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公开(公告)号:TWI462151B
公开(公告)日:2014-11-21
申请号:TW100143260
申请日:2011-11-25
发明人: 小柏俊典 , OGASHIWA, TOSHINORI , 栗田昌昭 , KURITA, MASAAKI , 西森尚 , NISHIMORI, TAKASHI , 兼平幸男 , KANEHIRA, YUKIO
IPC分类号: H01L21/08 , H01L21/3213
CPC分类号: H01L21/4885 , B22F7/08 , B23K1/0016 , B23K35/0244 , B23K35/3006 , B23K35/3013 , B23K35/322 , B23K2201/40 , B81C1/00095 , B81C1/00373 , B81C2201/0188 , B81C2201/0194 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/94 , H01L2224/03003 , H01L2224/031 , H01L2224/0312 , H01L2224/03334 , H01L2224/0401 , H01L2224/0508 , H01L2224/05082 , H01L2224/05083 , H01L2224/05139 , H01L2224/05144 , H01L2224/05166 , H01L2224/05169 , H01L2224/05639 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05669 , H01L2224/0567 , H01L2224/05671 , H01L2224/05673 , H01L2224/05676 , H01L2224/05678 , H01L2224/05681 , H01L2224/05684 , H01L2224/11003 , H01L2224/111 , H01L2224/1112 , H01L2224/11334 , H01L2224/13082 , H01L2224/13083 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13181 , H01L2224/13184 , H01L2224/94 , H01L2924/01006 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01044 , H01L2924/01045 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/1461 , H01L2924/15788 , H01L2224/05644 , H01L2924/00014 , H01L2924/01046 , H01L2924/00012 , H01L2924/00 , H01L2224/11
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公开(公告)号:TWI563885B
公开(公告)日:2016-12-21
申请号:TW101141732
申请日:2012-11-09
发明人: 小柏俊典 , OGASHIWA, TOSHINORI , 栗田昌昭 , KURITA, MASAAKI , 西森尚 , NISHIMORI, TAKASHI , 兼平幸男 , KANEHIRA, YUKIO
IPC分类号: H05K1/03
CPC分类号: H01L21/4814 , B22F7/08 , B23K35/007 , B23K35/0244 , B23K35/025 , B23K35/3006 , B23K35/3013 , B23K35/322 , B23K2035/008 , B23K2201/40 , B32B15/018 , C22C5/02 , C22C5/04 , C23C18/165 , C25D7/00 , H01L21/71 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/94 , H01L2224/03003 , H01L2224/031 , H01L2224/0312 , H01L2224/03334 , H01L2224/0401 , H01L2224/0508 , H01L2224/05082 , H01L2224/05083 , H01L2224/05139 , H01L2224/05144 , H01L2224/05166 , H01L2224/05169 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05669 , H01L2224/0567 , H01L2224/05671 , H01L2224/05673 , H01L2224/05676 , H01L2224/05678 , H01L2224/05681 , H01L2224/05684 , H01L2224/11003 , H01L2224/111 , H01L2224/1112 , H01L2224/11334 , H01L2224/11505 , H01L2224/13082 , H01L2224/13083 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13181 , H01L2224/13184 , H01L2224/94 , H01L2924/01006 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01044 , H01L2924/01045 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/1461 , H01L2924/15788 , H01L2924/181 , Y10T428/12056 , H01L2224/11 , H01L2924/00014 , H01L2924/00 , H01L2924/01046 , H01L2924/00012
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公开(公告)号:TW201340795A
公开(公告)日:2013-10-01
申请号:TW101141732
申请日:2012-11-09
发明人: 小柏俊典 , OGASHIWA, TOSHINORI , 栗田昌昭 , KURITA, MASAAKI , 西森尚 , NISHIMORI, TAKASHI , 兼平幸男 , KANEHIRA, YUKIO
IPC分类号: H05K1/03
CPC分类号: H01L21/4814 , B22F7/08 , B23K35/007 , B23K35/0244 , B23K35/025 , B23K35/3006 , B23K35/3013 , B23K35/322 , B23K2035/008 , B23K2201/40 , B32B15/018 , C22C5/02 , C22C5/04 , C23C18/165 , C25D7/00 , H01L21/71 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/94 , H01L2224/03003 , H01L2224/031 , H01L2224/0312 , H01L2224/03334 , H01L2224/0401 , H01L2224/0508 , H01L2224/05082 , H01L2224/05083 , H01L2224/05139 , H01L2224/05144 , H01L2224/05166 , H01L2224/05169 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05669 , H01L2224/0567 , H01L2224/05671 , H01L2224/05673 , H01L2224/05676 , H01L2224/05678 , H01L2224/05681 , H01L2224/05684 , H01L2224/11003 , H01L2224/111 , H01L2224/1112 , H01L2224/11334 , H01L2224/11505 , H01L2224/13082 , H01L2224/13083 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13181 , H01L2224/13184 , H01L2224/94 , H01L2924/01006 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01044 , H01L2924/01045 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/1461 , H01L2924/15788 , H01L2924/181 , Y10T428/12056 , H01L2224/11 , H01L2924/00014 , H01L2924/00 , H01L2924/01046 , H01L2924/00012
摘要: 本發明,係由基板、形成在前述基板上之至少一種的金屬配線素材、形成在前述金屬配線素材之表面上所形成之至少1層的被覆層、形成在前述基板與前述金屬配線素材之間之基底材金屬膜所形成之使前述金屬配線素材轉印於被轉印物所用之轉印基板,前述金屬配線素材,係將純度99.9重量%以上,平均粒徑0.01μm~1.0μm之金粉等金屬粉末燒結而成之成形體,前述被覆層,為金等既定之金屬或合金,係由與前述金屬配線素材不同之組成之金屬或合金來形成,且其合計厚度在1μm以下,前述基底金屬膜,係由金等既定的金屬或合金所形成之轉印基板。本發明之轉印基板,可降低被轉印物側之加熱溫度。
简体摘要: 本发明,系由基板、形成在前述基板上之至少一种的金属配线素材、形成在前述金属配线素材之表面上所形成之至少1层的被覆层、形成在前述基板与前述金属配线素材之间之基底材金属膜所形成之使前述金属配线素材转印于被转印物所用之转印基板,前述金属配线素材,系将纯度99.9重量%以上,平均粒径0.01μm~1.0μm之金粉等金属粉末烧结而成之成形体,前述被覆层,为金等既定之金属或合金,系由与前述金属配线素材不同之组成之金属或合金来形成,且其合计厚度在1μm以下,前述基底金属膜,系由金等既定的金属或合金所形成之转印基板。本发明之转印基板,可降低被转印物侧之加热温度。
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4.金屬配線形成用複製基板及藉由上述複製用基板的金屬配線形成方法 TRANSFER SUBSTRATE FOR FORMING METALLIC WIRING AND METHOD FOR FORMING METALLIC WIRING WITH THE USE OF THE TRANSFER SUBSTRATE 审中-公开
简体标题: 金属配线形成用复制基板及借由上述复制用基板的金属配线形成方法 TRANSFER SUBSTRATE FOR FORMING METALLIC WIRING AND METHOD FOR FORMING METALLIC WIRING WITH THE USE OF THE TRANSFER SUBSTRATE公开(公告)号:TW201246278A
公开(公告)日:2012-11-16
申请号:TW100143260
申请日:2011-11-25
申请人: 田中貴金屬工業股份有限公司
IPC分类号: H01L
CPC分类号: H01L21/4885 , B22F7/08 , B23K1/0016 , B23K35/0244 , B23K35/3006 , B23K35/3013 , B23K35/322 , B23K2201/40 , B81C1/00095 , B81C1/00373 , B81C2201/0188 , B81C2201/0194 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/94 , H01L2224/03003 , H01L2224/031 , H01L2224/0312 , H01L2224/03334 , H01L2224/0401 , H01L2224/0508 , H01L2224/05082 , H01L2224/05083 , H01L2224/05139 , H01L2224/05144 , H01L2224/05166 , H01L2224/05169 , H01L2224/05639 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05669 , H01L2224/0567 , H01L2224/05671 , H01L2224/05673 , H01L2224/05676 , H01L2224/05678 , H01L2224/05681 , H01L2224/05684 , H01L2224/11003 , H01L2224/111 , H01L2224/1112 , H01L2224/11334 , H01L2224/13082 , H01L2224/13083 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13181 , H01L2224/13184 , H01L2224/94 , H01L2924/01006 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01044 , H01L2924/01045 , H01L2924/01047 , H01L2924/01073 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/1461 , H01L2924/15788 , H01L2224/05644 , H01L2924/00014 , H01L2924/01046 , H01L2924/00012 , H01L2924/00 , H01L2224/11
摘要: 〔課題〕提供藉由複製法將金屬配線形成於被複製物之複製用基板,而可使被複製物側的加熱溫度較低,及金屬配線之形成方法。〔解決手段〕一種複製用基板,其係由基板;形成於上述基板上之至少一個金屬配線材料;形成於上述基板與上述金屬配線材料之間的底層金屬膜所構成,將上述金屬配線材料複製到複製物者,上述金屬配線材料,係燒結純度99.9重量%以上,平均粒徑為0.01μm~1.0μm之金粉等而成之成形體,上述底層金屬膜,係由金等金屬或合金等所組成的複製用基板。該複製用基板,即使被複製物的加熱溫度為80~300℃,亦可將金屬配線材料複製於被複製物。
简体摘要: 〔课题〕提供借由复制法将金属配线形成于被复制物之复制用基板,而可使被复制物侧的加热温度较低,及金属配线之形成方法。〔解决手段〕一种复制用基板,其系由基板;形成于上述基板上之至少一个金属配线材料;形成于上述基板与上述金属配线材料之间的底层金属膜所构成,将上述金属配线材料复制到复制物者,上述金属配线材料,系烧结纯度99.9重量%以上,平均粒径为0.01μm~1.0μm之金粉等而成之成形体,上述底层金属膜,系由金等金属或合金等所组成的复制用基板。该复制用基板,即使被复制物的加热温度为80~300℃,亦可将金属配线材料复制于被复制物。
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公开(公告)号:TW464994B
公开(公告)日:2001-11-21
申请号:TW089119301
申请日:2000-09-20
申请人: 羅沐股份有限公司
发明人: 上田茂幸
IPC分类号: H01L
CPC分类号: H01L24/03 , H01L24/10 , H01L24/13 , H01L24/45 , H01L2224/0401 , H01L2224/04073 , H01L2224/05639 , H01L2224/05644 , H01L2224/05669 , H01L2224/05678 , H01L2224/13 , H01L2224/13099 , H01L2224/13139 , H01L2224/13144 , H01L2224/13164 , H01L2224/13169 , H01L2224/16145 , H01L2224/45144 , H01L2224/48247 , H01L2224/48639 , H01L2224/48644 , H01L2224/48669 , H01L2224/73207 , H01L2924/01013 , H01L2924/01014 , H01L2924/01032 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/05042 , H01L2924/10253 , H01L2924/10329 , H01L2924/181 , H01L2924/00014 , H01L2924/00 , H01L2224/48678 , H01L2924/00012
摘要: 本發明提供一種可重疊接合於其他固體裝置表面的半導體晶片。該半導體晶片係包含:覆蓋內部配線之表面保護膜;使表面保護膜露出部分內部配線而形成之外部連接用焊墊;及由具有耐氧化性金屬材質形成在外部連接用焊墊上,供引線與外部端子電性連接之引線之引線連接部。而且,該半導體晶片最好包含:與其他固體裝置相連接之內部連接焊墊及在內部連接焊墊上所形成之凸點。
简体摘要: 本发明提供一种可重叠接合于其他固体设备表面的半导体芯片。该半导体芯片系包含:覆盖内部配线之表面保护膜;使表面保护膜露出部分内部配线而形成之外部连接用焊垫;及由具有耐氧化性金属材质形成在外部连接用焊垫上,供引线与外部端子电性连接之引线之引线连接部。而且,该半导体芯片最好包含:与其他固体设备相连接之内部连接焊垫及在内部连接焊垫上所形成之凸点。
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