to cover the mass and the post. A first cavity(155) where the adhesive is put into is formed on the edge of the lower cap.

    摘要翻译： 目的：提供一种惯性传感器及其制造方法，当粘接柱和下盖时，将粘合剂放入下盖的下部的第一空腔中，从而防止粘合剂渗入柱中。 构成：惯性传感器（100）包括膜（110），质量块（120），柱（130）和下盖（150）。 膜形成为板状。 质量体布置在膜的中心部分（113）的下部。 柱被布置在膜的边缘（115）的下部，以便支撑膜。 下盖的边缘用粘合剂（140）粘附到柱的下侧以便覆盖质量块和柱。 在下盖的边缘上形成有粘合剂被放入的第一空腔（155）。