摘要:
An irradiation field limiting device includes a plurality of aperture leaves arranged in a thickness direction, a flexible linear member secured to a thick portion of the aperture leaf, a driver section which drives the linear member a specific amount, and the like. One end of the linear member is secured to an aperture leaf through a connection section tangentially to the outer arc of the aperture leaf, and the other end is connected with a slider provided in a driver section. The slider is connected with a driving source through a connection portion and moves along an axial direction of a drive shaft inserted into a base accompanying rotation of the drive shaft. A load accompanying the movement of the slider is directly transmitted to the linear member, and the aperture leaf is driven a specific amount due to the load.
摘要:
A load port (100) comprises: a mounting base (101) for mounting a wafer carrier (10); a nozzle unit (110) having nozzle outlets (111) for generating an outflow/inflow of a purge gas in a direction approximately parallel to spaces (A) between wafers (1) stored within the wafer carrier (10) so as to replace the atmosphere of the wafer carrier (10); a driving unit including a nozzle driving motor (166) etc., for extending the nozzle unit (110) toward a door opening portion (202) of the load port (100) formed near a wall face (201) of a clean room where a wafer processing apparatus has been installed; an airtight space forming unit (120) which can be connected to a container opening (12) in an airtight manner, thereby forming an airtight space (B) that communicates with the interior space of the wafer carrier (10); a control unit (160) for controlling the switching of the flow of the purge gas generated by the nozzle unit (110) according to the oxygen concentration that indicates the purge degree of the atmosphere of the wafer carrier (10); etc.
摘要:
A pod cover removing-installing apparatus can open and close any covers for a variety of pods made by a various manufactures, can satisfy an allowable distortion error capable of being normally operated even if conditions such as temperature, humidity, and can remove and install the cover without causing it to collide with any one of the parts of the pods. The pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, the inside of which is kept extremely clean, by causing the cover to engage a door for an opening of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings. The apparatus is provided with positioning pins for positioning the cover, a fine adjustment mechanism for fine adjustment of the positioning pins, and a holding mechanism for holding the position of the cover engaging the positioning pins.
摘要:
A cover can be unlocked even if a rectangular engaging groove runs out of alignment to some extent during previous steps or during a carrying operation from a previous step. A T-shaped key 14c consists of a head 141 and a neck 142 functioning as a rotation axis for the head 141. The head 141 has four inclined sides 143 along the both longitudinal sides tapering from the center toward the end. The T-shaped key 14c also has chamfers 144 formed on the topside of each inclined sides 143.
摘要:
The present invention provides an eye accommodation function state measurement device capable of always obtaining accurate measurement results regardless of the cylinder power, measurement date, and the like, and enabling measurement under conditions the same as the previous measurement conditions. The eye accommodation function state measurement device includes a target projection section 62 which projects a target 62a onto a subject's eye 60, and a target moving mechanism which moves the position of the target 62a along the direction of the optical axis of the subject's eye 60, the eye accommodation function state measurement device disposing the target 62a at a plurality of positions by using the target moving mechanism, and measuring the eye accommodation function state of the subject's eye 60 at each position, the eye accommodation function state measurement device including a target position select section 67 which can select the initial position of the target 62a from a plurality of positions, and a target position correction section 68 which can correct the initial position of the target 62a to an arbitrary position. The target position select section 67 can select one of at least three kinds of power values including “spherical power”, “spherical power+cylinder power/2”, and “spherical power+cylinder power”. as the initial position of the target 62a.
摘要:
A glass run includes a main body portion and a pair of seal lips. Further, the glass run is constituted by a vehicle exterior side molded member and a vehicle interior side molded member divided at a bottom portion of the main body portion. Further, the vehicle exterior side molded member and the vehicle interior side molded member include engaging portions for engaging to be integrated with each other. By integrating the vehicle exterior side molded member and the vehicle interior side molded member by the engaging portions, the vehicle exterior side molded member is restricted from being shifted to move relative to the vehicle interior side molded member in a vehicle width direction and in a longitudinal direction of the vehicle interior side molded member.
摘要:
The present invention provides an eye accommodation function state measurement device which places only a small burden on the subject, allows confirmation of an intermediate measurement result, and is more conveniently used. The eye accommodation function state measurement device disposes an image at a plurality of positions by using an image moving mechanism, and measures the accommodation function state of the subject's eye at each position. The eye accommodation function state measurement device includes a control section (65) which provides a measurement suspension period (S6 to S10) in which the measurement is suspended. In the measurement suspension period, the eye accommodation function state measurement device calculates the eye accommodation function state (S7), displays the intermediate measurement result of the eye accommodation function state (S8), or transmits data from the control section (65) to an external storage section (69) (S9).
摘要:
A pod cover removing-installing apparatus can open and close any covers for a variety of pods made by a various manufactures, can satisfy an allowable distortion error capable of being normally operated even if conditions such as temperature, humidity, and can remove and install the cover without causing it to collide with any one of the parts of the pods. The pod cover removing-installing apparatus to remove and install a cover 203 for an opening 202 of a pod 200, of which the inside is kept extremely clean, by causing the cover to engage a door 13 for an opening 12 of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings. The apparatus is provided with positioning pins 14a, 14b for positioning the cover 13, a fine adjustment mechanism 20 for fine adjustment of the positioning pins 14a, 14b, and a holding mechanism 40 for holding the position of the cover 13 engaging the positioning pins 14a, 14b.
摘要:
In the end portion of a weather strip, the projecting base end portion of a hollow seal portion is left as a first uncut-off portion, whereas the main portion of the hollow seal portion is cut off. The thus treated end portion is set in a split mold. In this setting, a cooling mold is brought into contact with a decorative high molecular layer. Also, the first uncut-off portion is pushed down in a direction away from the decorative high molecular layer is thereby pressed against the outer surface of the side wall of a trim portion. Also, a first middle mold is disposed opposed to the outer surface of the side wall to thereby form a cavity, while the cavity and decorative high molecular layer are separated from each other through the first uncut-off portion. Molding material is injected into the cavity to thereby form a mold forming portion.
摘要:
A method for producing a weather strip of which an external surface is covered with a finishing covering layer such as a fabric layer, the weather strip having a sealing portion which is partially formed by using a mold without the damage of the covering layer due to the heat of the mold. The method includes extruding a weather strip having a trim portion, a sealing portion projecting from one side wall of the trim portion, and a lip extending along a border between the trim portion and the sealing portion, covering an external surface of the trim portion of the continuously extruded weather strip with a covering layer continuously, cutting the sealing portion away from one part of the extruded weather strip, placing the one part of the extruded weather strip within a mold so that the lip is interposed between a heated mold member of the mold and one widthwise end edge of the covering layer in pressing contact therewith, and injecting a molding material into the mold to form a molded sealing portion in the one part of the weather strip from which the extruded sealing portion is cut away.