公开(公告)号：US20210396520A1

公开(公告)日：2021-12-23

申请号：US16906484

申请日：2020-06-19

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Laura Cornelia Popa

IPC: G01C19/5769 ,  G01C19/5733

Abstract: Couplers for selectively coupling in-plane and out-of-plane motion between moving masses are provided herein. In particular, aspects of the present application provide for a coupler configured to couple in-plane motion between moving masses while decoupling out-of-plane motion between the moving masses. The selective couplers as described herein may be used in a device, such as a microelectromechanical systems (MEMS) inertial sensor. In some embodiments, a MEMS inertial sensor comprises a first mass configured to move in-plane, a second mass configured to move in-plane and out-of-plane, and a coupler coupling the first and second masses and comprising two levers coupled to an anchor point by respective tethers and coupled to each other by a spring.

公开(公告)号：US20180172447A1

公开(公告)日：2018-06-21

申请号：US15383318

申请日：2016-12-19

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

IPC: G01C19/5747 ,  G01C19/5769 ,  G01P15/14

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769 ,  G01P15/14

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

公开(公告)号：US20180172446A1

公开(公告)日：2018-06-21

申请号：US15383519

申请日：2016-12-19

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  Jeffrey A. Gregory

IPC: G01C19/567 ,  G01C19/5712

CPC classification number: G01C19/567 ,  G01C19/5712 ,  G01C19/574

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit linear anti-phase motion. Some of the described couplers are flexural and provide two degrees of freedom of motion of the coupled masses. Some such couplers are positioned between the coupled masses. Using multiple couplers which are arranged to move in linearly opposite directions during linear anti-phase motion of the coupled masses provides momentum-balanced operation.

公开(公告)号：US20220057210A1

公开(公告)日：2022-02-24

申请号：US17515271

申请日：2021-10-29

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US11193771B1

公开(公告)日：2021-12-07

申请号：US16894717

申请日：2020-06-05

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US20190310087A1

公开(公告)日：2019-10-10

申请号：US15946119

申请日：2018-04-05

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer

IPC: G01C19/5712 ,  G01C19/5747

Abstract: Microelectromechanical systems (MEMS) devices (such as gyroscopes) configured to reject quadrature motion are described. Quadrature motion arises for example when the drive motion of a gyroscope couples to the sense motion of a gyroscope even in the absence of an angular motion. In some circumstances, quadrature motion may result from the fact that the springs used in a gyroscope have slanted sidewall, which can impart torque in the mechanics of the gyroscope. MEMS gyroscope of the type described herein may be configured to reject quadrature motion by using only springs oriented substantially parallel to the drive direction. One such spring includes only beams parallel the drive directions, and optionally. These MEMS gyroscopes may be used to sense, among others, roll and pitch angular rates.

公开(公告)号：US10087070B2

公开(公告)日：2018-10-02

申请号：US15450797

申请日：2017-03-06

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  See-Ho Tsang

IPC: B81B7/02 ,  B81C1/00 ,  B81B7/00

Abstract: The cap wafer for a MEMS device includes multiple electrically isolated electrodes that can be bonded and electrically connected to separate electrical contacts on a MEMS device wafer. The electrically isolated electrodes can be used for any of a variety of functions, such as for apply a force to a movable MEMS structure on the MEMS device wafer (e.g., for driving resonance of the movable MEMS structure or for adjusting a resonance or sense mode of the movable MEMS structure) or for sensing motion of a movable MEMS structure on the MEMS device wafer. Since the electrodes are electrically isolated, different electrodes may be used for different functions.

公开(公告)号：US09604841B2

公开(公告)日：2017-03-28

申请号：US14534663

申请日：2014-11-06

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  See-Ho Tsang

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/007 ,  B81B2203/0118 ,  B81B2203/04 ,  B81B2207/097 ,  B81C1/00095 ,  B81C2203/0109 ,  B81C2203/0118

Abstract: The cap wafer for a MEMS device includes multiple electrically isolated electrodes that can be bonded and electrically connected to separate electrical contacts on a MEMS device wafer. The electrically isolated electrodes can be used for any of a variety of functions, such as for apply a force to a movable MEMS structure on the MEMS device wafer (e.g., for driving resonance of the movable MEMS structure or for adjusting a resonance or sense mode of the movable MEMS structure) or for sensing motion of a movable MEMS structure on the MEMS device wafer. Since the electrodes are electrically isolated, different electrodes may be used for different functions.

公开(公告)号：US11279614B2

公开(公告)日：2022-03-22

申请号：US16457865

申请日：2019-06-28

Applicant: Analog Devices, Inc.

Inventor： Charles Blackmer ,  Jeffrey A. Gregory ,  Nikolay Pokrovskiy ,  Bradley C. Kaanta

IPC: B81C1/00 ,  G01C19/5755 ,  G01P15/08

Abstract: Microelectromechanical system (MEMS) inertial sensors exhibiting reduced parasitic capacitance are described. The reduction in the parasitic capacitance may be achieved by forming localized regions of thick dielectric material. These localized regions may be formed inside trenches. Formation of trenches enables an increase in the vertical separation between a sense capacitor and the substrate, thereby reducing the parasitic capacitance in this region. The stationary electrode of the sense capacitor may be placed between the proof mass and the trench. The trench may be filled with a dielectric material. Part of the trench may be filled with air, in some circumstances, thereby further reducing the parasitic capacitance. These MEMS inertial sensors may serve, among other types of inertial sensors, as accelerometers and/or gyroscopes. Fabrication of these trenches may involve lateral oxidation, whereby columns of semiconductor material are oxidized.

公开(公告)号：US10415968B2

公开(公告)日：2019-09-17

申请号：US15383318

申请日：2016-12-19

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  John A. Geen ,  Jeffrey A. Gregory

IPC: G01C19/5747 ,  G01C19/5769 ,  G01P15/14 ,  G01C19/574

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.