公开(公告)号：US08502977B1

公开(公告)日：2013-08-06

申请号：US12791446

申请日：2010-06-01

Applicant: Ivan Maleev

Inventor： Ivan Maleev

IPC: G01J3/46

CPC classification number: G01N21/211 ,  G01N21/47

Abstract: A spectroscopic system may include: a spectroscopic scatterometer; an angular-resolved spectrometer; and a fiber bundle having a two-dimensional input surface and a one-dimensional output surface.

Abstract translation: 光谱系统可以包括：光谱散射仪; 角度分辨光谱仪; 以及具有二维输入面和一维输出面的纤维束。

公开(公告)号：US09279774B2

公开(公告)日：2016-03-08

申请号：US13544954

申请日：2012-07-09

Applicant: Anatoly Romanovsky ,  Ivan Maleev ,  Daniel Kavaldjiev ,  Yury Yuditsky ,  Dirk Woll ,  Stephen Biellak ,  Mehdi Vaez-Iravani ,  Guoheng Zhao

Inventor： Anatoly Romanovsky ,  Ivan Maleev ,  Daniel Kavaldjiev ,  Yury Yuditsky ,  Dirk Woll ,  Stephen Biellak ,  Mehdi Vaez-Iravani ,  Guoheng Zhao

IPC: G01N21/00 ,  G01N21/95 ,  G01N21/47 ,  G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/956

Abstract: Systems configured to inspect a wafer are provided. One system includes an illumination subsystem configured to simultaneously form multiple illumination areas on the wafer with substantially no illumination flux between each of the areas. The system also includes a scanning subsystem configured to scan the multiple illumination areas across the wafer. In addition, the system includes a collection subsystem configured to simultaneously and separately image light scattered from each of the areas onto two or more sensors. Characteristics of the two or more sensors are selected such that the scattered light is not imaged into gaps between the two or more sensors. The two or more sensors generate output responsive to the scattered light. The system further includes a computer subsystem configured to detect defects on the wafer using the output of the two or more sensors.

Abstract translation: 提供了配置用于检查晶片的系统。 一个系统包括照明子系统，该照明子系统配置成在晶片上同时形成多个照明区域，其中每个区域之间基本上没有照明通量。 该系统还包括扫描子系统，被配置为扫描晶片上的多个照明区域。 另外，该系统包括一个收集子系统，该收集子系统配置成同时并分别将从每个区域散射的光分别映射到两个或更多个传感器上。 选择两个或更多个传感器的特征，使得散射光不被成像到两个或更多个传感器之间的间隙中。 两个或多个传感器响应散射光产生输出。 该系统还包括被配置为使用两个或更多个传感器的输出来检测晶片上的缺陷的计算机子系统。

公开(公告)号：US09076639B2

公开(公告)日：2015-07-07

申请号：US13638124

申请日：2012-09-06

Applicant: Ivan Maleev

Inventor： Ivan Maleev

IPC: H01J40/06 ,  G01J1/44 ,  H01L27/146

CPC classification number: H01J40/06 ,  G01J1/44 ,  H01L27/146

Abstract: The present invention includes a transmissive-reflective photocathode including a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel, and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space.

Abstract translation: 本发明包括透射反射光电阴极，其包括被配置为经由膜的第一表面从照明源吸收光子的膜，所述膜还被配置为经由所述第一表面以反射模式发射光电子，所述膜还被配置为发射 光电子以透射模式经由第二表面，所述第一表面和所述第二表面基本上平行;以及膜支撑结构，其被配置为机械地固定所述膜，所述膜支撑结构进一步构造成在所述第一表面和所述第一表面之间提供至少第一通路 和自由空间以及第二表面和自由空间之间的第二路径。

公开(公告)号：US20130126705A1

公开(公告)日：2013-05-23

申请号：US13638124

申请日：2012-09-06

Applicant: Ivan Maleev

Inventor： Ivan Maleev

IPC: H01J40/06 ,  H01L27/146 ,  G01J1/44

CPC classification number: H01J40/06 ,  G01J1/44 ,  H01L27/146

Abstract: The present invention includes a transmissive-reflective photocathode including a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel, and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space.

Abstract translation: 本发明包括透射反射光电阴极，其包括被配置为经由膜的第一表面从照明源吸收光子的膜，所述膜还被配置为经由所述第一表面以反射模式发射光电子，所述膜还被配置为发射 光电子以透射模式经由第二表面，所述第一表面和所述第二表面基本上平行;以及膜支撑结构，其被配置为机械地固定所述膜，所述膜支撑结构进一步构造成在所述第一表面和所述第一表面之间提供至少第一通路 和自由空间以及第二表面和自由空间之间的第二路径。

公开(公告)号：US20130016346A1

公开(公告)日：2013-01-17

申请号：US13544954

申请日：2012-07-09

Applicant: Anatoly Romanovsky ,  Ivan Maleev ,  Daniel Kavaldjiev ,  Yury Yuditsky ,  Dirk Woll ,  Stephen Biellak

Inventor： Anatoly Romanovsky ,  Ivan Maleev ,  Daniel Kavaldjiev ,  Yury Yuditsky ,  Dirk Woll ,  Stephen Biellak

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/47 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/956

Abstract: Systems configured to inspect a wafer are provided.

Abstract translation: 提供了配置用于检查晶片的系统。