公开(公告)号：US07025619B2

公开(公告)日：2006-04-11

申请号：US11074448

申请日：2005-03-08

Applicant: Kenneth Tsui ,  Aaron Geisberger

Inventor： Kenneth Tsui ,  Aaron Geisberger

IPC: H01R13/627

CPC classification number: B81C3/008 ,  B81B2201/13 ,  B81C99/002

Abstract: An apparatus including at least three deflectable members each configured to deflect during assembly with a component, and also configured to remain in contact with the component after assembly with the component. At least one of the deflectable members and the component has a thickness not greater than about 1000 microns.

Abstract translation: 一种装置，包括至少三个可偏转构件，每个可挠曲构件构造成在与构件组装期间偏转，并且还构造成在与构件组装之后保持与构件接触。 可偏转构件和部件中的至少一个具有不大于约1000微米的厚度。

公开(公告)号：US06806991B1

公开(公告)日：2004-10-19

申请号：US10219044

申请日：2002-08-14

Applicant: Neil Sarkar ,  Aaron Geisberger ,  Matthew D. Ellis

Inventor： Neil Sarkar ,  Aaron Geisberger ,  Matthew D. Ellis

IPC: G02B2600

CPC classification number: G01Q10/04 ,  G02B26/0841

Abstract: In one embodiment, the present invention is directed to a system that enables controllable positioning of a fully-released micro-stage. The fully-released micro-stage may be assembled onto a detector substrate that enables micro-positioning feedback. A payload structure (e.g., a lens, mirror, manipulator, and/or the like) may be assembled or coupled onto the fully-release microstage. Snap connectors may facilitate the mechanical coupling associated with assembly of the various components. The fully-released microstage may be actuated by motion amplified actuators that are coupled to anchored flexures. Moreover, the actuation of the fully-release microstage may produce fully decoupled movement by coupling the actuators and respective flexures to the stage in a mirrored fashion.

Abstract translation: 在一个实施例中，本发明涉及一种使得能够可控地定位完全释放的微型平台的系统。 完全释放的微型级可以组装到能够进行微定位反馈的检测器基板上。 有效载荷结构（例如，透镜，反射镜，操纵器和/或类似物）可以组装或耦合到完全释放的微步骤上。 卡扣连接器可以促进与各种部件的组装有关的机械联接。 完全释放的微步骤可以由耦合到锚定的挠曲件的运动放大致动器来致动。 此外，通过将致动器和相应的挠曲件以镜像的方式连接到平台，完全释放微型台架的致动可以产生完全解耦的运动。

公开(公告)号：US06617185B1

公开(公告)日：2003-09-09

申请号：US10071772

申请日：2002-02-07

Applicant: Aaron Geisberger

Inventor： Aaron Geisberger

IPC: H01L2100

CPC classification number: B81C1/00126 ,  B81B2201/031 ,  B81B2201/13 ,  B81C2201/0109 ,  H01H2001/0047 ,  H01H2001/0063 ,  H01H2061/006

Abstract: In one embodiment, the present invention is directed to a method of fabricating a micro-mechanical latching device, comprising: depositing a structural layer in a fabrication plane, wherein the first structural layer possesses a topography; depositing a sacrificial layer adjacent to the first layer such that the sacrificial layer conforms to the topography of the first layer; depositing a second structural layer that conforms to the topography of the first layer; removing the sacrificial layer; and using at least the first structural layer and second structural layer to fabricate the micro-mechanical latching device.

Abstract translation: 在一个实施例中，本发明涉及一种制造微机械闭锁装置的方法，包括：在制造平面中沉积结构层，其中所述第一结构层具有形貌; 沉积与第一层相邻的牺牲层，使得牺牲层符合第一层的形貌; 沉积符合第一层的形貌的第二结构层; 去除牺牲层; 并且至少使用第一结构层和第二结构层来制造微机械闭锁装置。

公开(公告)号：US20060005602A1

公开(公告)日：2006-01-12

申请号：US10884904

申请日：2004-07-06

Applicant: Kenneth Tsui ,  Aaron Geisberger

Inventor： Kenneth Tsui ,  Aaron Geisberger

IPC: G01N3/62

CPC classification number: G01N3/62 ,  B81C3/002 ,  G01G23/01 ,  G01N2203/021 ,  G01N2203/0286

Abstract: An apparatus including a micro-mechanical calibration member having at least a portion that is elastically biasable away from a neutral position in response to mechanical contact. The apparatus may also include a fixed member proximate the micro-mechanical calibration member which may be referenced to automatically detect deflection of the micro-mechanical calibration member away from the neutral position. The micro-mechanical calibration member may also be configured to receive a micro-mechanical contacting member to provide the mechanical contact employed to bias the micro-mechanical calibration member away from the neutral position.

公开(公告)号：US20050161751A1

公开(公告)日：2005-07-28

申请号：US10762848

申请日：2004-01-22

Applicant: Aaron Geisberger ,  Niladri Sarkar

Inventor： Aaron Geisberger ,  Niladri Sarkar

IPC: B81B3/00 ,  H01G7/00 ,  H01L27/14

CPC classification number: B81B3/0018

Abstract: A MEMS device including a plurality of actuator layers formed over a substrate and a bimorph actuator having a substantially serpentine pattern. The serpentine pattern is a staggered pattern having a plurality of static segments interlaced with a plurality of deformable segments. Each of the plurality of static segments has a static segment length and each of the plurality of deformable segments has a deformable segment length, wherein the deformable segment length is substantially different than the static segment length. At least a portion of each of the plurality of deformable segments and each of the plurality of static segments is defined from a common one of the plurality of actuator layers.

Abstract translation: 一种MEMS器件，包括形成在衬底上的多个致动器层和具有基本蛇形图案的双压电晶片致动器。 蛇形图案是具有与多个可变形段交织的多个静态段的交错图案。 多个静态段中的每一个具有静态段长度，并且多个可变形段中的每一个具有可变形段长度，其中可变形段长度基本上不同于静态段长度。 多个可变形段中的每一个的至少一部分和多个静态段中的每一个均由多个致动器层中的公共的一个限定。

公开(公告)号：US07012491B1

公开(公告)日：2006-03-14

申请号：US10238319

申请日：2002-09-10

Applicant: Aaron Geisberger ,  Matthew D. Ellis

Inventor： Aaron Geisberger ,  Matthew D. Ellis

IPC: H01H51/22

CPC classification number: B25J15/12 ,  B25J7/00 ,  B81B3/0018 ,  B81B2201/13 ,  B81C99/002

Abstract: A system and method for storing potential energy in a microcomponent is disclosed comprising a multi-stable element having two or more equilibrium states and a stopper to restrict the multi-stable element from entering at least one of the two or more equilibrium states. The pre-charged microcomponent may then preferably be transported to another location and use the stored potential energy to perform some action.

Abstract translation: 公开了一种用于在微元件中存储势能的系统和方法，其包括具有两个或多个平衡状态的多稳态元件和用于限制所述多稳态元件进入所述两个或多个平衡状态中的至少一个的止动器。 然后可以优选将预充电的微元件运送到另一位置，并使用存储的势能来执行一些动作。

公开(公告)号：US20050181658A1

公开(公告)日：2005-08-18

申请号：US10778460

申请日：2004-02-13

Applicant: Kenneth Tsui ,  Aaron Geisberger ,  George Skidmore

Inventor： Kenneth Tsui ,  Aaron Geisberger ,  George Skidmore

IPC: B81B3/00 ,  B81B7/00 ,  B81C3/00 ,  H01R11/30 ,  H01R13/627 ,  H01R24/00 ,  H01R43/00

CPC classification number: B81C99/002 ,  B81B2201/13 ,  B81C3/008

Abstract: A MEMS microconnector including a compliant handle and a deflectable connection member. The compliant handle is configured to frictionally engage a manipulation probe. The deflectable connection member includes a first end coupled to the handle and a second end configured to deflect and thereby engage a receptacle in response to disengagement of the manipulation probe from the handle.

Abstract translation: 一种MEMS微连接器，其包括柔性手柄和可偏转连接构件。 顺应手柄被配置为摩擦地接合操纵探针。 可偏转连接构件包括联接到手柄的第一端和构造成响应于操纵探针与手柄的分离而偏转并因此接合插座的第二端。

公开(公告)号：US06718764B1

公开(公告)日：2004-04-13

申请号：US10184492

申请日：2002-06-28

Applicant: Niladri Sarkar ,  Aaron Geisberger

Inventor： Niladri Sarkar ,  Aaron Geisberger

IPC: F01B2910

CPC classification number: G02B6/4226 ,  B81B3/0024 ,  B81B2201/032

Abstract: A system and method of adjusting the power off positioning of a microactuator is disclosed. The microactuator has a first power off position and comprises a bimorph component. The bimorph comprises at least two materials, wherein the materials have different thermal expansion characteristics. When heated, the bimorph component of the microactuator bends due to asymmetric thermal expansion of the materials. If one of said materials is forced beyond a yield point, then when cooled, the actuator assumes a second power off position. The microactuator maintains the second power off position due to stress in the bimorph, which is induced by forcing the material beyond its yield point.

Abstract translation: 公开了一种微调制动器的停电定位调节系统和方法。 微致动器具有第一断电位置并且包括双压电晶片部件。 双压电晶片包括至少两种材料，其中材料具有不同的热膨胀特性。 当加热时，微致动器的双压电晶片由于材料的不对称热膨胀而弯曲。 如果所述材料之一被强制超过屈服点，则当冷却时，致动器采取第二次断电位置。 微致动器由于双压电晶片中的应力而保持第二断电位置，这是通过迫使材料超出其屈服点而引起的。

公开(公告)号：US06698201B1

公开(公告)日：2004-03-02

申请号：US10163331

申请日：2002-06-05

Applicant: Niladri Sarkar ,  Aaron Geisberger

Inventor： Niladri Sarkar ,  Aaron Geisberger

IPC: F01B2910

CPC classification number: F03G7/06

Abstract: Linear bimorph actuators are cascaded together in serpentine array structures to achieve large angle rotary displacements. Bimorph units contain single material beams that remain straight when heated coupled with substantially parallel bilayer beams that deflect when heated, due to differential thermal expansion of the layers. For a bilayer beam, advantageous materials are gold on top of polysilicon. The angular deflection is amplified by cascading to achieve cumulative rotational displacements up to greater than 90 degrees. Successive beams can be connected electrically in series to provide a continuous current path for resistive joule heating. In various embodiments, the actuator is fully permanently anchored or releasably attached to a substrate, or at least a segment of the substrate is removed from beneath the actuator to prevent mechanical interference. Embodiments enable single and plural-axis rotational displacement and manipulation of payloads, for example microcomponents, mirrors, and pick-and-place devices.

Abstract translation: 线性双压电晶片致动器以蛇形阵列结构级联在一起，以实现大角度旋转位移。 双压电晶片单元包含单个材料梁，当加热时与基本上平行的双层梁耦合时保持直线，该双层梁由于层的不同热膨胀而在加热时偏转。 对于双层光束，有利的材料是多晶硅顶部的金。 角度偏转通过级联放大以实现高达90度的累积旋转位移。 连续的光束可以串联电连接以提供用于电阻焦耳加热的连续电流路径。 在各种实施例中，致动器被完全永久地锚固或可释放地附接到基板，或者至少一个基板的部分从致动器下方移除以防止机械干扰。 实施例允许单轴和多轴旋转位移和有效载荷的操纵，例如微型部件，反射镜和拾取和放置装置。

公开(公告)号：US07637142B2

公开(公告)日：2009-12-29

申请号：US11464423

申请日：2006-08-14

Applicant: Kenneth Tsui ,  Aaron Geisberger

Inventor： Kenneth Tsui ,  Aaron Geisberger

IPC: G01B3/30

CPC classification number: B81C3/002 ,  B81B2203/0118 ,  B81B2203/056

Abstract: An apparatus including a micro-mechanical calibration member having at least a portion that is elastically biasable away from a neutral position in response to mechanical contact. The apparatus may also include a fixed member proximate the micro-mechanical calibration member which may be referenced to automatically detect deflection of the micro-mechanical calibration member away from the neutral position. The micro-mechanical calibration member may also be configured to receive a micro-mechanical contacting member to provide the mechanical contact employed to bias the micro-mechanical calibration member away from the neutral position.

Abstract translation: 一种包括微机械校准构件的装置，其具有响应于机械接触而至少部分弹性偏离中立位置。 该装置还可以包括靠近微机械校准构件的固定构件，其可被参考以自动地检测微机械校准构件远离中立位置的偏转。 微机械校准构件还可以被配置为接收微机械接触构件以提供用于将微机械校准构件偏离中立位置的机械接触。